JPH0287066U - - Google Patents

Info

Publication number
JPH0287066U
JPH0287066U JP16684188U JP16684188U JPH0287066U JP H0287066 U JPH0287066 U JP H0287066U JP 16684188 U JP16684188 U JP 16684188U JP 16684188 U JP16684188 U JP 16684188U JP H0287066 U JPH0287066 U JP H0287066U
Authority
JP
Japan
Prior art keywords
sputtering device
ion sputtering
sample chamber
ions
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16684188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16684188U priority Critical patent/JPH0287066U/ja
Publication of JPH0287066U publication Critical patent/JPH0287066U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16684188U 1988-12-26 1988-12-26 Pending JPH0287066U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16684188U JPH0287066U (enrdf_load_stackoverflow) 1988-12-26 1988-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16684188U JPH0287066U (enrdf_load_stackoverflow) 1988-12-26 1988-12-26

Publications (1)

Publication Number Publication Date
JPH0287066U true JPH0287066U (enrdf_load_stackoverflow) 1990-07-10

Family

ID=31454589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16684188U Pending JPH0287066U (enrdf_load_stackoverflow) 1988-12-26 1988-12-26

Country Status (1)

Country Link
JP (1) JPH0287066U (enrdf_load_stackoverflow)

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