JPH0284321U - - Google Patents

Info

Publication number
JPH0284321U
JPH0284321U JP16470188U JP16470188U JPH0284321U JP H0284321 U JPH0284321 U JP H0284321U JP 16470188 U JP16470188 U JP 16470188U JP 16470188 U JP16470188 U JP 16470188U JP H0284321 U JPH0284321 U JP H0284321U
Authority
JP
Japan
Prior art keywords
susceptor
reaction tube
raw material
material gas
mocvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16470188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16470188U priority Critical patent/JPH0284321U/ja
Publication of JPH0284321U publication Critical patent/JPH0284321U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16470188U 1988-12-20 1988-12-20 Pending JPH0284321U (US06229276-20010508-P00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16470188U JPH0284321U (US06229276-20010508-P00022.png) 1988-12-20 1988-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16470188U JPH0284321U (US06229276-20010508-P00022.png) 1988-12-20 1988-12-20

Publications (1)

Publication Number Publication Date
JPH0284321U true JPH0284321U (US06229276-20010508-P00022.png) 1990-06-29

Family

ID=31450542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16470188U Pending JPH0284321U (US06229276-20010508-P00022.png) 1988-12-20 1988-12-20

Country Status (1)

Country Link
JP (1) JPH0284321U (US06229276-20010508-P00022.png)

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