JPH028039U - - Google Patents
Info
- Publication number
- JPH028039U JPH028039U JP8291788U JP8291788U JPH028039U JP H028039 U JPH028039 U JP H028039U JP 8291788 U JP8291788 U JP 8291788U JP 8291788 U JP8291788 U JP 8291788U JP H028039 U JPH028039 U JP H028039U
- Authority
- JP
- Japan
- Prior art keywords
- rotary plate
- base plate
- center
- sliders
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Jigs For Machine Tools (AREA)
- Control Of Position Or Direction (AREA)
Description
第１図は本考案の１実施例装置の構成を示す斜
視図、第２図は摺動子の立面図、第３図及び第４
図は摺動子の移動機構を説明する平面図、第５図
Ａは本考案の５本の位置決めピンによるウエハの
位置決めを示す平面図、同図Ｂ，Ｃは位置決めピ
ンが４本ないし３本の場合の誤差を示す平面図で
ある。
２……ベース板、４……真空吸着チヤツク、５
……モータ、６……透溝、７……ガイドレール、
８……摺動子、９……位置決めピン、１０……連
結軸、１１……回転板、１２……軸、１３……ロ
ツド、１４，１５……バネかけ軸、１６……スプ
リング、１７……フオーク、１８……クランク、
１９……ローラ、２０……パルスモータ、２１…
…セクター板、２３……ランプ、２４……光電素
子、Ｗ……ウエハ、Ｆ……オリエンテーシヨン・
フラツト。
Fig. 1 is a perspective view showing the configuration of an embodiment of the device of the present invention, Fig. 2 is an elevational view of the slider, Figs.
The figure is a plan view explaining the movement mechanism of the slider, FIG. FIG. 3 is a plan view showing an error in the case of 2...Base plate, 4...Vacuum suction chuck, 5
... Motor, 6 ... Transparent groove, 7 ... Guide rail,
8... Slider, 9... Positioning pin, 10... Connection shaft, 11... Rotating plate, 12... Shaft, 13... Rod, 14, 15... Spring loaded shaft, 16... Spring, 17 ...Fork, 18...Crank,
19...roller, 20...pulse motor, 21...
...Sector plate, 23...Lamp, 24...Photoelectric element, W...Wafer, F...Orientation
Flat.
Claims (1)
したベース板と、 該ベース板に沿つて、前記ウエハ支持手段装着
位置を中心として、放射状に設置した複数組のガ
イドレールと、 該ガイドレレールにそれぞれ摺動可能に装着さ
れ、前記ベース板の上面に突出する上端側に位置
決めピンを立設し、かつ、下面側に連結軸を垂設
した複数個の摺動子と、 前記ベース板の下方に、前記中心位置回りに回
動可能に設置された回転板と、 該回転板の周縁に、前記各ガイドレールの配置
と等しい角度間隔で、かつ、中心から等距離の位
置に、それぞれ一端が枢着され、他端が前記摺動
子の下面に垂設された連結軸に係合することによ
り、前記回転板の回転により前記複数個の摺動子
をそれぞれのガイドレールに沿つて、同期的に移
動させる複数個のそれぞれ等長のロツドと、 前記回転板の周縁から半径方向に突出した回転
駆動用のフオークと、 先端部が前記フオークに摺動可能に嵌設されて
回転するクランクと、 該クランクを回転駆動するためのパルスモータ
と、 前記各摺動子が、外方へ移動した位置を基準と
して、前記パルスモータに所要個数の制御パルス
を入力させ、前記回転板を入力パルス数に対応す
る角度回転させて、前記各摺動子に立設した位置
決めピンを、対象とするウエハの寸法に対応する
位置に、同期的に移動させる駆動制御手段とを備
えたウエハ位置決め装置。[Claims for Utility Model Registration] A base plate that is held horizontally and has a wafer support means attached to its center, and a plurality of sets of guides installed radially along the base plate with the wafer support means attached position as the center. a rail; and a plurality of sliding slides each slidably attached to the guide rail, each having a positioning pin erected on the upper end side protruding from the upper surface of the base plate, and a connecting shaft vertically provided on the lower surface side. a rotary plate installed below the base plate so as to be rotatable about the center position; and a rotary plate arranged on the periphery of the rotary plate at angular intervals equal to the arrangement of the guide rails and equidistant from the center. One end of each is pivotally connected at a distance, and the other end engages with a connecting shaft vertically installed on the lower surface of the slider, so that the plurality of sliders can be rotated by rotation of the rotary plate. a plurality of rods each having the same length to be moved synchronously along a guide rail; a fork for rotational driving protruding in a radial direction from the periphery of the rotary plate; a tip portion slidable on the fork; a crank that is fitted and rotates, a pulse motor for rotationally driving the crank, and a required number of control pulses input to the pulse motor based on a position where each of the sliders moves outward. , drive control means for rotating the rotary plate through an angle corresponding to the number of input pulses and synchronously moving positioning pins provided upright on each of the sliders to positions corresponding to the dimensions of the target wafer; Wafer positioning device equipped with
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8291788U JPH0625013Y2 (en) | 1988-06-24 | 1988-06-24 | Wafer positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8291788U JPH0625013Y2 (en) | 1988-06-24 | 1988-06-24 | Wafer positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH028039U true JPH028039U (en) | 1990-01-18 |
| JPH0625013Y2 JPH0625013Y2 (en) | 1994-06-29 |
Family
ID=31307652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8291788U Expired - Lifetime JPH0625013Y2 (en) | 1988-06-24 | 1988-06-24 | Wafer positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625013Y2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60174113U (en) * | 1984-04-25 | 1985-11-18 | 松下電工株式会社 | Lighting fixture shade mounting device |
| JPH0416950U (en) * | 1990-06-01 | 1992-02-12 | ||
| JPH10335429A (en) * | 1997-06-04 | 1998-12-18 | Tokyo Electron Ltd | Wafer allignment and apparatus therefor |
| JP2001001245A (en) * | 1999-06-21 | 2001-01-09 | Hoya Corp | Spectacles lens centering device |
| JP2003068830A (en) * | 2001-08-23 | 2003-03-07 | Advantest Corp | Positioning and fixing device for wafer transport |
| CN110838460A (en) * | 2018-08-15 | 2020-02-25 | 致茂电子股份有限公司 | Wafer rotating temporary placing table |
| CN115179078A (en) * | 2022-07-27 | 2022-10-14 | 江苏恒升兴液压机械有限公司 | Anchor clamps are used in motor casing processing |
-
1988
- 1988-06-24 JP JP8291788U patent/JPH0625013Y2/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60174113U (en) * | 1984-04-25 | 1985-11-18 | 松下電工株式会社 | Lighting fixture shade mounting device |
| JPH0416950U (en) * | 1990-06-01 | 1992-02-12 | ||
| JPH10335429A (en) * | 1997-06-04 | 1998-12-18 | Tokyo Electron Ltd | Wafer allignment and apparatus therefor |
| JP2001001245A (en) * | 1999-06-21 | 2001-01-09 | Hoya Corp | Spectacles lens centering device |
| JP2003068830A (en) * | 2001-08-23 | 2003-03-07 | Advantest Corp | Positioning and fixing device for wafer transport |
| JP4603209B2 (en) * | 2001-08-23 | 2010-12-22 | 株式会社アドバンテスト | Positioning and fixing device for wafer transfer |
| CN110838460A (en) * | 2018-08-15 | 2020-02-25 | 致茂电子股份有限公司 | Wafer rotating temporary placing table |
| CN110838460B (en) * | 2018-08-15 | 2023-08-22 | 致茂电子股份有限公司 | Wafer rotating temporary placing table |
| CN115179078A (en) * | 2022-07-27 | 2022-10-14 | 江苏恒升兴液压机械有限公司 | Anchor clamps are used in motor casing processing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0625013Y2 (en) | 1994-06-29 |
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