JPS61142445U - - Google Patents
Info
- Publication number
- JPS61142445U JPS61142445U JP2682785U JP2682785U JPS61142445U JP S61142445 U JPS61142445 U JP S61142445U JP 2682785 U JP2682785 U JP 2682785U JP 2682785 U JP2682785 U JP 2682785U JP S61142445 U JPS61142445 U JP S61142445U
- Authority
- JP
- Japan
- Prior art keywords
- processing container
- annealing
- wafer holder
- view
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2682785U JPS61142445U (cs) | 1985-02-25 | 1985-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2682785U JPS61142445U (cs) | 1985-02-25 | 1985-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142445U true JPS61142445U (cs) | 1986-09-03 |
Family
ID=30523200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2682785U Pending JPS61142445U (cs) | 1985-02-25 | 1985-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142445U (cs) |
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1985
- 1985-02-25 JP JP2682785U patent/JPS61142445U/ja active Pending