JPH0278910A - Magnetic sensor - Google Patents
Magnetic sensorInfo
- Publication number
- JPH0278910A JPH0278910A JP63231256A JP23125688A JPH0278910A JP H0278910 A JPH0278910 A JP H0278910A JP 63231256 A JP63231256 A JP 63231256A JP 23125688 A JP23125688 A JP 23125688A JP H0278910 A JPH0278910 A JP H0278910A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic sensing
- magnetic sensor
- magnetically sensitive
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 100
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000004907 flux Effects 0.000 abstract description 5
- 238000001259 photo etching Methods 0.000 abstract description 5
- 229910003266 NiCo Inorganic materials 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000005381 magnetic domain Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 210000004916 vomit Anatomy 0.000 description 1
- 230000008673 vomiting Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［発明の目的コ
（産業上の利用分野）
本発明は磁気センサに関し、更に詳しくは回転物体や移
動物体の変位検出に好適な磁気センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Objective of the Invention (Industrial Application Field) The present invention relates to a magnetic sensor, and more particularly to a magnetic sensor suitable for detecting displacement of a rotating object or a moving object.
（従来の技術）
この種の磁気センサの従来例を第５図を参照して説明す
る。(Prior Art) A conventional example of this type of magnetic sensor will be described with reference to FIG.
同図に示す磁気センサ３０は、ガラス基板３１の一方の
平面にＮｉＣｏ等の磁気抵抗効果を発揮する強磁性薄膜
を蒸着し、更に、例えばフォトエッヂングにより同一形
状の第１．第２の感磁部ＭＲ３、ＭＲ４、接続部３２．
電極部３３ａ。The magnetic sensor 30 shown in the figure is made by depositing a ferromagnetic thin film such as NiCo that exhibits a magnetoresistive effect on one plane of a glass substrate 31, and then depositing a first film of the same shape by, for example, photo-etching. Second magnetically sensitive parts MR3, MR4, connection part 32.
Electrode part 33a.
３３ｂ、３３ｃからなるパターン形成を行うことにより
構成したものである。It is constructed by forming a pattern consisting of 33b and 33c.
そして、両端側の電極部３３８．３３Ｇに電源３４を接
続し、中央の電極部３３ｂから両感磁部ＭＲ３、ＭＲ４
の磁気抵抗効果に基く検出信号を取出すようになってい
る。Then, the power supply 34 is connected to the electrode portions 338.33G on both end sides, and both magnetic sensing portions MR3, MR4 are connected from the center electrode portion 33b.
A detection signal based on the magnetoresistance effect is extracted.
この磁気センサ３０は、第６図に示すように回転体３５
の外周に近接して配置され、この回転体３５の外周に設
けたＮ、Ｓの磁極からの磁界を両感磁部ＭＲ３、ＭＲ４
により検出するようになっている。This magnetic sensor 30 has a rotating body 35 as shown in FIG.
The magnetic fields from the N and S magnetic poles provided on the outer periphery of the rotating body 35 are transferred to both magnetic sensing parts MR3 and MR4.
It is designed to be detected by
しかしながら、上記構成の磁気センサ３０においては、
両感磁部ＭＲ３、ＭＲ４を構成する強磁性薄膜の部分が
同一の幅Ｗに形成され、且つ同一の形状となっているた
め、これら両感磁部ＭＲ３。However, in the magnetic sensor 30 with the above configuration,
Since the ferromagnetic thin film portions constituting both magnetically sensitive parts MR3 and MR4 are formed to have the same width W and have the same shape, both magnetically sensitive parts MR3.
ＭＲ４の温度特性、感磁特性が共に同一になってしまう
。The temperature characteristics and magnetic sensitivity characteristics of MR4 are both the same.
このうち、感磁特性が同一であると、両感磁部ＭＲ３、
ＭＲ４に回転体３５の磁極（例えばＮ極）から均等な磁
界が作用した場合、両感磁部ＭＲ１゜ＭＲ２の磁気抵抗
の変化が等しくなり中央の電極３３ｂに電位変動が生じ
ることはなく、この結果、このときの検出信号が得られ
ないという問題がある。Among these, if the magnetic sensing characteristics are the same, both magnetic sensing parts MR3,
When an equal magnetic field is applied to MR4 from the magnetic pole (for example, N pole) of the rotating body 35, the changes in the magnetic resistance of both magnetic sensing parts MR1 and MR2 are equal, and no potential fluctuation occurs in the central electrode 33b. As a result, there is a problem that a detection signal at this time cannot be obtained.
（発明が解決しようとする課題）
上述したように、従来の磁気センυにおいては両感磁部
の感磁特性が同一であることに起因して十分な検出感度
が得られないという問題がある。(Problems to be Solved by the Invention) As mentioned above, the conventional magnetic sensor υ has the problem that sufficient detection sensitivity cannot be obtained due to the fact that the magnetic sensing characteristics of both magnetic sensing parts are the same. .
そこで、本発明は両感磁部の構成を改良することによっ
て、検出感度の良好な磁気センサを提供することを目的
とするものである。Therefore, an object of the present invention is to provide a magnetic sensor with good detection sensitivity by improving the configurations of both magnetic sensing parts.
［発明の構成コ
（課題を解決するだめの手段）
請求項１記載の磁気センサは、基板上に２つの感磁部を
直列接続状態に設け両感磁部の接続部分から検出信号取
出し用の電極部を導出した磁気センサにおいて、前記両
感磁部の温度特性が等しく感磁特性が異なる構成とした
ものである。[Structure of the Invention (Means for Solving the Problem) The magnetic sensor according to claim 1 has two magnetically sensitive parts connected in series on a substrate, and a detection signal for taking out a detection signal from a connecting part of both magnetically sensitive parts. In the magnetic sensor from which electrode portions are derived, both magnetic sensing portions have the same temperature characteristics and different magnetic sensing characteristics.
請求項２記載の磁気センサは、請求項１記載の両感磁部
のうち、一方の感磁部は所定の幅を有する強磁性薄膜層
により形成し、他方の感磁部を前記一方の感磁部の強磁
性薄膜層の幅と等価的に等しくなる小幅の強磁性薄膜層
群により形成したものである。In the magnetic sensor according to a second aspect of the invention, one of the two magnetically sensitive parts according to the first aspect is formed of a ferromagnetic thin film layer having a predetermined width, and the other magnetically sensitive part is formed of a ferromagnetic thin film layer having a predetermined width. It is formed by a group of ferromagnetic thin film layers having a narrow width equivalent to the width of the ferromagnetic thin film layer of the magnetic part.
（作 用）
以下に上記構成の磁気センサの作用をそれぞれ説明する
。(Function) The function of the magnetic sensor having the above configuration will be explained below.
請求項１記載の磁気センサによれば、基板上に直接接続
状態に設けた両感磁部の温度特性が等しく感磁特性が異
なるようにしたことによって、この両感磁部に外部磁界
が作用した際温度変化の影響を受けることなく両感磁部
の接続部分から外部磁界に対応した出力信号を取出すこ
とができる。According to the magnetic sensor according to claim 1, the temperature characteristics of both magnetic sensing parts provided in direct connection on the substrate are equal and the magnetic sensing characteristics are different, so that an external magnetic field acts on both magnetic sensing parts. When this happens, an output signal corresponding to the external magnetic field can be extracted from the connecting portion of both magnetically sensitive parts without being affected by temperature changes.
請求項２記載の磁気センサによれば、両感磁部のうち、
一方の感磁部を所定幅の強磁性薄膜により形成し、他方
の感磁部を前記所定幅の強磁性薄膜層と等価的に等しい
幅となる小幅の強磁性薄膜層群により形成したことによ
って、これら両感磁部の温度特性が等価的に等しくなり
温度変化の影響がなくなると共に、外部磁界に対しては
所定幅を有する一方の感磁部の磁気抵抗の変化が大きく
、小幅の強磁性薄膜層群からなる他方の感磁部の磁気抵
抗の変化が小さくなる。According to the magnetic sensor according to claim 2, of both magnetically sensitive parts,
By forming one magnetically sensitive part from a ferromagnetic thin film with a predetermined width, and forming the other magnetically sensitive part from a group of narrow ferromagnetic thin film layers whose width is equivalently equal to the ferromagnetic thin film layer having the predetermined width. , the temperature characteristics of both magnetically sensitive parts are equivalently the same, eliminating the influence of temperature changes, and the change in magnetic resistance of one magnetically sensitive part having a predetermined width is large in response to an external magnetic field, resulting in a narrow ferromagnetic field. The change in the magnetic resistance of the other magnetically sensitive part made of the thin film layer group becomes smaller.
（実施例）
以下に本発明の実施例を第１図、第２図を参照して説明
する。(Example) An example of the present invention will be described below with reference to FIGS. 1 and 2.
尚、第１図に示す磁気センサ１において、前記磁気セン
サ３０と同一の機能を有するものには同一の符号を付し
て示す。In the magnetic sensor 1 shown in FIG. 1, those having the same functions as the magnetic sensor 30 are designated by the same reference numerals.
この磁気センサ１が前記磁気センサ３０と異なる点は、
第２図にも示すように２箇所の直線状部分からなる第１
の感磁部ＭＲｚの感磁領域の幅Ｌｏを例えば３０μｍと
し、また、２箇所の直線状部分からなる第２の感磁部Ｍ
Ｒ２を、それぞれ幅Ｌ１＝１０μｍ、間隔ｔｔ＝１０μ
ｍの３条の小幅部分により構成したことである。The difference between this magnetic sensor 1 and the magnetic sensor 30 is that
As shown in Figure 2, the first part consists of two straight parts.
The width Lo of the magnetically sensitive region of the magnetically sensitive portion MRz is set to 30 μm, for example, and the second magnetically sensitive portion M consists of two linear portions.
R2, width L1 = 10μm, interval tt = 10μm, respectively.
It is composed of three narrow sections of m.
第１．第２の感磁部ＭＲ１，ＭＲ２の形成方法は従来例
の場合と同様ＮｉＣｏの強磁性薄膜層のフォトエツチン
グによるものであるが、本実施例においては、特に第２
の感磁部ＭＲ２の感磁領域の幅を、まず（３Ｌ１＋２ｔ
１）としておき、この領域に幅ｔ１の間隔部分２箇所を
フォトエツチングにより形成してこの感磁領域の強磁性
薄膜層部分の合計幅３Ｌ１が第１の感磁部ＭＲ１の感磁
領域の幅Ｌｏと等しくすることが特徴である。1st. The second magnetically sensitive parts MR1 and MR2 are formed by photoetching the NiCo ferromagnetic thin film layer as in the conventional example, but in this example, the second
First, the width of the magnetically sensitive area of the magnetically sensitive part MR2 is (3L1+2t
1), two spaced parts with a width t1 are formed in this region by photoetching, and the total width 3L1 of the ferromagnetic thin film layer part of this magnetically sensitive area is the width of the magnetically sensitive area of the first magnetically sensitive part MR1. It is characterized by making it equal to Lo.
上記構成の磁気センサ１の作用を第３図をも参照して説
明する。The operation of the magnetic sensor 1 having the above configuration will be explained with reference to FIG. 3 as well.
この磁気センサ１の第１．第２の感磁部ＭＲ１。The first part of this magnetic sensor 1. Second magnetic sensing part MR1.
ＭＲ２に従来例に示す回転体外周の例えばＮ極からの磁
束が作用したものとする。Assume that magnetic flux from, for example, the N pole of the outer periphery of the rotating body shown in the conventional example acts on MR2.
このとき、第１．第２の感磁部ＭＲ１，ＭＲ２は直列接
続の状態であり、且つ、この磁気センサ１の両感磁部Ｍ
ＲＩ 、ＭＲ２における感磁領域の強磁性薄膜層の幅は
等価的に等しいので両感磁領域の温度特性も等しくなり
、周囲の温度変化は両感磁部ＭＲｔ 、ＭＲ２により打
消されてこの磁気センサ１は温度変化の影響を受けるこ
とはない。At this time, the first. The second magnetically sensitive parts MR1 and MR2 are connected in series, and both magnetically sensitive parts M of this magnetic sensor 1
Since the widths of the ferromagnetic thin film layers in the magnetically sensitive regions in RI and MR2 are equivalently equal, the temperature characteristics of both magnetically sensitive regions are also the same, and ambient temperature changes are canceled by both magnetically sensitive regions MRt and MR2, resulting in this magnetic sensor. 1 is not affected by temperature changes.
一方、Ｎ極からの磁束に対しては、第１の感磁部ＭＲＩ
を構成する磁区のスピンが大きく、第２の感磁部ＭＲ２
を構成する磁区のスピンはこの領域が小幅であるため小
さくなり、この結果、両感磁部ＭＲ１、ＭＲ２の感磁特
性は第３図に示すように第１の感磁部ＭＲ１が大きく変
化し、第２の感磁部ＭＲ２が小さく変化する。On the other hand, for magnetic flux from the N pole, the first magnetic sensing part MRI
The spin of the magnetic domain constituting the second magnetically sensitive portion MR2 is large.
The spins of the magnetic domains constituting the magnetic domain become small because this region has a small width, and as a result, the magnetic sensitivity characteristics of both magnetically sensitive parts MR1 and MR2 change greatly in the first magnetically sensitive part MR1, as shown in Figure 3. , the second magnetically sensitive portion MR2 changes slightly.
このような両感磁部ＭＲ１、ＭＲ２の感磁特性の相違に
より、中央の電極部３３ｂからＮ極からの磁束に応じた
出力信号を感度良く得ることができる。Due to the difference in the magnetic sensing characteristics of both the magnetic sensing parts MR1 and MR2, an output signal corresponding to the magnetic flux from the N pole can be obtained from the center electrode part 33b with high sensitivity.
上述した磁気センサ１の動作はＳ極からの磁束が両感磁
部ＭＲ１，ＭＲ２に作用する場合にも同様であることは
言うまでもない。It goes without saying that the above-described operation of the magnetic sensor 1 is the same when the magnetic flux from the S pole acts on both magnetic sensing parts MR1 and MR2.
本発明は上述した実施例に限定されるものではなく、そ
の要旨の範囲内で種々の変形が可能である。The present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the invention.
第４図は本発明の変形例を示すものでおり、同図に示す
磁気センサ１Ａは、第２の感磁部ＭＲ２’の間隔部分の
方向を前記磁気センサ１の第２の感磁部ＭＲ２の間隔部
分と直交するような方向としたことが前記磁気センサ１
と相違している。FIG. 4 shows a modification of the present invention, and the magnetic sensor 1A shown in the figure is configured such that the direction of the interval between the second magnetically sensitive parts MR2' and the second magnetically sensitive part MR2' of the magnetic sensor 1 is The direction of the magnetic sensor 1 is perpendicular to the interval between
There is a difference between
このような磁気センサ１Ａによっても、前記磁気センサ
１と同様の作用を発揮させることかできる。Such a magnetic sensor 1A can also exhibit the same effect as the magnetic sensor 1 described above.
［発明の効果］
以上詳述した本発明によれば、温度変化の影響を受ける
ことがなく、しかも、検出感度の良好な磁気センサを提
供することができる。[Effects of the Invention] According to the present invention described in detail above, it is possible to provide a magnetic sensor that is not affected by temperature changes and has good detection sensitivity.
また、請求項２記載の発明によれば、両感磁部の温度特
性が等しく、且つ、感磁特性は一方が大きく他方が小さ
い磁気センサを提供することができる。Further, according to the second aspect of the invention, it is possible to provide a magnetic sensor in which the temperature characteristics of both magnetic sensing portions are equal, and the magnetic sensing characteristics of one are large and the other are small.
第１図は本発明の磁気センサの実施例を示す平面図、第
２図は同上の部分拡大平面図、第３図は第１図に示す磁
気センサの特性図、第４図は本発明の変形例を示す平面
図、第５図は従来の磁気センサの平面図、第６図は磁気
センサの使用例を示す斜視図である。
１・・・磁気センサ、 ３１・・・基板、３３ａ、
３３ｂ、３３ｃ・・・電極部、ＭＲｚ・・・第１の感磁
部、ＭＲ２・・・第２の感磁部。
蔓穢幻手吐Fig. 1 is a plan view showing an embodiment of the magnetic sensor of the present invention, Fig. 2 is a partially enlarged plan view of the same as above, Fig. 3 is a characteristic diagram of the magnetic sensor shown in Fig. 1, and Fig. 4 is a plan view showing an embodiment of the magnetic sensor of the present invention. FIG. 5 is a plan view showing a modified example, FIG. 5 is a plan view of a conventional magnetic sensor, and FIG. 6 is a perspective view showing an example of use of the magnetic sensor. 1... Magnetic sensor, 31... Substrate, 33a,
33b, 33c...electrode section, MRz...first magnetic sensing part, MR2...second magnetic sensing part. Vine phantom hand vomit
Claims (2)
磁部の接続部分から検出信号取出し用の電極部を導出し
た磁気センサにおいて、前記両感磁部の温度特性が等し
く感磁特性が異なる構成としたことを特徴とする磁気セ
ンサ。(1) In a magnetic sensor in which two magnetically sensitive parts are connected in series on a substrate and an electrode part for extracting a detection signal is derived from the connecting part of both magnetically sensitive parts, the temperature characteristics of both magnetically sensitive parts are equally sensitive. A magnetic sensor characterized by having a configuration with different magnetic properties.
有する強磁性薄膜層により形成され、他方の感磁部は前
記一方の感磁部の強磁性薄膜層の幅と等価的に等しくな
る小幅の強磁性薄膜層群により形成されるものである請
求項１記載の磁気センサ。(2) Among the two magnetically sensitive parts, one magnetically sensitive part is formed of a ferromagnetic thin film layer having a predetermined width, and the other magnetically sensitive part is formed with a width equal to the width of the ferromagnetic thin film layer of the one magnetically sensitive part. 2. The magnetic sensor according to claim 1, wherein the magnetic sensor is formed by a group of narrow ferromagnetic thin film layers that are equivalently equal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63231256A JPH0278910A (en) | 1988-09-14 | 1988-09-14 | Magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63231256A JPH0278910A (en) | 1988-09-14 | 1988-09-14 | Magnetic sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0278910A true JPH0278910A (en) | 1990-03-19 |
Family
ID=16920765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63231256A Pending JPH0278910A (en) | 1988-09-14 | 1988-09-14 | Magnetic sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0278910A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04265819A (en) * | 1990-11-06 | 1992-09-22 | Santa Barbara Res Center | System for detecting change in magnetic field and manufacture thereof |
| JPH0712505A (en) * | 1993-06-28 | 1995-01-17 | Ckd Corp | Magnetic linear scale |
-
1988
- 1988-09-14 JP JP63231256A patent/JPH0278910A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04265819A (en) * | 1990-11-06 | 1992-09-22 | Santa Barbara Res Center | System for detecting change in magnetic field and manufacture thereof |
| JPH0712505A (en) * | 1993-06-28 | 1995-01-17 | Ckd Corp | Magnetic linear scale |
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