JPH0284332U - - Google Patents
Info
- Publication number
- JPH0284332U JPH0284332U JP16463088U JP16463088U JPH0284332U JP H0284332 U JPH0284332 U JP H0284332U JP 16463088 U JP16463088 U JP 16463088U JP 16463088 U JP16463088 U JP 16463088U JP H0284332 U JPH0284332 U JP H0284332U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stopping mechanism
- belt
- quartz arm
- transported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は、本考案のウエハー停止機構の実施例
を示す平面図。第２図は、第１図Ａ―Ａ′の断面
図。第３図は、搬送されるウエハーの位置図。第
４図は、従来のウエハー停止機構の平面図。第５
図は、第４図Ｂ―Ｂ′の断面図。
FIG. 1 is a plan view showing an embodiment of the wafer stopping mechanism of the present invention. FIG. 2 is a sectional view taken along line AA' in FIG. FIG. 3 is a position diagram of wafers being transported. FIG. 4 is a plan view of a conventional wafer stopping mechanism. Fifth
The figure is a sectional view taken along line BB' in FIG.
Claims (1)
ーム上に停止させるウエハー停止機構において、
前記石英アームに、ベルト駆動によるウエハーが
直接衝突する事を防ぐためにストツパーを備えた
事を特徴とするウエハー停止機構。 In a wafer stopping mechanism that stops a wafer transported by a belt transport on a quartz arm,
A wafer stopping mechanism characterized in that the quartz arm is provided with a stopper to prevent a belt-driven wafer from directly colliding with the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16463088U JPH0284332U (en) | 1988-12-20 | 1988-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16463088U JPH0284332U (en) | 1988-12-20 | 1988-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284332U true JPH0284332U (en) | 1990-06-29 |
Family
ID=31450410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16463088U Pending JPH0284332U (en) | 1988-12-20 | 1988-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284332U (en) |
-
1988
- 1988-12-20 JP JP16463088U patent/JPH0284332U/ja active Pending