JPH028153U - - Google Patents
Info
- Publication number
- JPH028153U JPH028153U JP8550288U JP8550288U JPH028153U JP H028153 U JPH028153 U JP H028153U JP 8550288 U JP8550288 U JP 8550288U JP 8550288 U JP8550288 U JP 8550288U JP H028153 U JPH028153 U JP H028153U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- semi
- semiconductor substrate
- insulating semiconductor
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8550288U JPH028153U (fi) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8550288U JPH028153U (fi) | 1988-06-27 | 1988-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028153U true JPH028153U (fi) | 1990-01-19 |
Family
ID=31310170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8550288U Pending JPH028153U (fi) | 1988-06-27 | 1988-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028153U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0399461A (ja) * | 1989-09-12 | 1991-04-24 | Mitsubishi Electric Corp | Ｍｉｍキャパシタを具備した半導体装置 |
-
1988
- 1988-06-27 JP JP8550288U patent/JPH028153U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0399461A (ja) * | 1989-09-12 | 1991-04-24 | Mitsubishi Electric Corp | Ｍｉｍキャパシタを具備した半導体装置 |