JPH028133U - - Google Patents
Info
- Publication number
- JPH028133U JPH028133U JP8504288U JP8504288U JPH028133U JP H028133 U JPH028133 U JP H028133U JP 8504288 U JP8504288 U JP 8504288U JP 8504288 U JP8504288 U JP 8504288U JP H028133 U JPH028133 U JP H028133U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- loading
- outer periphery
- utility
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8504288U JPH028133U (cs) | 1988-06-29 | 1988-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8504288U JPH028133U (cs) | 1988-06-29 | 1988-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028133U true JPH028133U (cs) | 1990-01-19 |
Family
ID=31309715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8504288U Pending JPH028133U (cs) | 1988-06-29 | 1988-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028133U (cs) |
-
1988
- 1988-06-29 JP JP8504288U patent/JPH028133U/ja active Pending