JPH0286713U - - Google Patents
Info
- Publication number
- JPH0286713U JPH0286713U JP16505488U JP16505488U JPH0286713U JP H0286713 U JPH0286713 U JP H0286713U JP 16505488 U JP16505488 U JP 16505488U JP 16505488 U JP16505488 U JP 16505488U JP H0286713 U JPH0286713 U JP H0286713U
- Authority
- JP
- Japan
- Prior art keywords
- cooling air
- inflow hole
- processing stage
- inert gas
- photocurable resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
Description
第１図はこの考案の光硬化樹脂処理装置におけ
る一実施例の概略構成を示す図で、第１図ａは処
理ステージの移動方向と直角な方向からみた側断
面図、同図ｂは処理ステージの移動方向からみた
側断面図、第２図はこの考案の主要部である第１
図の処理ステージ周辺における装置の駆動時の状
態を示す図で、第２図ａ，ｂは不活性ガスとして
Ｎ２ガスの仕様時における処理ステージ周辺の構
成をそれぞれ処理ステージの移動方向と直角な方
向からみた部分断面図、及び処理ステージの移動
方向からみた部分断面図、同図ｃ，ｄは被処理物
を強制的に空冷する際の処理ステージ周辺の構成
をそれぞれ処理ステージの移動方向と直角な方向
からみた部分断面図、及び処理ステージの移動方
向からみた部分断面図である。
図中、１：ランプ、８：光透過板、８ａ：枠部
、９：ステージ、１７：処理室側壁、１７ａ：Ｎ
２ガス流入孔、２３：冷却風流入孔、２５：冷却
風流出孔、３１：把手。
FIG. 1 is a diagram showing a schematic configuration of an embodiment of the photocurable resin processing apparatus of this invention, FIG. Figure 2 is a side sectional view of the main part of this invention, as seen from the direction of movement.
Figures 2a and 2b show the configuration of the area around the processing stage when N2 gas is used as the inert gas, respectively, at right angles to the moving direction of the processing stage. Figures c and d show the configuration of the surroundings of the processing stage when forcibly air-cooling the workpiece, respectively, at right angles to the direction of movement of the processing stage. FIG. 2 is a partial cross-sectional view as seen from the same direction, and a partial cross-sectional view as seen from the moving direction of the processing stage. In the figure, 1: lamp, 8: light transmitting plate, 8a: frame, 9: stage, 17: processing chamber side wall, 17a: N
2 Gas inflow hole, 23: Cooling air inflow hole, 25: Cooling air outflow hole, 31: Handle.
Claims (1)
プと、処理ステージと、この処理ステージを囲み
不活性ガス流入孔及び被処理物を冷却する冷却風
流入孔を有する処理室側壁と、処理室を覆い、か
つ前記不活性ガスの流入時に冷却風流入孔及び冷
却風流出孔を塞ぐ光透過板とを具備したことを特
徴とする光硬化型樹脂処理装置。 A lamp that irradiates the photocurable resin with light including ultraviolet rays, a processing stage, a processing chamber side wall that surrounds the processing stage and has an inert gas inflow hole and a cooling air inflow hole that cools the object to be processed; A photocurable resin processing apparatus comprising: a light transmitting plate that covers the cooling air inflow hole and the cooling air outflow hole when the inert gas flows in;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16505488U JPH0286713U (en) | 1988-12-22 | 1988-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16505488U JPH0286713U (en) | 1988-12-22 | 1988-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0286713U true JPH0286713U (en) | 1990-07-10 |
Family
ID=31451196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16505488U Pending JPH0286713U (en) | 1988-12-22 | 1988-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0286713U (en) |
-
1988
- 1988-12-22 JP JP16505488U patent/JPH0286713U/ja active Pending