JPS6223249U - - Google Patents
Info
- Publication number
- JPS6223249U JPS6223249U JP11418285U JP11418285U JPS6223249U JP S6223249 U JPS6223249 U JP S6223249U JP 11418285 U JP11418285 U JP 11418285U JP 11418285 U JP11418285 U JP 11418285U JP S6223249 U JPS6223249 U JP S6223249U
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- board
- belt
- passes
- fulcrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Description
第１図Ａはウエハ停止機構の側面図、同図Ｂは
ウエハ停止機構の平面図、第２図Ａ〜Ｃはウエハ
の停止機構を説明する側面図、第３図はウエハの
停止機構を説明する正面図、である。
図において、１はストツパ、２は支点、３は回
動部、４は停止棒、５はベルト、６はウエハ、７
は端部、８は発光素子、９は受光素子、１０は光
センサ、１１はモータ、１２はスプロケツト、で
ある。
FIG. 1A is a side view of the wafer stopping mechanism, FIG. 1B is a plan view of the wafer stopping mechanism, FIGS. 2A to C are side views explaining the wafer stopping mechanism, and FIG. This is a front view. In the figure, 1 is a stopper, 2 is a fulcrum, 3 is a rotating part, 4 is a stop bar, 5 is a belt, 6 is a wafer, and 7
8 is an end, 8 is a light emitting element, 9 is a light receiving element, 10 is a light sensor, 11 is a motor, and 12 is a sprocket.
Claims (1)
可能であると共に基板が通過する元の位置に復元
するストツパ１を基板停止位置に設置し、ベルト
により搬送されてきた基板６がストツパ１の端部
７に当たり、該ストツパ１の端部７を押し下げな
がらストツパ位置を通過するのをセンサ１０で検
知して前記ベルト５を逆回転せしめる機構を設け
、復元した該ストツパ１により基板６の移動を停
止させることを特徴とする基板の搬送停止機構。 A stopper 1 that can rotate in the advancing direction of the board 6 about the fulcrum 2 and restore it to its original position through which the board passes is installed at the board stopping position, and the board 6 that has been conveyed by the belt is placed at the end of the stopper 1. 7, a sensor 10 detects when the end 7 of the stopper 1 passes through the stopper position and rotates the belt 5 in the opposite direction, and the restored stopper 1 stops the movement of the substrate 6. A board transport stop mechanism characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11418285U JPS6223249U (en) | 1985-07-25 | 1985-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11418285U JPS6223249U (en) | 1985-07-25 | 1985-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6223249U true JPS6223249U (en) | 1987-02-12 |
Family
ID=30996681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11418285U Pending JPS6223249U (en) | 1985-07-25 | 1985-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6223249U (en) |
-
1985
- 1985-07-25 JP JP11418285U patent/JPS6223249U/ja active Pending
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