JPH0279448U - - Google Patents
Info
- Publication number
- JPH0279448U JPH0279448U JP15832188U JP15832188U JPH0279448U JP H0279448 U JPH0279448 U JP H0279448U JP 15832188 U JP15832188 U JP 15832188U JP 15832188 U JP15832188 U JP 15832188U JP H0279448 U JPH0279448 U JP H0279448U
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- plastic film
- laser
- intensity
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002985 plastic film Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000002244 precipitate Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 229920006255 plastic film Polymers 0.000 claims 2
- 230000001066 destructive effect Effects 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15832188U JPH0279448U ( ) | 1988-12-05 | 1988-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15832188U JPH0279448U ( ) | 1988-12-05 | 1988-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0279448U true JPH0279448U ( ) | 1990-06-19 |
Family
ID=31438541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15832188U Pending JPH0279448U ( ) | 1988-12-05 | 1988-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0279448U ( ) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62138819A (ja) * | 1985-12-13 | 1987-06-22 | Hitachi Ltd | 走査型レ−ザ顕微鏡 |
| JPS62235540A (ja) * | 1986-04-07 | 1987-10-15 | Mitsubishi Heavy Ind Ltd | 材料のレプリカ検査法 |
-
1988
- 1988-12-05 JP JP15832188U patent/JPH0279448U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62138819A (ja) * | 1985-12-13 | 1987-06-22 | Hitachi Ltd | 走査型レ−ザ顕微鏡 |
| JPS62235540A (ja) * | 1986-04-07 | 1987-10-15 | Mitsubishi Heavy Ind Ltd | 材料のレプリカ検査法 |
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