JPH0281323A - ロータリーエンコーダ用磁気ディスクの製造方法 - Google Patents

Info

Publication number

JPH0281323A

JPH0281323A JP23426588A JP23426588A JPH0281323A JP H0281323 A JPH0281323 A JP H0281323A JP 23426588 A JP23426588 A JP 23426588A JP 23426588 A JP23426588 A JP 23426588A JP H0281323 A JPH0281323 A JP H0281323A

Authority

JP

Japan

Prior art keywords

magnetic

targets

disk

target

substrate

Prior art date

1988-09-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

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• 230000005291 magnetic effect Effects 0.000 title claims description 69
• 238000004519 manufacturing process Methods 0.000 title claims description 13
• 239000000758 substrate Substances 0.000 claims abstract description 31
• 238000004544 sputter deposition Methods 0.000 claims abstract description 24
• 230000005684 electric field Effects 0.000 claims abstract description 8
• 238000000034 method Methods 0.000 claims description 15
• 238000000151 deposition Methods 0.000 claims description 13
• 239000003302 ferromagnetic material Substances 0.000 claims description 12
• 230000008021 deposition Effects 0.000 claims description 11
• 239000000463 material Substances 0.000 abstract description 7
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 4
• 229910052782 aluminium Inorganic materials 0.000 abstract description 4
• 238000007740 vapor deposition Methods 0.000 abstract description 3
• 238000010438 heat treatment Methods 0.000 abstract description 2
• ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 abstract 2
• 239000010409 thin film Substances 0.000 description 16
• 239000000696 magnetic material Substances 0.000 description 10
• 239000007789 gas Substances 0.000 description 6
• 230000000694 effects Effects 0.000 description 5
• 239000003973 paint Substances 0.000 description 5
• 238000010586 diagram Methods 0.000 description 4
• 150000002500 ions Chemical class 0.000 description 4
• 229910045601 alloy Inorganic materials 0.000 description 3
• 239000000956 alloy Substances 0.000 description 3
• 239000011230 binding agent Substances 0.000 description 3
• 239000006247 magnetic powder Substances 0.000 description 3
• 230000002093 peripheral effect Effects 0.000 description 3
• 239000011347 resin Substances 0.000 description 3
• 229920005989 resin Polymers 0.000 description 3
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• 238000001755 magnetron sputter deposition Methods 0.000 description 2
• 229910052779 Neodymium Inorganic materials 0.000 description 1
• 229910052786 argon Inorganic materials 0.000 description 1
• KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 229910001004 magnetic alloy Inorganic materials 0.000 description 1
• 230000005415 magnetization Effects 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
• 229910052761 rare earth metal Inorganic materials 0.000 description 1
• 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
• 238000005245 sintering Methods 0.000 description 1