JPH028031U - - Google Patents
Info
- Publication number
- JPH028031U JPH028031U JP8374788U JP8374788U JPH028031U JP H028031 U JPH028031 U JP H028031U JP 8374788 U JP8374788 U JP 8374788U JP 8374788 U JP8374788 U JP 8374788U JP H028031 U JPH028031 U JP H028031U
- Authority
- JP
- Japan
- Prior art keywords
- section
- pulling
- transfer mechanism
- input section
- treatment tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 4
- 238000005187 foaming Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000008367 deionised water Substances 0.000 claims 3
- 229910021641 deionized water Inorganic materials 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 230000005587 bubbling Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8374788U JPH028031U (zh) | 1988-06-24 | 1988-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8374788U JPH028031U (zh) | 1988-06-24 | 1988-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH028031U true JPH028031U (zh) | 1990-01-18 |
Family
ID=31308458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8374788U Pending JPH028031U (zh) | 1988-06-24 | 1988-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028031U (zh) |
-
1988
- 1988-06-24 JP JP8374788U patent/JPH028031U/ja active Pending