JPS63137931U - - Google Patents
Info
- Publication number
- JPS63137931U JPS63137931U JP3005887U JP3005887U JPS63137931U JP S63137931 U JPS63137931 U JP S63137931U JP 3005887 U JP3005887 U JP 3005887U JP 3005887 U JP3005887 U JP 3005887U JP S63137931 U JPS63137931 U JP S63137931U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- epitaxial growth
- spirally wound
- growth furnace
- axial direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005887U JPH0610672Y2 (ja) | 1987-03-02 | 1987-03-02 | エピタキシヤル成長炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005887U JPH0610672Y2 (ja) | 1987-03-02 | 1987-03-02 | エピタキシヤル成長炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63137931U true JPS63137931U (is) | 1988-09-12 |
| JPH0610672Y2 JPH0610672Y2 (ja) | 1994-03-16 |
Family
ID=30834521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3005887U Expired - Lifetime JPH0610672Y2 (ja) | 1987-03-02 | 1987-03-02 | エピタキシヤル成長炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610672Y2 (is) |
-
1987
- 1987-03-02 JP JP3005887U patent/JPH0610672Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610672Y2 (ja) | 1994-03-16 |