JPH0243855U - - Google Patents
Info
- Publication number
- JPH0243855U JPH0243855U JP12184588U JP12184588U JPH0243855U JP H0243855 U JPH0243855 U JP H0243855U JP 12184588 U JP12184588 U JP 12184588U JP 12184588 U JP12184588 U JP 12184588U JP H0243855 U JPH0243855 U JP H0243855U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- roller
- guide
- guide roller
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Framework For Endless Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Description
第１図及び第２図は本考案のウエハ搬送装置の
一実施例を示す動作説明図及び装置構成図、第３
図〜第５図は従来装置の動作説明図である。
１，４：ウエハ、３：キヤリア、５：送りロー
ラ、６：ガイド、７：ガイドローラ、８：中心合
せローラ、１０：ベース、１１：駆動源。
1 and 2 are operational explanatory diagrams and device configuration diagrams showing one embodiment of the wafer transfer device of the present invention, and FIG.
5 to 5 are explanatory diagrams of the operation of the conventional device. 1, 4: wafer, 3: carrier, 5: feed roller, 6: guide, 7: guide roller, 8: centering roller, 10: base, 11: drive source.
Claims (1)
するウエハ搬送装置において、前記ウエハを前記
キヤリア方向へ移動させる送りローラと、該ウエ
ハの進路を定めるガイドと、該ガイドに沿つて進
行するガイドローラと、該ガイドローラと一体に
構成され前記ガイドローラの動作により前記ウエ
ハの進行位置を修正する中心合せローラと、前記
送りローラ、前記ガイドローラ及び前記中心合せ
ローラを支持するベースと、該ベースを往復動さ
せる駆動源とよりなることを特徴とするウエハ搬
送装置。 A wafer transport device that transports a wafer with a belt and stores it in a carrier, comprising: a feed roller that moves the wafer in the direction of the carrier, a guide that determines the course of the wafer, and a guide roller that moves along the guide. a centering roller configured integrally with a guide roller and correcting the advancing position of the wafer by the operation of the guide roller; a base supporting the feed roller, the guide roller, and the centering roller; and reciprocating the base. A wafer transfer device characterized by comprising a driving source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12184588U JPH0243855U (en) | 1988-09-16 | 1988-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12184588U JPH0243855U (en) | 1988-09-16 | 1988-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0243855U true JPH0243855U (en) | 1990-03-27 |
Family
ID=31369228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12184588U Pending JPH0243855U (en) | 1988-09-16 | 1988-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243855U (en) |
-
1988
- 1988-09-16 JP JP12184588U patent/JPH0243855U/ja active Pending
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