JPH0278286A - Solid-state laser device - Google Patents
Solid-state laser deviceInfo
- Publication number
- JPH0278286A JPH0278286A JP63228572A JP22857288A JPH0278286A JP H0278286 A JPH0278286 A JP H0278286A JP 63228572 A JP63228572 A JP 63228572A JP 22857288 A JP22857288 A JP 22857288A JP H0278286 A JPH0278286 A JP H0278286A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- solid
- state laser
- light
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims abstract description 14
- 230000005284 excitation Effects 0.000 claims description 42
- 238000000034 method Methods 0.000 abstract description 2
- 239000007787 solid Substances 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000295 emission spectrum Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000001235 sensitizing effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
- H01S3/093—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp focusing or directing the excitation energy into the active medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0602—Crystal lasers or glass lasers
- H01S3/0608—Laser crystal with a hole, e.g. a hole or bore for housing a flashlamp or a mirror
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
- H01S3/093—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp focusing or directing the excitation energy into the active medium
- H01S3/0931—Imaging pump cavity, e.g. elliptical
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、レーザ加工等に用いられるレーザに関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a laser used for laser processing and the like.
［従来の技術］
従来、レーザ用には、第５図のような集光器が用いられ
ている。この図のように、楕円筒状の反射鏡５１内の夫
々の焦点の位置に励起ランプ５３と、固体レーザロッド
を収め、励起光５４ａ、５４ｂを固体レーザロッド５２
に集光するように、設置されている。[Prior Art] Conventionally, a condenser as shown in FIG. 5 has been used for lasers. As shown in this figure, an excitation lamp 53 and a solid-state laser rod are housed at respective focal points within an elliptical cylindrical reflecting mirror 51, and excitation lights 54a and 54b are directed to the solid-state laser rod 52.
It is installed so that the light is focused on the
例えば、Ｎｄ：ＹＡＧレーザの場合、励起ランプの入力
エネルギーの約２．６％しかレーザ発振に寄与しない。For example, in the case of a Nd:YAG laser, only about 2.6% of the pump lamp input energy contributes to lasing.
人力エネルギーの５０％は、熱に変化し、３２％は反射
鏡と励起ランプに吸収される。その他、ロッド内に吸収
され損失となる入力光エネルギーが５％以上ある。Ｃｏ
−ｄｏｐｅｄ固体レーザ材料であるＮｄ、Ｃｒ：ＧＳ
ＧＧは、この損失光を有効に用いる手段として開発され
たもので、レーザ媒質であるＮｄイオンが吸収する波長
以外での吸収帯を有し、その吸収エネルギーをＮｄイオ
ンへエネルギー遷する増感イオンであるＣｒイオンをド
ープしたもので、Ｎｄ ： ＹＡＧの２倍以上のレーザ
発振効率を有する。50% of the human power energy is converted into heat and 32% is absorbed by the reflector and excitation lamp. In addition, 5% or more of the input light energy is absorbed into the rod and becomes a loss. Co
-doped solid-state laser material Nd, Cr:GS
GG was developed as a means to effectively use this lost light, and is a sensitizing ion that has an absorption band at a wavelength other than that absorbed by Nd ions, which are the laser medium, and transfers the absorbed energy to Nd ions. It is doped with Cr ions and has a laser oscillation efficiency more than twice that of Nd:YAG.
［発明が解決しようとする課題］ 。[Problem to be solved by the invention].
しかしながら、Ｃｏ−ｄｏｐｅｄ固体レーザ材料は、熱
レンズ効果がＮｄ ： ＹＡＧの約１０倍であるため、
拡がり角度が大きくなる。そのため、ビームを絞ったと
きのエネルギー密度を大きく出来ず、スポット溶接等の
レーザ加工に応用できない。However, co-doped solid-state laser materials have a thermal lensing effect about 10 times that of Nd:YAG, so
The spread angle increases. Therefore, it is not possible to increase the energy density when the beam is focused, and it cannot be applied to laser processing such as spot welding.
Ｎｄ：ＹＡＧロッドに励起光を集光させると、ランプ人
力９ＫＷからロッドが割れ始めるため、ロッド−本で得
られる最大のレーザ出力は４００Ｗ程度とされている。When excitation light is focused on a Nd:YAG rod, the rod begins to crack at a lamp power of 9 kW, so the maximum laser output that can be obtained with a rod is said to be about 400 W.
そのため、ＫＷ級のＮｄ：ＹＡＧレーザ発振器は、４個
以上の集光器で構成される数段増幅方式を用いている。Therefore, the KW class Nd:YAG laser oscillator uses a multi-stage amplification method consisting of four or more condensers.
熱レンズの効果は、短波長側に吸収を有するカラーセユ
／ターとＮｄイオンのレーザ発振に関係しないエネルギ
ー遷移によって起きるもので、固体レーザ材料では、こ
の問題を解決することは、不可能である。また、レーザ
媒質であるＮｄイオンレーザ発振に寄与する波長での吸
収と同じ発光波長を有する励起ランプがない。The thermal lens effect is caused by energy transitions that are not related to laser oscillation between color cells and Nd ions that have absorption on the short wavelength side, and it is impossible to solve this problem with solid-state laser materials. Furthermore, there is no excitation lamp that has an emission wavelength that is the same as absorption at a wavelength that contributes to Nd ion laser oscillation, which is a laser medium.
第３図はキセノンフラッシュランプの発光スペクトルを
示す図である。短波長側の波長で、発光が強いため、ロ
ッド内部での発熱量が大きくなる。FIG. 3 is a diagram showing the emission spectrum of a xenon flash lamp. Since the light emission is strong at shorter wavelengths, the amount of heat generated inside the rod increases.
レーザ発振効率は、Ｎｄ：ＹＡＧで２％程度しか得られ
ない。Laser oscillation efficiency is only about 2% with Nd:YAG.
そこで、本発明の技術課題は、レーザ光の拡かり角度が
小さく、レーザ発振効率の高い固体レーザ装置を提供す
ることにある。Therefore, a technical object of the present invention is to provide a solid-state laser device with a small spread angle of laser light and high laser oscillation efficiency.
［課題を解決するための手段］
本発明によれば、比較的広い波長帯にわたる光を発生す
る励起光源と、この励起光源より一定の距離をおいて配
置され、この励起光源からの先のうち特定波長の光で励
起され第１のレーザ光を発振する第１の固体レーザとを
有する固体レーザ装置において、前記励起光源と、前記
第１の固体レーザとの間に配置され、この励起光源から
の光のうち前記特定波長の光以外の光で励起されて第２
のレーザ光を発振する第２の固体レーザと、この第２の
レーザ光を前記第１の固体レーザに入射させる手段とを
有し、この第１の固体レーザで第２のレーザ光を増幅す
るようにしたことによって、前記励起光源からの光に対
する発振効率を向上したことを特徴とする固体レーザ装
置が得られる。[Means for Solving the Problems] According to the present invention, there is provided an excitation light source that generates light over a relatively wide wavelength band, and an excitation light source that is placed at a certain distance from the excitation light source, and that In a solid-state laser device having a first solid-state laser that is excited with light of a specific wavelength and oscillates a first laser beam, the solid-state laser device is disposed between the excitation light source and the first solid-state laser, and is arranged between the excitation light source and the first solid-state laser; The second light is excited by light other than the light of the specific wavelength among the light of
a second solid-state laser that oscillates a laser beam, and means for making the second laser beam incident on the first solid-state laser, and the second laser beam is amplified by the first solid-state laser. By doing so, it is possible to obtain a solid-state laser device characterized in that the oscillation efficiency with respect to the light from the excitation light source is improved.
本発明によれば、前記固体レーザ装置において、前記第
２の固体レーザは円筒形状を有し、前記第１の固体レー
ザは、この第２の固体レーザの円筒内に配されているこ
とを特徴とする固体レーザ装置が得られる。According to the present invention, in the solid-state laser device, the second solid-state laser has a cylindrical shape, and the first solid-state laser is disposed within the cylinder of the second solid-state laser. A solid-state laser device is obtained.
［作 用コ
本発明の固体レーザ装置においては、励起光源は通常比
較的広い波長帯にわたる光を発生する。[Function] In the solid-state laser device of the present invention, the excitation light source usually generates light over a relatively wide wavelength band.
第１の固体レーザは、励起光源より一定の距離をおいて
配置され、この励起光源からの光のうち特定波長の光で
励起され第１のレーザ光を発振する。The first solid-state laser is placed at a certain distance from the excitation light source, and is excited with light of a specific wavelength from the excitation light source to oscillate the first laser beam.
この様な固体レーザ装置に、第２の固体レーザを、励起
光源と、第１の固体レーザとの間に配置し、この励起光
源からの光のうち特定波長以外の光で第１の固体レーザ
が励起されて第２のレーザ光を放射するように構成し、
更に、第２の固体レーザと、この第２のレーザ光を第１
の固体レーザに入射させる手段を設ける。この手段は、
例えば、対向する反射鏡の一方で、この第１の固体レー
ザで第２のレーザ光を増幅するようにすることによって
、励起光源からの光に対する発振効率を向上させる。In such a solid-state laser device, a second solid-state laser is arranged between the excitation light source and the first solid-state laser, and the first solid-state laser is illuminated with light of a wavelength other than the specific wavelength from the excitation light source. is configured to be excited and emit a second laser beam,
Furthermore, a second solid-state laser and a second laser beam are connected to the first solid-state laser.
A means for making the light incident on the solid-state laser is provided. This means
For example, by amplifying the second laser beam with the first solid-state laser on one of the opposing reflecting mirrors, the oscillation efficiency with respect to the light from the excitation light source is improved.
例えば、第２の固体レーザは円筒形状を有し、第１の固
体レーザは、この第２の固体レーザの円筒内に配されて
いるように、構成すると、励起光源よりの光の内の特定
波長の光は、第２の固体レーザに吸収され、残りの励起
光の内の吸収されなかった特定波長以外の光は、第２の
固体レーザを透過し、第１の固体レーザに入射し、第１
のレーザ光を励起させる。第２の固体レーザにおいては
、吸収された光により励起され第１のレーザ光が発振さ
れる。この第１のレーザ光は、例えば、凹面鏡等、によ
りこの円筒部内に配された第１の固体レーザの端面に入
射する。第１の固体レーザは、第１のレーザ光を増幅し
て発振する。For example, if the second solid-state laser has a cylindrical shape and the first solid-state laser is disposed within the cylinder of the second solid-state laser, a certain amount of light from the excitation light source is generated. The light with the wavelength is absorbed by the second solid-state laser, and the remaining excitation light with a wavelength other than the specific wavelength that is not absorbed passes through the second solid-state laser and enters the first solid-state laser, 1st
Excite the laser beam. The second solid-state laser is excited by the absorbed light to oscillate the first laser beam. This first laser beam is incident on the end face of the first solid-state laser disposed within the cylindrical portion by, for example, a concave mirror or the like. The first solid-state laser amplifies and oscillates the first laser beam.
したがって、励起光源からの光の人力エネルギーに対す
るレーザ光の発振効率の良いレーザ装置が得られる。Therefore, it is possible to obtain a laser device with high efficiency in oscillating laser light with respect to the human power energy of light from the excitation light source.
［実施例］ 本発明の実施例を図面を参照して説明する。[Example] Embodiments of the present invention will be described with reference to the drawings.
第１図は本発明によるレーザ装置の一例を示す横断面図
である。FIG. 1 is a cross-sectional view showing an example of a laser device according to the present invention.
この図において、楕円筒型反射鏡１の焦点に置かれた励
起ランプ２から発した励起光は反射鏡１で反射あるいは
直接Ｃｏ −ｄｏｐｅｄ Ｎｄ、 Ｃｒ ： ＧＳＧ
Ｇ円筒３の側面に入射し、励起光の一部が吸収される。In this figure, excitation light emitted from an excitation lamp 2 placed at the focal point of an elliptical cylindrical reflector 1 is reflected by the reflector 1 or directly Co-doped Nd, Cr: GSG.
The excitation light is incident on the side surface of the G cylinder 3, and a part of the excitation light is absorbed.
この場合、とくに短波長側の吸収が大きくなるようにＣ
ｒを高濃度でドープしておいたものを用いる。円筒３を
透過した励起光は、Ｎｄ：ＹＡＧロッド４に集光される
。In this case, C
A material doped with r at a high concentration is used. The excitation light transmitted through the cylinder 3 is focused on the Nd:YAG rod 4.
第２図はレーザ発振器の要部の構成を示す側１ｍ図であ
る。励起ランプ２より発した光は、集光器の反射鏡１で
反射又は直接にＣｏ −ｄｏｐｅｄ Ｎ ｄ 。FIG. 2 is a 1m side view showing the configuration of the main parts of the laser oscillator. The light emitted from the excitation lamp 2 is reflected by the reflecting mirror 1 of the collector or directly Co-doped N d .
Ｃｒ：ＧＳＧＧ円筒３に入射し、励起する。Cr: GSGG enters the cylinder 3 and is excited.
第３図は固体レーザ装置に使用されるキセノンフラッシ
ュランプの発光スペクトルを示す図である。FIG. 3 is a diagram showing the emission spectrum of a xenon flash lamp used in a solid-state laser device.
第４図はＮｄ：ＹＡＧの吸収スペクトルで波長０．６〜
０．９μｍの間に吸収ピーク持ち、この波長での励起光
がレーザ発振に有効に寄与する。Figure 4 shows the absorption spectrum of Nd:YAG with a wavelength of 0.6~
It has an absorption peak between 0.9 μm and excitation light at this wavelength effectively contributes to laser oscillation.
この吸収ピークは、第３図に示される励起ランプの発光
スペクトルと余り一致せず、０６６μｍ以下の波長領域
での発光エネルギーがかなり大きい。This absorption peak does not match well with the emission spectrum of the excitation lamp shown in FIG. 3, and the emission energy in the wavelength region of 066 μm or less is quite large.
一方、増感イオンであるＣｒイオンとレーザ媒質である
ＮｄイオンとをＣｏ −ｄｏｐｅｄ したＮｄ、Ｃｒ
： ＧＳＧＧでは、０．７μｍ以下での吸収が非常に大
きく、０．６μｍ以下の励起光をレーザ発振に寄与させ
る事ができ、Ｎｄ ： ＹＡＧの２倍以上レーザ発振効
率が得られる。ビームの拡がり角度は、Ｎｄ：ＹＡＧの
１０倍ある。円筒３を透過した励起光は、Ｎｄ：ＹＡＧ
ロッド４を励起する。On the other hand, Nd, Cr, which is Co-doped with Cr ions as sensitizing ions and Nd ions as a laser medium,
: GSGG has very large absorption at 0.7 μm or less, and can contribute excitation light of 0.6 μm or less to laser oscillation, resulting in a laser oscillation efficiency more than twice that of Nd:YAG. The beam spread angle is 10 times that of Nd:YAG. The excitation light transmitted through the cylinder 3 is Nd:YAG
Excite rod 4.
この時の、円筒３を透過した励起光のスペクトルは、０
．６μｍ以下の波長領域が非常に弱められたものとなる
。円筒３の端面は、片面に１００％反射膜５．もう一面
に５０％反射膜６コートが形成されていて、反射膜間で
共振してレーザ発振する。このレーザ光を、励起状態に
あるＮｄ：ＹＡＧロッド４に、ミラー７を用いて入射さ
せ、ミラー８との間で増幅発振させる。このミラー８は
５０％の反射鏡である。励起光の密度は、Ｎｄ：ＹＡＧ
ロッドの中心からの距離の２乗に反比例する。At this time, the spectrum of the excitation light transmitted through the cylinder 3 is 0
．． The wavelength region of 6 μm or less is extremely weakened. The end face of the cylinder 3 is coated with a 100% reflective film 5 on one side. Six 50% reflective films are formed on the other surface, and the laser oscillates due to resonance between the reflective films. This laser beam is made incident on the Nd:YAG rod 4 in an excited state using a mirror 7, and is amplified and oscillated between it and the mirror 8. This mirror 8 is a 50% reflective mirror. The density of excitation light is Nd:YAG
It is inversely proportional to the square of the distance from the center of the rod.
Ｎｄ、Ｃｒ ：ＧＳＧＧのレーザしきい値は、Ｎｄ：Ｙ
ＡＧの］／２である。このデータをもとに、Ｎｄ ：
ＹＡＧロッドが割れない程度の励起光がＮｄ：ＹＡＧに
集光され、Ｎｄ、Ｃｒ：ＧＳＧＧのレーデしきい値以上
のエネルギー密度になる位置にＮｄ、Ｃｒ：ＧＳＧＧ円
筒３を設けである。このときの、レーザ効率は、Ｎｄ、
Ｃｒ：ＧＳＧＧ単体を用いた場合よりも悪くなる。しか
し、Ｎｄ：ＹＡＧより高い効率が得られ、しかも、Ｎｄ
：ＹＡＧに達する励起光の短波長側（０，６μｍ以下）
の強度が弱められるために熱レンズ効果が非常に小さく
なり、拡がり角度の小さい良質のレーザビーム光を得る
ことができる。Nd, Cr:GSGG laser threshold is Nd:Y
AG's]/2. Based on this data, Nd:
The Nd, Cr: GSGG cylinder 3 is provided at a position where excitation light that does not break the YAG rod is focused on the Nd:YAG, and the energy density is higher than the Rede threshold of the Nd, Cr: GSGG. At this time, the laser efficiency is Nd,
It is worse than when Cr:GSGG alone is used. However, higher efficiency than Nd:YAG can be obtained, and Nd
: Short wavelength side of excitation light reaching YAG (0.6 μm or less)
Since the intensity of the laser beam is weakened, the thermal lens effect becomes extremely small, and a high-quality laser beam with a small divergence angle can be obtained.
また、ランプに人力できる電力も大きく出来るので、集
光器−台で、ＫＷ級のレーザ発振が、可能となる。Furthermore, since the electric power that can be manually applied to the lamp can be increased, KW class laser oscillation is possible with the condenser stand.
［発明の効果］
以上説明したように、本発明によれば、励起ランプを用
いたレーザ装置において、拡がり角度が小さく良質で、
且つ高出力で高効率な固体レーザ装置を得ることが出来
る。[Effects of the Invention] As explained above, according to the present invention, a laser device using an excitation lamp has a small divergence angle, high quality,
Moreover, a high-output and highly efficient solid-state laser device can be obtained.
第１図は本発明に係るレーザ装置の一例を示す横断面図
、第２図は第１図のレーザ装置の構成を示す図、第３図
はキセノンフラッシュランプの発光スペクトルを示す図
、第４図はＮｄ ： ＹＡＧの吸収スペクトルを示す図
、第５図は従来の集光器の〜例を示す断面図である。
図中１は楕円筒型反射鏡、２は励起ランプ、３はＣｏ
−ｄｏｐｅｄ Ｎｄ、 Ｃｒ ： ０３００円筒、４
はＮｄ：ＹＡＧロッド、５は１００％反射コート膜、６
は５０％反射コート膜、７は１００％反射ミラー、８は
５０％反射ミラー、９はレーザ光である。
第１図
第２図
一一一」FIG. 1 is a cross-sectional view showing an example of a laser device according to the present invention, FIG. 2 is a diagram showing the configuration of the laser device in FIG. 1, FIG. 3 is a diagram showing the emission spectrum of a xenon flash lamp, and FIG. The figure shows the absorption spectrum of Nd:YAG, and FIG. 5 is a sectional view showing an example of a conventional condenser. In the figure, 1 is an elliptical cylindrical reflector, 2 is an excitation lamp, and 3 is a Co
-doped Nd, Cr: 0300 cylinder, 4
is Nd:YAG rod, 5 is 100% reflective coating film, 6 is
is a 50% reflective coating film, 7 is a 100% reflective mirror, 8 is a 50% reflective mirror, and 9 is a laser beam. Figure 1 Figure 2 Figure 111
Claims (1)
、該励起光源より一定の距離をおいて配置され、該励起
光源からの光のうち特定波長の光で励起され第１のレー
ザ光を発振する第１の固体レーザとを有する固体レーザ
装置において、前記励起光源と、前記第１の固体レーザ
との間に配置され、該励起光源からの光のうち前記特定
波長の光以外の光で励起されて第２のレーザ光を発振す
る第２の固体レーザと、該第２のレーザ光を前記第１の
固体レーザに入射させる手段とを有し、該第１の固体レ
ーザで第２のレーザ光を増幅するようにしたことによっ
て、前記励起光源からの光に対する発振効率を向上した
ことを特徴とする固体レーザ装置。1. An excitation light source that generates light over a relatively wide wavelength band, and a first laser beam that is placed at a certain distance from the excitation light source and that is excited with light of a specific wavelength from the excitation light source. A solid-state laser device having a first solid-state laser that oscillates, the solid-state laser device being disposed between the excitation light source and the first solid-state laser, and comprising a light other than the light of the specific wavelength among the light from the excitation light source. a second solid-state laser that is excited to oscillate a second laser beam; and means for making the second laser beam incident on the first solid-state laser; A solid-state laser device characterized in that the oscillation efficiency of light from the excitation light source is improved by amplifying laser light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228572A JPH0278286A (en) | 1988-09-14 | 1988-09-14 | Solid-state laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228572A JPH0278286A (en) | 1988-09-14 | 1988-09-14 | Solid-state laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0278286A true JPH0278286A (en) | 1990-03-19 |
Family
ID=16878464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63228572A Pending JPH0278286A (en) | 1988-09-14 | 1988-09-14 | Solid-state laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0278286A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60239076A (en) * | 1984-05-11 | 1985-11-27 | Toshiba Corp | Solid-state laser oscillator |
-
1988
- 1988-09-14 JP JP63228572A patent/JPH0278286A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60239076A (en) * | 1984-05-11 | 1985-11-27 | Toshiba Corp | Solid-state laser oscillator |
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