JPH0278571U - - Google Patents
Info
- Publication number
- JPH0278571U JPH0278571U JP15923988U JP15923988U JPH0278571U JP H0278571 U JPH0278571 U JP H0278571U JP 15923988 U JP15923988 U JP 15923988U JP 15923988 U JP15923988 U JP 15923988U JP H0278571 U JPH0278571 U JP H0278571U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- single crystal
- reaction tube
- semiconductor
- quartz reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15923988U JPH0278571U (is) | 1988-12-07 | 1988-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15923988U JPH0278571U (is) | 1988-12-07 | 1988-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0278571U true JPH0278571U (is) | 1990-06-15 |
Family
ID=31440275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15923988U Pending JPH0278571U (is) | 1988-12-07 | 1988-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0278571U (is) |
-
1988
- 1988-12-07 JP JP15923988U patent/JPH0278571U/ja active Pending
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