JPH0287984A - Method and device for moving object under cryogenic environment - Google Patents

Abstract

PURPOSE:To move an object reliably and accurately by making transition from superconducting phase to normal conducting phase only in the driven zone of a moving board for supporting the object through application of external control field or control current. CONSTITUTION:An object moving device 10 is placed in a container 11 and used while being immersed into cryogenic refrigerant 12. A moving board 14 for supporting an object 13 is made of superconducting material, where the driven zones 15, 15 of the moving board 14 being subjected to lateral driving force through magnetic force are floated in the direction of an arrow fL in the refrigerant 12 through magnetic levitation mechanisms 19, 19, based on Meissner effect, such that mechanical friction is minimized for the motion in X direction. The moving board 14 can be moved to the right or left by a predetermined distance in X direction by means of the driving flux fD produced in the drive mechanism 16.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention is particularly useful for positioning objects to be observed or processed in an extremely low temperature environment in the observation area or processing area. The present invention relates to a method and apparatus for moving well.

<Prior art> The extremely low temperature state where superconductivity occurs has little thermal disturbance or thermal vibration, and is therefore suitable for observing the microscopic state of materials, or for ultra-fine, high-temperature processing of materials. Are suitable.

However, in order to realize such observation and processing, a device that can move the object to be observed or processed with a high degree of rust is required. No equipment provided.

For example, in a normal temperature environment, it can be used as a highly accurate moving device.
There are steppers for lithography used in the production of semiconductor devices, etc., but these cannot be used in extremely low temperature environments.

<Problems to be Solved by the Invention> As mentioned above, an object moving device that functions satisfactorily even in an extremely low temperature environment has never been provided5, and even if one dares to look for it, it is difficult to find an object moving device that can function satisfactorily even in an extremely low temperature environment. It could be considered that the so-called Walker mechanism was used.

However, in the case of this walker mechanism, a problem that is expected to occur is how to compensate for the temperature, since the characteristics under a room temperature environment are significantly different from those under an extremely low temperature environment.

I don't think this solution is easy at all, and I don't think it would be possible to obtain sufficient reliability in terms of granularity.

Furthermore, even if these obstacles could be overcome,
In principle, this type of walker mechanism cannot move an object over a long distance in a jumping motion.

In view of these conventional circumstances, the present invention provides a moving mechanism that operates with high reliability even in an extremely low temperature environment, has good accuracy, and can move objects over long distances at once if necessary. This is what I am trying to do.

In order to achieve the above-mentioned object, the present invention provides a method in which an object that is in a superconducting phase in an extremely low temperature environment exhibits a completely diamagnetic phenomenon known as the so-called Meissner effect. However, if the superconducting phase is intentionally broken in an extremely low temperature environment and the transition is made to the normal conducting phase, magnetic flux can pass through the part that has transitioned to the normal conducting phase.

Also, the magnetic flux between a pair of magnetic poles is stable when it passes through a magnetic path with the lowest magnetic resistance, and when it passes through a magnetic path with a relatively large magnetic resistance, it becomes stable when it passes through a magnetic path with a relatively large magnetic resistance. When a small magnetic path can be taken, the principle that a moving driving force can be applied to an object through the magnetic path with small magnetic resistance is also utilized.

That is, in the present invention, as a method for moving an object in an extremely low temperature environment, a moving plate that supports the object is provided, a predetermined planar area of this moving plate is set as a driven area, and a predetermined area in this driven area is Only the area region is caused to transition from the superconducting phase to the normal conducting phase even in the cryogenic environment by applying an external control magnetic field or a control current.

On the other hand, a driving magnetic field is applied from above and below the driven region (generally in a direction perpendicular to the seven sides of the driven region), and the accompanying driving magnetic flux locally transitions to the normal conductive phase as shown in 1. The driving magnetic flux is allowed to pass through the driven area or the front and back directions of the moving plate only through the area area where the driving magnetic flux is generated, and the moving plate is moved with a force that causes the driving magnetic flux to become stable in its magnetic flux distribution.

The present invention can also be defined as a device configuration, in which case the following constructor group is provided.

■: A moving plate that supports the object to be moved.

■In the driven area of the moving plate, which is a part of the area other than the area supporting the object, a plurality of pieces are arranged in parallel at intervals in the moving direction of the moving plate, each of which receives an external control magnetic field. A magnetic shutter region that can transition from a superconducting phase to a normal conducting phase even in an extremely low temperature environment by applying an applied or controlled current.

(2) A pair of magnetic poles capable of applying a driving magnetic field from above and below to the above driven region.

(ii) Selectively applying the external control magnetic field or the control current in order to transition one or more magnetic shutter regions selected from among the plurality of magnetic shutter regions to the normal conducting phase even in an extremely low temperature environment. Selection circuit means.

By providing such a constructor, the above pair 1i
As the driving magnetic flux extending between Vi passes through the movable plate in the front and back direction only through the warm shutter region where it has been selected by the selection circuit means and has transitioned to the normal conducting phase, the magnetic flux distribution is stabilized in the direction of the movable plate. generates a lateral driving force against the

In this case, the tips of the above-mentioned pair of magnetic poles may be sharpened to increase the density of the driving magnetic flux passing between them, or alternatively, or in addition to stiffness, the tips of the pair of magnetic poles may be made sharp to increase the density of the driving magnetic flux between them. A fixed plate is further provided in parallel, and on this fixed plate, a magnetic flux passage area is fixedly formed in advance at a predetermined position along the moving direction of the movable plate, and a magnetic flux passage area through which magnetic flux can always pass is formed. The fixed plate portion except for may be made into a superconducting phase in an extremely low temperature environment.

In particular, when a magnetic flux passing region is fixedly provided in advance on the fixed plate in this manner, this region may be constituted by a through hole bored vertically through the fixed plate. This through hole can actually be in the form of an elongated slit extending across the width of the fixing plate, as seen in the embodiments described below.

On the other hand, in order to selectively allow the magnetic flux to pass through the magnetic flux passing area provided on the fixed plate, the magnetic flux passing area of this fixed plate is also provided with, as described above regarding the magnetic shutter area of the moving plate.
Such a magnetic shutter configuration may also be adopted.

Furthermore, the number of magnetic shutter regions provided on the fixed plate is not limited to one.

In other words, a plurality of magnetic shutters provided on the fixed plate are also arranged side by side at intervals along the moving direction of the movable plate, and accordingly, from time to time, in the plurality of magnetic shutter areas provided on the fixed plate. Circuit means may be provided for selectively applying the external control magnetic field or the control current described above in order to transition one or more selected magnetic shutter regions to the normal conducting phase.

On the other hand, when specifically realizing the magnetic shutter area provided in the driven area of the moving plate as described above, the following configuration can be considered.

It is buried in a groove formed in the movable plate or fixed plate.
This magnetic shutter region is made of a superconductor that is electrically insulated from the surroundings, and the transition of this superconductor to the normal conducting phase is performed by directly passing a control current through it.

Second, the movable plate portion other than the magnetic shutter area and the magnetic shutter area are not particularly distinguished in terms of material or geometry, but are faced to the surface of the movable plate, and the movable plate It is defined as a region where the superconducting phase is locally broken and transitioned to the normal conducting phase by the control magnetic field generated when a control current is applied to a control current line extending in a direction perpendicular to the direction of movement.

Furthermore, as a third configuration, this magnetic shutter region is configured as a region where a weak Josephson junction can be formed.

In this case, the weak Josephson junction area is also controlled by the control magnetic field generated when a control current is applied to a control current line facing the weak Josephson junction area and extending in a direction perpendicular to the moving direction of the moving plate. It can be made to transition to the normal conducting phase.

Such a magnetic shutter configuration can also be applied to the case where the fixed plate is also provided with the same type of magnetic shutter, as described above. In that case, the structure adopted as a magnetic shutter by the movable plate and the fixed plate is selected from the above three structures, but may be different from each other.

Of course, in order to reduce or almost eliminate the mechanical frictional resistance during movement of the moving plate, it is preferable to form a gap between each pair of magnetic poles and the moving plate so that they do not touch each other, For the same reason, it is preferable to form a gap between the movable plate and the fixed plate so that they do not touch each other.

In particular, in order to prevent the movable plate from touching the magnetic pole or the fixed plate, an appropriate mechanical guide means may be used, but it is difficult to use this method in an extremely low temperature environment. Since the device is used, it can be used on the same principle as the Meisner magnetic bearing, even if the entire device is immersed in a cryogenic refrigerant such as liquid helium to create a cryogenic environment. In order to ensure that the movable plate is in a stable floating position relative to the magnetic poles and fixed plate, and also to be able to move smoothly in the lateral direction, magnetic field generating means, which may generally be configured as a superconducting electromagnet, is placed facing the movable plate. Good.

However, in that case, at least the part of the moving plate facing the magnetic field generating means for the float 1 must be made of a superconducting material that exhibits complete diamagnetic properties in an extremely low temperature environment. Generally speaking, it is rather troublesome to make a part of the moving plate from such a superconducting material, and it is thought that the entire moving plate is usually constructed from a suitable superconducting material.

Therefore, if a suitable superconductor, which is similarly buried in the groove of the moving plate and is electrically insulated from the surroundings, is used to construct the magnetic shutter area described above, the moving plate is It is preferable to construct this using a material with a smaller critical magnetic field than the superconducting material that constitutes it.

For example, if the movable plate is made of niobium, lead can be selected as the magnetic shutter region constituent member buried therein while maintaining insulation.

In addition, the grooves formed in the moving plate are generally formed into thin slits that are quite narrow in width along the moving direction of the moving plate and have a length in the direction orthogonal to the moving direction. It seems easiest to configure the magnetic shutter area by burying the body, but in such a case,
An insulating film may be applied to the linear superconductor in advance.

<Functions and Effects> When a magnetic field is generated between a pair of magnetic poles, the magnetic flux generated between the magnetic poles tries to take the most stable magnetic path with the lowest magnetic resistance and the lowest magnetic potential. Therefore, when there is no magnetic obstacle between the pair of magnetic poles, the magnetic flux between the pair of magnetic poles passes through a magnetic path that literally connects the pair of magnetic poles with a straight line distance, even in a geometrical sense.

On the other hand, if the magnetic flux has to pass through a magnetic path that is detoured in the lateral direction with respect to the straight line distance between a pair of Mi magnetic poles as described above, the magnetic flux will physically move in the opposite direction to the direction in which it was detoured. generate force.

The present invention most fundamentally uses this principle, and by locally forming the intentional magnetic flux detour,
Depending on the extent of the detour, that is, the degree to which the intentionally formed magnetic path is deviated in the lateral direction with respect to the position connecting the pair of magnetic poles in a straight line, the lateral direction in which the magnetic flux passing through the detour is generated. The drive torque moves the moving plate forming the intentional magnetic flux detour, thereby moving the object supported by the moving plate.

In other words, when a driving magnetic field is applied from above and below the driven area of the moving plate (not limited to this, it may be from an oblique direction depending on the case, but generally from a vertical direction), the 0 If the position of the local area area that is to be transitioned to the normal conductive phase is shifted laterally from the position where the magnetic resistance is the smallest between the pair of magnetic poles as described above, it is possible to Because the region is in the superconducting phase and exhibits complete diamagnetism, the driving magnetic flux has no choice but to pass through the area that has transitioned to the normal conducting phase, because the area that has transitioned to the normal conducting phase is shifted laterally. The movable plate is moved in a direction that eliminates the misalignment using a torque corresponding to the degree of misalignment.

As the moving plate moves, this lateral drive torque weakens as the normally conducting phase transition region approaches the position between the pair of magnetic poles where the magnetic resistance is the lowest, and eventually the drive magnetic flux becomes the most stable. In principle, it becomes zero when the lateral position of the normally conducting phase transition region is geometrically aligned with the position of the magnetic path with the lowest magnetic resistance between the pair of magnetic poles, and the moving plate moves to that position. Stop at.

In other words, the basic movement pitch of the movement corresponds to the distance by which the magnetic flux detour was initially shifted in the lateral direction; It will be appreciated that this pitch can be varied by selecting the lateral position of the region transitioned to the conductive phase.

For example, if a plurality of magnetic shutter regions arranged in parallel at intervals in the moving direction of the moving plate are used as magnetic flux detours formed by selectively and locally transitioning to the normal conducting phase, which magnetic The movement pitch can be changed depending on whether the shutter region is transitioned to the normal conducting phase.

To be more specific about this, let us describe an example of the operation of the method or device of the present invention based on a simple model. It is assumed that there is a first normal conductive phase transition possible region (magnetic shutter region) at the position 1, and there are second and third normal conductive phase transition possible regions shifted to the left by a pitch P.

Here, even if a magnetic field is generated between the pair of magnetic poles in a state where the first normal conductive phase transition possible region is transitioned to the normal conductive phase, the moving plate will not move. The magnetic flux that passes through the region where the normal conductive phase transition is possible passes through the electrical path with the lowest magnetic resistance,
This is because it is the most stable state.

On the other hand, when only the second normal conductive phase transition possible region is made to transition to the normal conductive phase and a magnetic field is generated between a pair of magnetic poles, the generated magnetic flux is shifted to the left by the pitch P. Since communication between a pair of magnetic poles is only possible through the normal conductive phase region, a driving torque is generated to move the second normal conductive phase region and the moving plate to the right in order to eliminate the misalignment. Move the moving plate to the right.

This movement stops when the second normal conductive phase region reaches the position initially occupied by the first normal conductive phase transition possible region.

When the moving plate stops, in order to prevent the normal conducting phase region from becoming magnetized, the driving magnetic field is quickly reduced and eliminated, and the state in which the second normal conducting phase transition possible region is changed to the normal conducting phase is also changed. All you have to do is resolve it and return to the original superconducting phase.

After that, if you want to move the moving plate again to the right by the pitch P as the unit pitch, in the above case, this time, move to the second normal conductive phase transition area that is directly below between the pair of magnetic poles. is considered to be a region corresponding to the first normal conductive phase transition possible region, and the third normal conductive phase transition possible region, which is further shifted to the left by a distance of 1lIP, is the second normal conductive phase transition possible region. As is clear when considered as equivalent, it is sufficient to transition the third normal conductive phase transition possible region to the normal conductive phase and apply the driving magnetic field again, and from then on, by repeating the same operation, the above pitch P is followed. Step feeding of the moving plate is possible.

In addition, when complying only with such basic operation, the magnetic flux generated between a pair of magnetic poles must be sufficiently converged to obtain a strong driving torque, and the minimum movement pitch as the minimum movement resolution must be sufficient. In this sense, the tips of the pair of magnetic poles should be sufficiently sharpened.

Similarly, the above-mentioned minimum movement resolution is also affected by the width dimension in the movement direction of the normally conductive phase transition possible region or the magnetic shutter region, and if this is narrowed to a range where magnetic flux can pass through,
The minimum phaseable pitch can be shortened accordingly. Of course, the spacing between these normal voltage-only transition IIJ function areas is directly? It is related to Hayashi's pitch P.

Considering this, although not limited to, such a normally conductive phase transition possible region or magnetic shutter region is
It is desirable that the area is formed as an elongated area having a narrow width along the moving direction of the moving plate and having a length of more than -F to a certain extent in the direction perpendicular to the width direction. As will be described later, manufacturing is also simplified.

Of course, from the above mechanism, it is clear that the moving plate can be driven in the opposite direction, and it is also possible to drive the moving plate in the opposite direction. , if the third normal conductive phase transition possible region suddenly transitions to the normal conductive phase, the driving magnetic field to be generated between the pair of magnetic poles will have appropriate strength to reach this third normal conductive phase region. As long as the moving plate is +JI which is twice the bit P which is the minimum resolution! It will move quickly (2XP).

Inferring from this - numerically developed, as long as the driving magnetic field is of suitable strength, according to the method or apparatus of the present invention:
In addition to fine movement of the moving plate with the minimum resolution being the basic pitch P related to the parallel arrangement of normally conductive phase transition possible regions, coarse movement is also possible where n is an integer greater than or equal to 1 and the distance is n times the P. I understand that there is something. In order to bring the object close to the observation area or processing area, coarse movement is used to quickly do this, and when the object is brought close to the observation area or processing area, fine movement is used to increase accuracy. It is possible to use them rationally.

These effects can basically be obtained even if various device configurations described in the summary are adopted as the device configuration of the present invention. However, the pitch P does not necessarily have to be constant between adjacent normal conductive phase transition possible regions, and may be different. For example, for the first coarse movement, the pitch P is set coarsely in advance, and when the moving plate is in position when it enters fine movement, the pitch between the normal conductive phase transition regions near the pair of magnetic poles becomes finer. It's okay to do that.

In addition, the circuit means for applying an external control field or control current in order to transition only selected magnetic shutters to the normal conducting phase even in an extremely low temperature environment is as follows. Become.

It is superior in controllability and operability.Furthermore, when looking at the present invention as a device configuration, in order to intentionally form a detour with high magnetic resistance when a driving electric field is applied, it is necessary to Regardless of whether a gap is provided between them in the direction of one direction or not, a fixed plate is further provided which overlaps the movable plate (particularly its driven area) when viewed from the F plane projection. The above operation can be satisfied even if a magnetic flux permeable region is formed at a predetermined position.

For example, if this fixed plate is made of superconducting material, only that part
By making a hole of an appropriate shape, such as a slit with the same size as the normally conductive phase transition area provided in the moving plate, a pair of! ! The driving magnetic flux between the poles can pass only through the selected normal conductive phase transition area on the moving plate and the through hole drilled in this fixed plate. By selecting the region to be transitioned to a phase, a driving torque can be generated, and the movement can be stopped at a place where the normally conductive phase transition region and the through hole overlap in plan projection.

However, the meaning of the through holes provided in the fixed plate is, in part, @i
In cases where there is a processing limit to sharpening the tips of the magnetic poles, this through-hole processing technology can sufficiently narrow down the magnetic flux passage area. As seen in the structure, even though the magnetic poles are flat, it is possible to sufficiently narrow down the driving magnetic flux and obtain high driving torque.In addition, the position of the through hole can be used to specify the position of the magnetic flux that should pass through. Since the movement of the moving plate can be controlled more precisely, the movement of the moving plate can be controlled more precisely.

In particular, if instead of the above-mentioned through-holes or slits, the area through which magnetic flux is allowed to pass through is provided on the fixed plate, and the structure is similar to that of the magnetic shutter area provided on the moving plate, when it is necessary to drive the moving plate, In addition to making it possible for the magnetic flux to pass through this part, it is possible to go further and increase the number of stiff magnetic shutter areas at a given pitch or at different pitches at any given time. It is desirable to be able to select an electric path that provides the optimum drive torque, and to be able to perform variable operations for more complex movement steps.

For example, although this may be a special case in some sense, the basic pitch P of the magnetic shutters formed on the movable plate is different from the basic pitch of the magnetic shutters formed on the fixed plate, such as (P+α). and each basic pitch P and (
In addition to moving the moving plate in steps by setting the distance corresponding to It is ideal for processing, etc.

In addition, this device is generally used while being immersed in a refrigerant such as liquid helium that is necessary to create a superconducting state in each part, but even in such a refrigerant, the mechanical In order to minimize the frictional resistance, it is preferable to use the known Meissner bearing structure to levitate the movable plate so that it does not come into mechanical contact with each magnetic pole or fixed plate.

In any case, according to the present invention, it is sufficiently practical as a mechanism for moving objects in the lateral direction (-dimensional), which has conventionally been required for observing and processing objects in cryogenic environments. ,
Moreover, it is possible to provide a highly reliable moving device that maintains high accuracy despite its simple mechanism.

Of course, the present invention can be easily extended to a two-dimensional movement mechanism. It is sufficient to provide a plurality of normally conductive phase transition possible regions or magnetic shutters provided on the moving plate, and to provide two groups in which the parallel directions of the groups are orthogonal to each other, and to apply a driving magnetic field to each group in a corresponding manner. .

<Embodiment> FIG. 1 shows the overall conceptual structure of an object moving device 10 in a cryogenic environment constructed according to the present invention.

The moving device 10 is used by being placed in a container 11 and immersed in a suitable cryogenic refrigerant 12 such as liquid helium. However, as will be described later, it is also possible to selectively cool down to extremely low temperatures only in each area in the IO of this device that requires the M conduction phase state, and in fact, such partial cooling is also possible in the existing method. It is possible to achieve this by using technology.

This device 10 first has a moving plate 14 that supports an object 13 to be observed or processed, and has a moving plate 14 that supports an object 13 to be observed or processed.
It has a length of , and this x-x direction is the moving direction of the moving plate.

In the embodiment described here, it is assumed that the movable plate 14 is made of a superconducting material as a whole, preferably a niobium-based material, but both ends of the movable plate are shaded in the drawing. A certain length region 15 in
．． Reference numeral 15 is a driven region 15, 15 which receives a horizontal driving force by a magnetic force by a drive mechanism 16.16, which will be described later and is simply surrounded by a frame of imaginary lines in this figure.

However, since magnetic force is generated, the driven area 1
The pair of magnetic poles 17 and 17 sandwiching the magnetic pole 5 and the magnetic flux fD selectively generated between them are also shown within this imaginary line frame 16° 16, albeit briefly.

Each driven region 15.15 of the moving plate 14 also corresponds to each magnetic pole 1.
7, 17, and the fixing plate 18, 18 that may be used in some embodiments as described later, so that mechanical frictional force can be minimized during movement in the X direction. , by a magnetic levitation mechanism 19.19 that utilizes the known Meissner effect, the arrow f in the refrigerant 12 is
It is being levitated in the direction of the L force.

For example, this magnetic levitation mechanism 19 has a simple structure as shown in FIG. It is accompanied by lines of magnetic force across the edges of
When the movable plate 14 maintains a superconducting state and is located sufficiently close to the core end, the 3Q and KA magnetic lines of force cannot enter the grain of the movable plate, which exhibits complete diamagnetic properties, so the reaction force is , generates a force to levitate the movable plate 14 by an appropriate distance in the force direction of arrow fL.

However, as already mentioned, this configuration is basically the same as the structure of the known Meissner bearing, and in other words, the known existing magnetic levitation structure of this type can be arbitrarily used in the device system of the present invention. be able to.

Of course, when using such levitation magnetic field generating means 19, the number and arrangement position thereof are arbitrary. 1st
In the figure, two are shown spaced apart by an appropriate distance in the moving direction X-x of the moving plate 14, but this is merely an example for explanation.

First, the provision of such a magnetic levitation mechanism 19 itself is not essential to the present invention. Although this is preferable because it has less mechanical frictional resistance and is easier to achieve accuracy, in some cases the movable plate 14 may be in mechanical contact with each magnetic pole 17 or the fixed plate 18 used as necessary. You may move. Alternatively, a mechanical guide means may be used to prevent the movable plate from rattling. However, in each embodiment described later, this floating mechanism 19 is not shown in the related drawings.

However, in the conceptual configuration of the present moving device IO as shown in the first diagram, as will be described below, the shape and configuration of each magnetic pole 17, the configuration of the driven region 15, and even the fixed plate 18
If a special configuration etc. given to the drive mechanism 16 is adopted, the drive mechanism 16
The drive magnetic flux f generated within. Therefore, the movable plate 14 can be moved in any desired direction by a predetermined distance in the X direction perpendicular to this.

FIG. 2 shows an embodiment of the present invention in which the conceptual configuration shown in FIG. 1 is shown in more detail, but the refrigerant 12, container 11, etc. for creating a cryogenic environment are omitted.

As shown in this embodiment, in FIG.
The driving mechanisms 16 conceptually shown to generate lateral driving forces for the driven regions 15 at both ends of the
C-shaped core 24 passing over the longitudinal end of the driven region 15
and a coil 25 wound around the middle part of this core 24. In this embodiment, C
Opposite ends of the mold core 24, i.e. a pair of magnetic poles 17,1
7 face each other in a direction perpendicular to the plane of the moving plate so as to sandwich the driven region 15 of the moving plate 14 between them, and are sufficiently sharpened to reduce the magnetic flux density extending between them. It is now possible to increase the

However, although this electromagnet 26 is in an extremely low temperature environment, it is not a superconducting electromagnet that constantly generates a magnetic field due to the permanent ring current flowing through the coil 25.
It is desirable that a magnetic field can be generated only when a current is intentionally supplied to the coil 25, or in other words, a magnetic field that is intentionally generated can be extinguished.

Especially when moving the moving plate 14 frequently,
A superconductor that selectively forms a closed loop with respect to the coil 25 in order to selectively generate a permanent ring current in the coil 25, or conversely releases the closed loop and causes the permanent ring current to flow away from the coil 25. Rather, it is simpler to eliminate the circuit means necessary for the electromagnet configuration. however,
It goes without saying that a superconducting material may be used as the coil wire material to reduce current loss.

Now, a pair of magnetic poles 17, 17 of such an electromagnet 26
The driven region 15.15 of the movable plate 14 which is desired to be sandwiched therebetween is configured to have a magnetic shutter region as shown in FIGS. 3 and 4, for example.

That is, the movable plate 14 has a plurality of grooves having a narrow width in the direction along the moving direction Inside each of these grooves is an elongated superconductor 30 that is electrically insulated both from the moving plate 14 and from each other, for example by having the surface covered with an insulating film. ... is buried. Therefore, naturally, the embedding pitch of these plurality of superconductors 30 is also the distance Hp in this case.

However, as mentioned earlier, when a niobium-based material is selected as the material for the moving plate 14, a lead-based material is used as an M conductive material with a smaller critical magnetic field or critical current that transitions to the normal conducting phase. It is desirable to select the material for the superconductor 30, and in practice, the superconductor 30 can be obtained by cutting a superconducting wire having an insulating film on the outer periphery into an appropriate length. In that case, although this region 30 is shown with a rectangular cross section in the figure, it may be changed to a circular cross section or the like.

In any case, this elongated region 30 becomes the local normal conductive phase transition possible region or magnetic shutter region 30 in this embodiment, and the circuit device structure for selectively transitioning this to the normal conductive phase is as follows. ing.

In the case shown in Fig. 4, all of the superconductors 30 buried in the moving direction of the moving plate at a pitch P are connected to each other so that a control current higher than the critical current value can be selectively passed in the length direction. The current lines 31 are patterned and formed on the moving plate through an insulating film, and these current lines 31 are subjected to selection control signals via control signal lines 32. By the current line switching operation of the current line selection switching device 33, a control current of 1 g is supplied from an external current source (not shown) via the current leads 34, 34.
I will receive it selectively).

Therefore, only the superconductor or magnetic shutter region 30 that receives the control current Ig can transition to the normal conductive phase, and the completely diamagnetic state during the superconducting phase is broken and the magnetic flux is transmitted and obtained. It becomes like this. In this way, by controlling from the outside, the elongated region 30 can be controlled with respect to the magnetic flux.
Since it can function as a shutter that allows or prevents light from passing through, it is called such a region 30 or an electric gloss region 30.

In addition, the control current 1) as mentioned above? A switching configuration for path selection can be easily assembled by a person skilled in the art using existing techniques. For example, the control signal line 32 includes bits corresponding to the number of superconducting regions or magnetic shutter regions 30 to be used. Given the binary data of the number, the −
A sheet corresponding to the superconducting region 30 specified by binary data,
- Connect the current lead 34 to the current line pattern 3I. :
A control current 1g supplied from the outside via 14 is applied, and only the magnetic shutter in that area is opened (allowing magnetic flux to pass through).

In addition, in the case shown in the figure, one pair of switching devices 33 and 33 are used, with one τ at both ends of each superconducting region 30, but in principle only one switching device is sufficient, and each superconducting region 3
One end side of 0 is a current line that passes through a common current line pattern 31 to all superconducting regions: (l) ) 34
A switching device 33 is provided only on the other end of the line, and the connection relationship between the other lead 34 and each track pattern 31 is changed using the selection number nail placed on the track 32. Like 1. That's good.

However, if the switching devices 33 are provided at both ends of the superconducting region 30 as shown in the figure, in a configuration in which the drive mechanisms 16 are provided at both ends as shown in FIG. By simply providing terminals and connectors to which the signal line can be detachably connected, the movable plate 14 has the advantage of being able to be used without left-right directionality.

In practice, when building this type of system, the object 13
It is conceivable that the movable plate 14 will be removed quite frequently, such as when removing the rust or during maintenance and inspection of the movable plate 14 and the drive mechanism 16.
After such work, move the moving board 14 without paying attention to the left stone.
The ability to reinsert the device into the equipment system is extremely convenient.

In FIG. 4, there is also a fixed plate 18, which is provided parallel to the driven area 15 of the movable plate 14 and is arranged in parallel in a plane projection, and is also reduced in size. However, such a fixing plate 18 is not used in the embodiments illustrated in the second and third A, which will be described first.

The moving device 10 of this embodiment employing such a drive mechanism structure
To explain the operation in accordance with each figure in Figure 3, Figure 3 (
As used in the static description of the device as described above, A) represents the cross-sectional end face configuration when the present moving device 10 is not performing a moving operation or at the time when the moving operation of the surface rotation is completed. No magnetic field is generated between the pair of sharpened magnetic poles 17.17 that sandwich the driven region 15 above and below, and each superconducting region 15. :10 also remains in the superconducting phase in an extremely low temperature environment.

For convenience of explanation, a plurality of superconducting regions or magnetic shutter regions are reduced in size in FIG. When Gi" is 1-, a pair of magnetic poles 1 in FIG. 3(A)
7. Magnetic shutter area 3 in the A device connecting 17 with a straight line
The number 113 is attached to o.

However, now, the control current explained earlier is applied only to the magnetic shutter region #2, which is located two pitches to the left of this #3 region, to break the superconducting phase here and transition to the normal conductive phase. However, when a driving magnetic field of a predetermined magnitude is generated between the pair of magnetic poles 17.17, the magnetic poles 17.1 of the pair of magnetic poles 17.1
As shown in FIG. 3(B), the driving magnetic flux fD over the period of 7 can only take a magnetic path through the magnetic shutter region 12 which is transitioning to the =-1 normal conduction phase. This is because the regions that are in other superconducting phases exhibit complete diamagnetism.

However, this magnetic path is clearly an intentionally formed magnetic detour, and is a magnetic path with a high magnetic potential, so its elongation is similar to that of a stretched rubber string. A driving force is generated in the direction of reducing the magnetic resistance, that is, a driving force is generated in the direction of further lowering the magnetic resistance, and the driven region 15 or moving plate 14 is moved in the right direction X in the drawing.

However, the lateral driving force causing this movement is the driving magnetic flux f. Regarding this, the closer it gets to a stable state, that is, the closer it gets to the path with the lowest magnetic resistance between the pair of magnetic poles 17. :) I, :iAs shown in the figure, when geometrically aligned with the straight line connecting the pair of magnetic poles 17 and 17, the lateral driving force associated with the driving magnetic flux fD becomes zero in principle. Then, the moving plate 14 stops there.

In this way, the moving plate 14 has been moved to the right by m steps P, but once the moving operation of the moving plate 14 for the predetermined step P is finished, the moving plate 14 is immediately moved between the pair of magnetic poles. The applied magnetic field of 1 g was removed to prevent magnetic shutter #2, which is in the normal conducting phase, from becoming magnetized, and the magnetic shutter #2 was made to transition to the normal conducting phase; 1 g of the ti control current was removed. , returns to the superconducting phase and ends the operation at =·m position.

In order to prevent magnetization of the magnetic shutter 30, the magnetic shutter region that had been transitioned to the normal conducting phase after the operation of the -m step is returned to the superconducting phase, or the photoelectric γ is turned on at the start of each unit step. After transitioning one of the magnetic shutter regions 30 to the normal conduction phase and before applying a driving magnetic field between the pair of magnetic poles 17 and 17, a high frequency bias magnetic field for demagnetization is generated in the pair of m rods. You can do it like this.

Of course, the above-mentioned moving plate driving operation not only shows as a truism that the moving plate 14 can be sequentially further moved to the right by the pitch P, but also shows that it is also possible to move the moving plate 14 to the left.

For example, if a control current of 1 g is applied only to the magnetic shutter area #4 from the state shown in FIG.
The only difference is that the magnetic shutter area #2 in the case where the drive magnetic flux f0 passes through changes from the magnetic shutter area #4 to the magnetic shutter area #4, and the mechanism is exactly the same as that described above, and the moving plate 14 is moved horizontally to the left. The magnetic shutter area #2, which receives the directional driving force and is ultimately located on the straight line connecting the pair of &tA rods 17 and 17 in FIG. 3(C), can be read as the magnetic shutter area #4. , it is possible to move the movable plate in the left direction according to the unit pitch P. In addition to this, this embodiment also shows that the minimum movement resolution is fit, (ff), and the moving plate 14 can be moved at a distance that is an integral multiple of the pitch P. For example, in Fig. 3(B), instead of magnetic shutter area #2, magnetic flux area #1, which is the farthest left in the figure, is selected, and 1g of control current is applied only to this, and the normal conducting phase is Let's assume that it transitions to .

Then, if the driving magnetic field applied between the pair of magnetic poles 17.17 is strong enough to affect this magnetic shutter region moon, then the driving magnetic flux fD passes only through this magnetic shutter region moon. The movable plate 14 starts to move rightward in response to the driving force in the same way as before, and as seen in this magnetic shutter area #l or magnetic shutter area #2 in FIG. It will stop when it is located on the straight line connecting.

Kone realizes that she was able to move the moving plate 14 by twice the minimum resolution pitch P in the 5-foot jump.

In exactly the same way, the third magnetic shutter area J13, 4-) Ll shown in FIG. 3(8),
Considering the state in which the more distant magnetic shutter regions are selectively transitioned to the normal conducting phase, the driving magnetic field generated between the pair of electrodes 17.17 is strong enough to affect even those distant magnetic shutter regions. This means that the moving plate 14 can be moved over a longer distance at once.

Taking all these things together, it can be said that according to the method or apparatus of the present invention, the movable plate I4 can be moved both coarsely and finely.
You can taste this and use it very conveniently.

For example, when bringing the object +3 (Fig. 1.2) close to the observation or pressurizing position, coarse movement of an integral multiple of the minimum resolution P is used to accurately observe or process the object from near the observation or processing position. When positioning, fine movement according to the minimum resolution P can be used, and both the speed of the blanking process and the high positioning accuracy can be satisfied.

In reality, the above-mentioned minimum resolution can be easily reduced to the millimeter order, and even further from the sub-millimeter order to the micron order.
It is possible to construct stiffness up to an order of magnitude using the principles of the present invention.

However, in that case, there may be a processing limit at 1 L of sharpening of each magnetic pole 17.

Figure 5 shows that there is even less of such a fear, especially [Mi
Another embodiment of the object moving device IO constructed according to the present invention is shown as a case in which the tip of 17 does not need to be sharpened. Use the fixed plate 18 that was previously installed.

Actually, the difference between the conceptual structure of the second illustrated embodiment and the drawing is that the tip of each Mi rod 17 is simply formed into a NV-flat shape as usual, and the driven region 1 of the movable plate 14
A fixing plate 18 is inserted between the magnetic pole 17 and one of the magnetic poles 17. Therefore, for the total Hλ, except for the parts specifically explained below, the explanations and various considerations already given regarding the first embodiment can be used for other parts.

No. 6'A (A) shows an example of the drive mechanism 16 configured according to the fifth illustrated embodiment, and the pair of magnetic poles 17, 17 have flat end faces as described above. A fixed plate 18 is interposed between the Mi rod 17 located on one side in the figure and the movable plate 14 or its driven region 15, and between the fixed plate 1B and the driven region 15, Preferably, the explanation is given first.
For example, each time the movable plate 14 is floated by 9, 1
In this embodiment, the nationally designated plate 18, which has a gap of about 0 μm, is made of a suitable superconducting material. 7. Position 1 that connects the vicinity of the horizontal center of 17. The magnetic flux is constantly transmitted through 1
A through hole 40 having a predetermined opening area is provided as a region through which magnetic flux can pass.

Similarly to the embodiments shown in the second and third figures, the driven area 15 of the moving plate can be selectively applied to the control 'ltE style Ig as shown in the fourth figure, so that each selected one can transition to the normal conductive phase. Magnetic shutter areas 30 are provided at a predetermined pitch P, and for convenience, they are numbered #l, #2, #2, etc. in order from the left side in the figure. ...... is attached.

The object moving device 10 of this embodiment produces the following operations.

Excluding the through hole 40 part, the magnetic shutter area #4 passes through the through hole 40 of the fixed plate 18 in the Mi conductive phase and is located on the straight line F extending between the pair of magnetic fields 8i17.17, at a predetermined pitch in the left direction. When a control current of 1 g is applied only to the magnetic shutter area separated by a distance of P through the configuration shown in Figure 4, this is caused to transition to the normal conducting phase, and a driving magnetic field is generated between the pair of magnetic poles 17 and 17. , the pair of 1ftJ417. +
7 magnetic flux f. As shown in Figure 6(B),
It can only pass along the magnetic path through the through hole 40 made in the magnetic shutter area #3 and the fixing plate 18, so again this path is intentionally twisted, so
As it extends straight between the pair of magnetic poles 17, 17, a physical driving force is generated in the lateral direction X to the moving plate 14. The fixed plate I8 is literally fixed and can move, so the through hole 40 also cannot move, so the magnetic shutter area gate provided in the driven area 15 extends to the F side of this through hole 40.
It has to move.

The result is shown in FIG. 6(C), where the through hole 40 of the fixed plate 18 and the magnetic shutter region moon, which is the only one transitioning to the normal conducting phase, are aligned in a straight line below F between the pair of magnetic poles 17 and 17. When the position is aligned, the lateral driving force on the moving plate 14 is lost and the moving plate 14 stops at that position. After that, as already explained, the drive magnetic field is removed, the control current 1g is also removed, and the magnetic shutter region, which had been transitioned to the normal conductive phase, is returned to the superconducting phase.

However, in this embodiment as well, as mentioned above, in addition to being able to move the movable plate 14 in any desired direction on either the left or right side, it is also possible to move the movable plate 14 all at once in an integer multiple of the minimum resolution P. is understood.

In particular, by making the pair of @Vi17.17 permeable through only the through-hole 40 of the fixing plate 18 without having to sharpen it by machining, the necessary magnetic flux concentration effect can be achieved through the through-hole 40 of the fixed plate 18.
The optimal magnetic flux distribution position can be obtained from the design stage by determining the area size of the magnetic flux 0, etc., and by selecting where on the fixed plate 18 the through holes 40 are to be bored. is also possible.

However, it is not essential that the tip of the magnetic pole is not sharpened, and there is also a sense that it is not necessary to sharpen the tip of the magnetic pole.
In actual use, if it is necessary to concentrate the magnetic flux by the magnetic pole structure as in the first embodiment, the tip of the magnetic pole may be appropriately sharpened. Even in this case, since there is a magnetic flux passage area 40 whose area can be strictly defined on the fixed plate 18 side, the machining accuracy on the magnetic pole tip side is considerably facilitated.

In addition, the actual shape of the through hole 40 is not limited, but may be a slit shape having a narrow width in the direction along the moving direction X of the moving plate 14 and a length in the direction orthogonal thereto. is the most common, and not only is it easy to manufacture, but it is also easy to obtain various constants for design.

Furthermore, considering that the function of the magnetic flux passage area 40 provided on the fixed plate 18 is to selectively pass the drive magnetic flux f11 derived between the pair of magnetic poles 17, 17 only to that area, A structure similar to the magnetic shutter area 30 provided in the driven area 15 of the moving plate 14 is provided in a portion of the through hole 40, and by selectively passing an external control current, the moving plate can be fixedly or continuously operated. Only when it is necessary to move the magnetic shutter area Lli4 with this fixed plate
It is also conceivable to transition only 0 to the normal conducting phase.

If we push this further, as shown in Figure 7, the fixing plate 1
A plurality of magnetic shutter regions 40 as magnetic flux passing L+J function regions 40 provided at 8 are arranged in parallel along the length direction of the movable plate 14 at a predetermined pitch P while being insulated from each other. .

A magnetic shutter area 40 provided on this fixed plate 18
Regarding ......, a selection circuit means similar to the selection control of the magnetic shutter area 30 provided on the moving plate 14 shown in the fourth figure is provided to enable one or more of them to transition to the normal conduction phase. .

Also in FIG. 7, numbers sl, s2, .・・・・・・
To explain with reference to FIG. 7, in the state shown in FIG. It is located on a straight line connecting approximately the horizontal centers of the two.

Here, for example, by using the configuration of the selection circuit means as shown in FIG. In that state, a pair of &ii poles 17,
Assuming that a driving magnetic field is applied between 17 and 17, the driving magnetic flux generated accordingly is not shown in FIG. There is no choice but to pass through the shutter area #3 and the magnetic shutter area in the fixed plate 18, and this becomes a high magnetic path of the intentionally bent magnetic body, so the fixed plate 1B
The driven area 15 and the movable plate 1 move in the direction in which the magnetic shutter area #3 on the driven area 15 side is directly above the magnetic shutter area 63 in the middle, that is, in the right direction in the figure.
A driving force is generated to move 4.

However, the moving plate 1 according to the minimum resolution P in the right direction
In this embodiment, the moving drive of No. 4 is not only a combination of the magnetic shutter region #3 on the driven region side and the magnetic shutter region #3 on the fixed plate side, but also a combination of the magnetic shutter region #3 on the driven region side and the fixed plate. It can be seen that this can be realized by a combination of the magnetic shutter regions 1'4 on the plate side, or a combination of the magnetic shutter region #2 on the driven region side and the magnetic shutter region #2 on the fixed plate side.

In other words, by configuring the system so that multiple combinations can be taken, the optimal combination relationship between the magnetic shutter areas can be selected depending on the movement direction and movement distance of the moving plate that are required at any given time. I know what I can do. Of course, it will be understood that the moving plate 14 can be moved in jumps over an integral multiple of the minimum movement resolution P.

Furthermore, for example, the size of the pair of magnetic poles 17, 17 is such that the size is sufficiently large in the lateral direction with respect to the dimensions and pitch P of the magnetic shutter area provided on the movable plate 14 and the fixed plate 18. In this case, for example, in FIG. 7, the magnetic shutter regions #+ and #5 in the fixed plate 18 are both transitioned to the normal conductive phase, while the magnetic shutter regions #l and #5 are also changed to the driven region 15 side. If the transition is made to the normal conducting phase, the respective regions n1 and n5 are sufficiently far apart in terms of distance and will not be magnetically influenced by each other, or will not cause any problem of interference even if they are influenced by each other, then A lateral driving force can be obtained from the drive i-flux fD at these points, and the driving torque of the moving plate can be substantially increased.

As described above, it is understood that the driving torque can be increased by combining a plurality of magnetic shutter areas between the pair of magnetic poles 17, 17, but it is of course possible to increase the number of driving mechanisms 16 themselves.

For example, in Fig. 1.2.5, each drive mechanism +
6. +6V is provided, but a driven region 15 and its drive mechanism 1 are further provided in the middle of the moving plate in the length direction between them.
6 may be added. Conversely, if sufficient drive torque can be obtained, the drive region 16 can be replaced with the case shown in the figure,
It may be sufficient to provide only one at the end of the moving plate on the - side or at an appropriate location in the longitudinal direction of the moving plate.

When a plurality of magnetic shutter areas 40 are provided on the fixed plate 18 as shown in the seventh figure, for example, as shown in the eighth figure, a magnetic shutter area provided in the driven area I5 on the movable plate side is provided. If the pitch P of the magnetic shutter regions 40 on the fixed plate side is made to vary with respect to the pitch P of 30..., the moving distance of the movable plate per position i movement will be further reduced. , different steps t1 are obtained.

In the example shown in FIG. 8, the pitch of the electric shutter areas 40 arranged in parallel on the side of the fixed plate 18 is +4 (P+α).

In such a case, in FIG. 8 as well, the magnetic shutter regions 30 and 40 provided on each side of the driven region 15 and the fixed plate 18 are numbered #1 and # in order from the left side in the figure.
If you add 2..., for example, a pair of magnets! Jj+7.
When generating a driving magnetic field between the driven areas 15 and 17, the magnetic shutter area #3 on the fixed plate side is made to transition to the normal conducting phase by the circuit device as previously explained with reference to FIG.
When the side magnetic shutter regions are simultaneously transitioned to the normal conducting phase, by the mechanism described above, these two magnetic shutter regions $3 and J13 are aligned in a plane, and the movement of the driven region is stopped until it stops. The distance that the plate moves to the right is equal to the pitch P of juxtaposition of the magnetic shutter areas on the driven area side.

In contrast, only the magnetic shutter region #4 on the fixed plate side and the magnetic shutter region #4 on the driven region 15 side are both transitioned to the normal conducting phase to generate a driving magnetic field between the pair of magnetic poles 17 and 17. Then, both magnetic shutter areas #4 and #
The distance that the movable plate 14 moves in the right direction until the movable plate 14 aligns with the two planes is determined by the magnetic shutter area juxtaposition pitch on the fixed plate side (
P+α).

Furthermore, for example, if only the magnetic shutter region 84 on the fixed plate side and the magnetic shutter region gate on the driven region side are both made to transition to the normal conductive phase and a driving magnetic field is applied, the two-headed regions will be braked in a plane. The distance that the moving plate I4 moves in the biting direction is the difference α between both pitches.

In this way, you can basically select three types of movement distance per middle 1st turn, and of course, the magnetic shutter area 30. It is possible to find a combination of 40 phases η.

After all, according to this pitch relationship, the unit step 1
jt itself can be increased to several types, and controllability and operability are further improved.If you add to this the drive of skipping one or two as described earlier, this device can easily control the target object. movement control becomes more versatile. If the double movement of going and returning is adopted as a unit step, the amount of movement (
P-α) can also be realized. Nevertheless, as is clear from the above mechanism, selecting the step amount is advantageous in that the transfer viscosity is not sacrificed in any way.

However, in the illustrated embodiment, no tamping mechanism is provided for stopping the movement of the moving plate. In reality, when the entire device is immersed in a solution for creating a cryogenic environment, such as liquid helium, the viscosity of the evaporated liquid exerts an appropriate damping effect, and the moving plate is Rather than stopping suddenly, the magnetic driving force gradually decreases, and if you zoom in on the time axis, it will stop gradually, so there is often no need to provide a separate damping mechanism like the one above. .

However, if such a damping mechanism is required, it is possible to attach a copper plate, etc. to an appropriate location on the moving plate, and obtain an appropriate damping force using the eddy current loss generated inside the moving plate due to the influence of the driving magnetic force. You may choose a configuration.

By the way, in all of the embodiments described so far, the current is passed through the body as a region where it can selectively transition to the normal conductive phase; however, the current allows the transition from the superconducting phase to the normal conducting phase even in an extremely low temperature environment. The magnetic shutter region 30 or 40 made of a superconductor having a predetermined area to ijr noh area)
For example, a configuration as shown in Figure 10.11 may be adopted.

In the case shown in FIG. 10, when there is no transition I2 to the normal conductive phase state, the normal conductive phase transition possible region 30 of a predetermined area, which is especially important in the present invention, is made of the superconducting material of the movable plate 14 itself, that is, the 5 driven regions 15 However, the control current line 51 moves above the driven region 15 in a direction perpendicular to the direction of movement of the moving plate, although there is no physical or geometrical configuration to be distinguished from others. Plate movement) Along the f direction, multiple pieces are placed in parallel at appropriate intervals.

If a predetermined control current of 11 or more is applied to only the selected control line 51 among the control line group 51, an external control magnetic field f (, is the In the driven region 15, only a predetermined area is covered with its entire thickness J'
(Thus, it is possible to make a transition to the normal conducting phase even in an extremely low temperature environment.Conversely speaking, the external control magnetic field [3, The normal conductive phase transition possible region 30 can be specified as the area affected by can do.

In the case of the configuration shown in FIG. 11, a weak Josephson junction is used as the normally conducting phase transition possible region 30, and narrow grooves extending in the width direction are formed at predetermined intervals in the length direction of the driven region 15. 52, and if the width of the groove 52 is generally on the order of several tens or several angstroms, even if the groove 52 is not like the one shown in the figure but has a slit shape without a bottom, The region can be considered a weak Josephson junction region.

Therefore, if the control current line 51 is similarly passed above each weak Josephson junction region and a control current is selectively passed through it to generate an external magnetic field, the weak Josephson junction region can be brought into the normal conducting phase. can be transitioned.

With such a configuration, when each normally conducting phase transition possible region is formed, the bits in the above operation description are the grooves 52.
Parallel spacing or control current! It may be defined as a juxtaposition spacing of 51.

Of course, as in the fifth to eighth illustrated embodiments, when the normal conductive phase transition area is provided in both the driven area 15 of the movable plate and the fixed plate 18, the magnetic flux passing area on the fixed plate side or the In addition to selectively employing the small configurations shown in Figures H) and II for the magnetic shutter region 40, it is also possible to employ magnetic shutter regions 30 and 40 with different configurations on the driven region 15 side and the fixed plate 18 side. good.

However, in the 10th step, an external III control magnetic field is applied to the region to be transitioned to the normal conducting phase. In the I+ configuration shown in the figure, the strength of the external i control magnetic field must generally be increased beyond a certain level, so it is expected that there will be more interference with the drive magnetic field.5 In that sense, the direct The current application method has a length of -[l.

As previously mentioned, in each of the above embodiments,
In both cases, the normally conductive phase transition possible region or the magnetic shutter region only shows an elongated shape in plan view;
The shape is not limited to this, and other suitable shapes such as a circular shape can be adopted.

The driven region 15 provided on the movable plate 14 may of course be the same part as the movable plate, or may be made separately and assembled.

Further, in the above embodiment, the movement of the moving plate 14 was explained only in the one-dimensional direction If so, it can be easily developed into a system that can move the moving plate 14 in any of the two-dimensional X-Y directions.

Furthermore, in some cases, considering that the entire device is used in a liquid immersion environment for generating a cryogenic environment where the entire device receives a certain degree of buoyancy, the driving magnetic field is strengthened, and the entire in-plane device configuration shown in the figure is further improved. It is even conceivable to adopt this method when moving in the height direction, and in that case, a three-dimensional movement system can be constructed.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of an example of a device configuration to which the method of the present invention is applied as an object moving device in a cryogenic environment. FIG. 2 is a schematic diagram of a specific example device according to the device configuration shown in the first diagram. Diagram. FIG. 3 is an explanatory diagram of the operation of the second illustrated device. FIG. 4 is a schematic configuration diagram of an example of the configuration of a normally conductive phase transition iT function region or a magnetic shutter region used in the device of the present invention. FIG. 5 is a schematic configuration diagram of another specific example device according to the configuration of the device shown in the first figure. FIG. 6 is an explanatory diagram of the operation of the fifth illustrated device. FIG. 7 is a schematic diagram of the main parts of a modified example of the drive mechanism. FIG. 8 is a schematic configuration diagram of main parts of a further modified example of the drive mechanism. FIG. 9 is an explanatory diagram of an example of a Meissner magnetic bearing structure used to levitate the moving plate. FIG. 1O is a schematic configuration diagram of another configuration example of the normally conductive phase transition possible region. FIG. 11 is a schematic configuration diagram of still another configuration example of the normally conductive phase transition possible region. It is. In the figure, 10 is the entire object moving device configured according to the present invention, 12 is a refrigerant for generating a cryogenic environment, 13 is an object, I4 is a moving plate, 15 is a driven region provided on the moving plate, 16 is a lateral drive mechanism, 17 is a magnetic pole, 18 is a fixed plate, 19 is a magnetic field generating means for floating the moving plate,
25 is an electromagnet, 30 is a normally conductive phase transition possible region or a magnetic shutter region, 31 is a control current line that selectively flows a control current to each magnetic shutter region, 33 is a switching device for selecting a current line, and 40 is a fixed plate. A magnetic flux permeable region or a magnetic shutter region is provided, 51 is a control current line for generating an external control magnetic field, and 52 is a groove or slit for forming a weak Josephson junction. Fig. 5 Fig. 9 Makoto) Fig. 7 Fig. 8 U z

Claims (13)

[Claims] (1) A moving plate is provided to support an object to be moved in an extremely low temperature environment; a part of the planar area of the moving plate is used as a driven area, and a driving magnetic field is applied from above and below; In the driven region, only a predetermined area is applied with an external control magnetic field or a control current to locally transition from the superconducting phase to the normal conducting phase even in the cryogenic environment; A state in which the magnetic flux distribution is stable as the driving magnetic flux passes through the driven region in the front and back directions only through the area region that is in the driven region and locally transitions to the normal conducting phase. A method for moving an object in a cryogenic environment, characterized by: moving the moving plate with a force that causes the moving plate to move. (2) A moving plate that supports an object to be moved in an extremely low temperature environment; a plurality of magnetic shutter regions arranged in parallel at intervals in a moving direction and capable of transitioning from a superconducting phase to a normal conducting phase even in the cryogenic environment by applying an external control magnetic field or a control current; a pair of magnetic poles capable of applying a driving magnetic field from above and below to the driving region; selection circuit means for selectively applying the external control magnetic field or the control current only to the selected magnetic shutter region in order to make the transition to the conductive phase; However, as the magnetic flux passes through the driven region in the front and back directions only through the magnetic shutter region which has been selected by the selection circuit means and has transitioned to the normal conduction phase, the magnetic flux distribution is lateral to the moving plate in a direction in which the magnetic flux distribution is stabilized. A device for moving an object in a cryogenic environment, characterized by: generating a directional driving force; The device according to claim 2, characterized in that: (3) the tips of the pair of magnetic poles are each sharpened to increase the driving magnetic flux density; (4) A fixed plate is provided between the pair of magnetic poles and parallel to the driven region of the movable plate. , a local magnetic flux-permeable region is formed that allows magnetic flux to pass through even in an extremely low-temperature environment, and the fixed plate portion excluding the magnetic flux-permeable region is made of a material that becomes a superconducting phase in the above-mentioned extremely low-temperature environment. The device according to claim 2 or 3, characterized in that: (5) The magnetic flux permeable region fixedly formed at a predetermined position of the fixing plate is a through hole bored in the fixing plate and passing through the fixing plate vertically. equipment. (6) further comprising a fixed plate disposed between the pair of magnetic poles and parallel to the disturbed area of the movable plate; a fixed plate having a predetermined area at a predetermined position and configured to apply an external control magnetic field or A magnetic shutter region is provided in which only that portion can selectively transition from a superconducting phase to a normal conducting phase by applying a control current, and the fixed plate portion other than the magnetic shutter region changes into a superconducting phase in the above-mentioned cryogenic environment. 4. A device according to claim 2 or 3, characterized in that it is made of a material of: (7) A plurality of magnetic shutter regions provided on the fixed plate are also arranged in parallel at intervals along the moving direction of the movable plate; a selection circuit means for selectively applying the external control magnetic field or the control current to transition one or more selected magnetic shutter regions to the normal conducting phase; The device according to item 6. (8) The magnetic shutter area provided in the moving plate is embedded in a groove formed in the moving plate and is composed of superconductors electrically insulated from each other, and the transition of the superconductors to the normal conductive phase is The apparatus according to any one of claims 2 to 7, characterized in that the control current is applied directly to the superconductor. (9) The magnetic shutter area provided on the movable plate is not a region that is materially or geometrically distinct from the movable plate portion other than the magnetic shutter, but faces the surface of the movable plate, and Any one of claims 2 to 7, characterized in that the area is a region that locally transitions to a normal conducting phase due to a control magnetic field generated when a control current is applied to a control current line extending in a direction perpendicular to the direction. The device described in one of the following. (10) The magnetic shutter area provided on the moving plate is an area where a weak Josephson junction can be formed, and when a control current is applied to a control current line facing the area and extending in a direction perpendicular to the moving direction of the moving plate. 8. The device according to claim 2, wherein the weak Josephson junction region transitions to a normally conducting phase due to a control magnetic field generated by the control magnetic field. (11) A gap is formed between each of the pair of magnetic poles and the moving plate so that they do not touch each other; . (12) The device according to any one of claims 4 to 11, characterized in that a gap is formed between the movable plate and the fixed plate so that they do not touch each other. (13) The entire area of the moving plate or a predetermined area excluding the object support part and the driven area is formed of a superconductor,
13. The device according to claim 2, wherein a magnetic field generating means for floating the moving plate using the Meissner effect faces the portion formed of the superconductor.