JPH028750A - 加速度センサ及びその製造方法 - Google Patents
加速度センサ及びその製造方法Info
- Publication number
- JPH028750A JPH028750A JP1007689A JP1007689A JPH028750A JP H028750 A JPH028750 A JP H028750A JP 1007689 A JP1007689 A JP 1007689A JP 1007689 A JP1007689 A JP 1007689A JP H028750 A JPH028750 A JP H028750A
- Authority
- JP
- Japan
- Prior art keywords
- acceleration sensor
- acceleration
- electrical contact
- sensor according
- contact element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 92
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 10
- 238000011156 evaluation Methods 0.000 claims description 7
- 238000001465 metallisation Methods 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 6
- 229920003002 synthetic resin Polymers 0.000 claims description 4
- 239000000057 synthetic resin Substances 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 238000001459 lithography Methods 0.000 claims 1
- 230000010355 oscillation Effects 0.000 abstract description 3
- 230000001419 dependent effect Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000000284 resting effect Effects 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H35/00—Switches operated by change of a physical condition
- H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0891—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values with indication of predetermined acceleration values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19883801514 DE3801514A1 (de) | 1988-01-20 | 1988-01-20 | Beschleunigungssensor und verfahren zu dessen herstellung |
| DE3801514.5 | 1988-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028750A true JPH028750A (ja) | 1990-01-12 |
Family
ID=6345616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1007689A Pending JPH028750A (ja) | 1988-01-20 | 1989-01-20 | 加速度センサ及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH028750A (enrdf_load_stackoverflow) |
| DE (1) | DE3801514A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2626078A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2214354A (enrdf_load_stackoverflow) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5481184A (en) * | 1991-12-31 | 1996-01-02 | Sarcos Group | Movement actuator/sensor systems |
| US20030069522A1 (en) | 1995-12-07 | 2003-04-10 | Jacobsen Stephen J. | Slotted medical device |
| ATE347393T1 (de) | 2001-07-05 | 2006-12-15 | Precision Vascular Systems Inc | Medizinische vorrichtung mit drehmoment übertragendem weichem endstück und verfahren zu seiner formgebung |
| US7914467B2 (en) | 2002-07-25 | 2011-03-29 | Boston Scientific Scimed, Inc. | Tubular member having tapered transition for use in a medical device |
| WO2004011076A2 (en) | 2002-07-25 | 2004-02-05 | Boston Scientific Limited | Medical device for navigation through anatomy and method of making same |
| DE10304830B4 (de) * | 2002-10-04 | 2005-06-30 | Gebr. Schmidt Fabrik für Feinmechanik GmbH & Co. KG | Stoßimpulssensor |
| US8377035B2 (en) | 2003-01-17 | 2013-02-19 | Boston Scientific Scimed, Inc. | Unbalanced reinforcement members for medical device |
| US7169118B2 (en) | 2003-02-26 | 2007-01-30 | Scimed Life Systems, Inc. | Elongate medical device with distal cap |
| US7001369B2 (en) | 2003-03-27 | 2006-02-21 | Scimed Life Systems, Inc. | Medical device |
| US7824345B2 (en) | 2003-12-22 | 2010-11-02 | Boston Scientific Scimed, Inc. | Medical device with push force limiter |
| US7850623B2 (en) | 2005-10-27 | 2010-12-14 | Boston Scientific Scimed, Inc. | Elongate medical device with continuous reinforcement member |
| JP2010503484A (ja) | 2006-09-13 | 2010-02-04 | ボストン サイエンティフィック リミテッド | 横断ガイドワイヤ |
| US8556914B2 (en) | 2006-12-15 | 2013-10-15 | Boston Scientific Scimed, Inc. | Medical device including structure for crossing an occlusion in a vessel |
| US8409114B2 (en) | 2007-08-02 | 2013-04-02 | Boston Scientific Scimed, Inc. | Composite elongate medical device including distal tubular member |
| US8105246B2 (en) | 2007-08-03 | 2012-01-31 | Boston Scientific Scimed, Inc. | Elongate medical device having enhanced torque and methods thereof |
| US8821477B2 (en) | 2007-08-06 | 2014-09-02 | Boston Scientific Scimed, Inc. | Alternative micromachined structures |
| US9808595B2 (en) | 2007-08-07 | 2017-11-07 | Boston Scientific Scimed, Inc | Microfabricated catheter with improved bonding structure |
| US7841994B2 (en) | 2007-11-02 | 2010-11-30 | Boston Scientific Scimed, Inc. | Medical device for crossing an occlusion in a vessel |
| US8376961B2 (en) | 2008-04-07 | 2013-02-19 | Boston Scientific Scimed, Inc. | Micromachined composite guidewire structure with anisotropic bending properties |
| US8535243B2 (en) | 2008-09-10 | 2013-09-17 | Boston Scientific Scimed, Inc. | Medical devices and tapered tubular members for use in medical devices |
| US9901706B2 (en) | 2014-04-11 | 2018-02-27 | Boston Scientific Scimed, Inc. | Catheters and catheter shafts |
| US11351048B2 (en) | 2015-11-16 | 2022-06-07 | Boston Scientific Scimed, Inc. | Stent delivery systems with a reinforced deployment sheath |
| CN114043957B (zh) * | 2021-11-29 | 2023-03-24 | 西安交通大学 | 基于pzt薄膜的传感装置、制备方法和汽车安全气囊系统 |
| DE102022001662A1 (de) | 2022-05-12 | 2023-11-16 | Diehl Defence Gmbh & Co. Kg | Mechatronischer Beschleunigungssensor |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH452949A (de) * | 1964-03-13 | 1968-03-15 | Kuratorium Fuer Verkehrssicher | Gerät zur Bestimmung des Betrages der Horizontalbeschleunigung von Kraftfahrzeugen und Verwendung des Gerätes |
| FR1590334A (enrdf_load_stackoverflow) * | 1968-10-30 | 1970-04-13 | ||
| US3619524A (en) * | 1970-05-08 | 1971-11-09 | Gen Motors Corp | Sensor |
| US3678763A (en) * | 1971-08-23 | 1972-07-25 | Gen Motors Corp | Acceleration sensor |
| FR2476322A1 (fr) * | 1980-02-15 | 1981-08-21 | Gueniot Xavier | Anemometre |
| DE3520383A1 (de) * | 1985-06-07 | 1986-12-11 | Jost, Hubertus, Dr., 6530 Bingen | Crashanzeiger |
| DE3765028D1 (de) * | 1986-06-18 | 1990-10-25 | Schmidt Feintechnik Gmbh | Beschleunigungssensor. |
-
1988
- 1988-01-20 DE DE19883801514 patent/DE3801514A1/de active Granted
-
1989
- 1989-01-17 GB GB8901001A patent/GB2214354A/en not_active Withdrawn
- 1989-01-18 FR FR8900769A patent/FR2626078A1/fr active Pending
- 1989-01-20 JP JP1007689A patent/JPH028750A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2626078A1 (fr) | 1989-07-21 |
| DE3801514C2 (enrdf_load_stackoverflow) | 1989-11-02 |
| GB2214354A (en) | 1989-08-31 |
| DE3801514A1 (de) | 1989-08-03 |
| GB8901001D0 (en) | 1989-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH028750A (ja) | 加速度センサ及びその製造方法 | |
| US5610337A (en) | Method of measuring the amplitude and frequency of an acceleration | |
| US7350424B2 (en) | Acceleration sensor | |
| US6619123B2 (en) | Micromachined shock sensor | |
| JP5965934B2 (ja) | 改善されたオフセットおよびノイズ性能を有する傾斜モード加速度計 | |
| US5402684A (en) | Multicomponent force and moment measuring arrangement | |
| US20060021436A1 (en) | Multiaxial monolithic acceleration sensor | |
| US4991682A (en) | Acceleration sensor | |
| JP2006520897A (ja) | Ｍｅｍｓ加速度計 | |
| DE3804220C2 (enrdf_load_stackoverflow) | ||
| DE3814952A1 (de) | Sensor | |
| Bae et al. | High-shock silicon accelerometer with suspended piezoresistive sensing bridges | |
| CN217716643U (zh) | 一种无源伺服振动传感器 | |
| US6184764B1 (en) | Pendulum mass acceleration sensor | |
| Sun et al. | A surface micromachined latching accelerometer | |
| JP2005049320A (ja) | 加速度センサ | |
| SE462875B (sv) | Accelerationsgivare | |
| DE4340664C2 (de) | Piezoresistiver Beschleunigungsaufnehmer | |
| JP2007192794A (ja) | マイクロアレイ慣性装置に応用されるシングルチップ | |
| US2909744A (en) | Electrical accelerometer | |
| JPH08211091A (ja) | 半導体加速度検出装置 | |
| US3395569A (en) | Dynamic curvature sensing and measuring device | |
| JPH08248060A (ja) | 半導体加速度検出装置 | |
| RU2774102C1 (ru) | Чувствительный элемент микромеханического акселерометра | |
| US9063167B2 (en) | Piezoresistive transducer |