JPH0279023U - - Google Patents

Info

Publication number
JPH0279023U
JPH0279023U JP15869088U JP15869088U JPH0279023U JP H0279023 U JPH0279023 U JP H0279023U JP 15869088 U JP15869088 U JP 15869088U JP 15869088 U JP15869088 U JP 15869088U JP H0279023 U JPH0279023 U JP H0279023U
Authority
JP
Japan
Prior art keywords
wafer
support
parallel direction
end plates
side frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15869088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH079374Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988158690U priority Critical patent/JPH079374Y2/ja
Publication of JPH0279023U publication Critical patent/JPH0279023U/ja
Application granted granted Critical
Publication of JPH079374Y2 publication Critical patent/JPH079374Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1988158690U 1988-12-06 1988-12-06 ウエハ支持具 Expired - Lifetime JPH079374Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988158690U JPH079374Y2 (ja) 1988-12-06 1988-12-06 ウエハ支持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988158690U JPH079374Y2 (ja) 1988-12-06 1988-12-06 ウエハ支持具

Publications (2)

Publication Number Publication Date
JPH0279023U true JPH0279023U (zh) 1990-06-18
JPH079374Y2 JPH079374Y2 (ja) 1995-03-06

Family

ID=31439242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988158690U Expired - Lifetime JPH079374Y2 (ja) 1988-12-06 1988-12-06 ウエハ支持具

Country Status (1)

Country Link
JP (1) JPH079374Y2 (zh)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5346670A (en) * 1976-10-08 1978-04-26 Matsushita Electric Ind Co Ltd Electrostatic capaciyt coupling type touch switch
JPS5920629U (ja) * 1982-07-30 1984-02-08 株式会社テクニスコ 拡散治具
JPS5940444U (ja) * 1982-09-10 1984-03-15 住友軽金属工業株式会社 吊足場
JPS5940443U (ja) * 1982-09-08 1984-03-15 三井造船株式会社 赤道リング建造用吊足場
JPS6346670A (ja) * 1986-08-14 1988-02-27 Matsushita Commun Ind Co Ltd デイスクカ−トリツジ
JPS63278225A (ja) * 1987-05-08 1988-11-15 Teru Sagami Kk 熱処理用ボ−ト
JPH02123736A (ja) * 1988-11-02 1990-05-11 Tel Sagami Ltd 縦型熱処理炉用ウェハボート

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5346670A (en) * 1976-10-08 1978-04-26 Matsushita Electric Ind Co Ltd Electrostatic capaciyt coupling type touch switch
JPS5920629U (ja) * 1982-07-30 1984-02-08 株式会社テクニスコ 拡散治具
JPS5940443U (ja) * 1982-09-08 1984-03-15 三井造船株式会社 赤道リング建造用吊足場
JPS5940444U (ja) * 1982-09-10 1984-03-15 住友軽金属工業株式会社 吊足場
JPS6346670A (ja) * 1986-08-14 1988-02-27 Matsushita Commun Ind Co Ltd デイスクカ−トリツジ
JPS63278225A (ja) * 1987-05-08 1988-11-15 Teru Sagami Kk 熱処理用ボ−ト
JPH02123736A (ja) * 1988-11-02 1990-05-11 Tel Sagami Ltd 縦型熱処理炉用ウェハボート

Also Published As

Publication number Publication date
JPH079374Y2 (ja) 1995-03-06

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