JPH06112559A - End face excitation type solid-state laser - Google Patents

End face excitation type solid-state laser

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Publication number
JPH06112559A
JPH06112559A JP26122292A JP26122292A JPH06112559A JP H06112559 A JPH06112559 A JP H06112559A JP 26122292 A JP26122292 A JP 26122292A JP 26122292 A JP26122292 A JP 26122292A JP H06112559 A JPH06112559 A JP H06112559A
Authority
JP
Japan
Prior art keywords
medium
laser
curved surface
face
flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26122292A
Other languages
Japanese (ja)
Inventor
Tomohito Akita
智史 秋田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP26122292A priority Critical patent/JPH06112559A/en
Publication of JPH06112559A publication Critical patent/JPH06112559A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve the fundamental wave generating efficiency of the title laser while the spreading angle of the output beam is kept small by constituting one end face of a laser medium in the axial direction in a flat or concave surface and the other end face of the medium in a convex surface and making excited light from the flat or concave surface side to incident, and then, positioning the convex surface on the opposite side of the output mirror of an optical resonator. CONSTITUTION:An exciting light beam E the condensed light spot of which is set near the flat surface F of a laser medium 3 is made incident to the medium 3 after passing through the surface F and excites the medium 3. The beam E which is not absorbed in the medium 3 in this stage is reflected by the convex surface CV of the medium 3 and again excites the medium 3. Since the radius of curvature of the convex surface CV is equal to the focal distance of a focusing lens 22, the shapes of the beam E before and after the reflection by the surface CV become equal to each other and the beam E can be recovered and reused at a high efficient. Therefore, a laser beam having a short resonator length and small spreading angle can be obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は端面励起型の固体レーザ
装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an edge-pumped solid-state laser device.

【0002】[0002]

【従来の技術】半導体レーザや色素レーザを励起用光源
として用いる端面励起型の固体レーザにおいては、その
光共振器内に波長変換要素を有するものも含めて、従
来、固体レーザ媒質の軸方向端面形状としては両端が平
坦なものか、あるいは励起光の入射側端面を凸曲面、出
力ミラー側を平坦面または凹曲面としたものが用いられ
ている。
2. Description of the Related Art In an edge-pumped solid-state laser using a semiconductor laser or a dye laser as a pumping light source, an axial end face of a solid-state laser medium has been conventionally included, including one having a wavelength conversion element in its optical resonator. As a shape, both ends are flat, or an end surface on the incident side of the excitation light is a convex curved surface and an output mirror side is a flat surface or a concave curved surface.

【0003】[0003]

【発明が解決しようとする課題】ところで、従来の端面
励起型固体レーザにおいては、光共振器内に入射させた
励起光のうち、媒質に吸収されなかった光については、
励起に再利用するような対策はなされておらず、効率低
下の一因となっている。
By the way, in the conventional edge-pumped solid-state laser, of the pumping light incident on the optical resonator, the light not absorbed by the medium is
No measures have been taken to reuse it for excitation, which is one of the causes of reduced efficiency.

【0004】また、このようなレーザのうち、発振しに
くいNd:YAGの946nmレーザでは、共心形または
それに近い共振器を用いる必要があり、共振器長が長
く、かつ、レーザ出力ビームの広がり角も大きくなって
しまうという問題がある。
Among such lasers, the Nd: YAG 946 nm laser, which is difficult to oscillate, needs to use a concentric resonator or a resonator close to it, which has a long resonator length and spreads the laser output beam. There is a problem that the corners also become large.

【0005】更に、励起光と光共振器内ビームのモード
マッチングを行う場合には、励起光学系も長大となると
いう問題があった。本発明はこのような点に鑑みてなさ
れたもので、媒質に吸収されなかった励起光を高効率で
回収して励起に再利用することができ、光共振器を長く
することなく、出力ビームの広がり角を小さくしたまま
で基本波の発生効率を向上させ、かつ、コンパクトな励
起光学系を用いて励起光と光共振器内ビームとのモード
マッチングを取ることができ、もってコンパクトで高効
率励起が可能で、しかも出力ビームの広がり角の小さい
端面励起型固体レーザの提供を目的としている。
Further, in the case of performing mode matching between the pumping light and the beam in the optical resonator, there is a problem that the pumping optical system also becomes long. The present invention has been made in view of the above point, and it is possible to recover pumping light that has not been absorbed by a medium with high efficiency and reuse it for pumping, without increasing the length of the optical resonator, and to The fundamental wave generation efficiency can be improved with the divergence angle kept small, and mode matching between the pumping light and the beam inside the optical resonator can be achieved using a compact pumping optical system, which is compact and highly efficient. It is an object of the present invention to provide an edge-pumped solid-state laser that can be pumped and has a small output beam divergence angle.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
め、本発明の端面励起型固体レーザは、固体レーザ媒質
の端面形状を、一端側を平坦面または凹曲面とし、他端
側を凸曲面とするとともに、その平坦面または凹曲面か
ら励起光を入射し、凸曲面を光共振器の出力ミラーに対
向配置したことによって特徴づけられる。
In order to achieve the above-mentioned object, in the end-pumped solid-state laser of the present invention, one end side of the solid-state laser medium has a flat surface or a concave curved surface and the other end side has a convex shape. It is characterized in that it is a curved surface, and the excitation light is incident from the flat surface or the concave curved surface, and the convex curved surface is arranged to face the output mirror of the optical resonator.

【0007】[0007]

【作用】光共振器内に置かれて出力ミラー側に向く固体
レーザ媒質の凸曲面のレンズ作用により、共振器内での
ビーム形状が、図1および図3に例示するように、レー
ザ媒質内で高収束角となり、高NA(開口数)のレンズ
で励起光を集光しても、励起光と共振器内ビームのモー
ドマッチングを取ることができる。
By the lens action of the convex curved surface of the solid laser medium placed in the optical resonator and facing the output mirror side, the beam shape in the resonator is as shown in FIG. 1 and FIG. Even if the excitation light is condensed by a lens having a high NA (numerical aperture), the mode matching between the excitation light and the intracavity beam can be achieved.

【0008】また、励起光の集光スポット位置を媒質の
平坦面近傍に設定することにより、媒質の凸曲面で反射
された励起光についても共振器内ビームとモードマッチ
ングが取れ、高効率励起が可能となる。
Further, by setting the focus spot position of the excitation light in the vicinity of the flat surface of the medium, the excitation light reflected by the convex curved surface of the medium can also be mode-matched with the intracavity beam to achieve high-efficiency excitation. It will be possible.

【0009】更に、媒質に吸収されなかった励起光につ
いては、曲率半径を励起光学系のフォーカシングレンズ
と合致させてここで励起光を反射させることにより、こ
の反射前後の媒質内でのビーム形状を合致させることが
でき、この反射光についても上記のモードマッチングを
取ることかでき、吸収されなかった励起光の高効率での
回収および再利用を達成できる。
Further, for the excitation light that is not absorbed by the medium, the beam shape in the medium before and after the reflection is made by matching the radius of curvature with the focusing lens of the excitation optical system and reflecting the excitation light there. The reflected light and the reflected light can be matched with each other, and the above-mentioned mode matching can be performed, and highly efficient recovery and reuse of the unabsorbed excitation light can be achieved.

【0010】更には、媒質の凸曲面のレンズ作用によ
り、短い光共振器長のままで共心形あるいはそれに近い
共振器構成が得られることになり、出力ビームの広がり
角も小さく抑えることが可能となる。
Furthermore, due to the lens action of the convex curved surface of the medium, a concentric resonator structure or a resonator structure close to it can be obtained with a short optical resonator length, and the divergence angle of the output beam can be suppressed to a small value. Becomes

【0011】[0011]

【実施例】図1は本発明実施例の構成図で、半導体レー
ザ励起固体レーザに本発明を適用した例を示している。
1 is a block diagram of an embodiment of the present invention, showing an example in which the present invention is applied to a semiconductor laser pumped solid-state laser.

【0012】半導体レーザ1からの出力光は、コリメー
トレンズ21およびフォーカシングレンズ22等からな
る励起光学系2を経て励起光ビームEとなって固体レー
ザ媒質3に照射される。
The output light from the semiconductor laser 1 passes through the excitation optical system 2 including the collimating lens 21 and the focusing lens 22 to become the excitation light beam E, which is applied to the solid laser medium 3.

【0013】固体レーザ媒質3は、軸方向の一端面が平
坦面Fで、他端面が凸曲面CV によって形成されてお
り、励起光ビームEは平坦面Fに対して照射される。こ
のレーザ媒質3の平坦面Fには、励起光Eに対して高透
過率で、レーザ基本波に対しては高反射率となるような
膜がコーティングされている。また、レーザ媒質3の凸
曲面CV には、励起光Eに対して高反射率で、レーザ基
本波に対しては高透過率となるような膜がコーティング
されている。
In the solid-state laser medium 3, one end face in the axial direction is a flat face F and the other end face is formed by a convex curved face CV, and the excitation light beam E is applied to the flat face F. The flat surface F of the laser medium 3 is coated with a film having a high transmittance for the excitation light E and a high reflectance for the laser fundamental wave. The convex curved surface CV of the laser medium 3 is coated with a film having a high reflectance with respect to the excitation light E and a high transmittance with respect to the laser fundamental wave.

【0014】レーザ媒質3の凸曲面CV に対向して、レ
ーザ基本波に対して高反射率の凹曲面を持つ出力ミラー
4が配設されており、この出力ミラー4とレーザ媒質3
の平坦面Fとの間が光共振器5を構成し、この出力ミラ
ー4から出力ビームが取り出される。
An output mirror 4 having a concave curved surface having a high reflectance with respect to the laser fundamental wave is disposed facing the convex curved surface CV of the laser medium 3. The output mirror 4 and the laser medium 3 are arranged.
An optical resonator 5 is formed between the flat surface F and the flat surface F, and an output beam is extracted from the output mirror 4.

【0015】励起光学系2による励起光ビームEの集光
スポットは、レーザ媒質3の平坦面Fの近傍となるよう
に設定されているとともに、レーザ媒質3の凸曲面CV
の曲率半径はフォーカシングレンズ22の焦点距離に一
致するように設定している。
The focusing spot of the pumping light beam E by the pumping optical system 2 is set so as to be near the flat surface F of the laser medium 3, and the convex curved surface CV of the laser medium 3 is set.
The radius of curvature of is set to match the focal length of the focusing lens 22.

【0016】以上の本発明実施例によると、図2に励起
状態におけるレーザ媒質3の近傍のビーム形状を示すよ
うに、レーザ媒質3の平坦面Fの近傍に集光スポットを
設定された励起光ビームEは、図中実線で示すように、
平坦面Fを透過して媒質3内に入射してまずこれを励起
するとともに、この過程で媒質3に吸収されなかった励
起光ビームEについては、媒質3の凸曲面CV によって
反射されて再び媒質3を励起する。このとき、凸曲面C
V の曲率半径がフォーカシングレンズ22の焦点距離と
一致していることから、この面による反射前後の励起光
ビームEの形状が互いに一致することになり、励起光ビ
ームEを高効率で回収して再利用することができる。
According to the above-described embodiment of the present invention, as shown in FIG. 2 which shows the beam shape in the vicinity of the laser medium 3 in the excited state, the excitation light having a focused spot near the flat surface F of the laser medium 3 is set. The beam E is, as shown by the solid line in the figure,
The excitation light beam E, which is transmitted through the flat surface F and enters the medium 3 to be excited first, and which is not absorbed by the medium 3 in this process, is reflected by the convex curved surface CV of the medium 3 and is again medium. Exciting 3. At this time, the convex curved surface C
Since the radius of curvature of V coincides with the focal length of the focusing lens 22, the shapes of the excitation light beam E before and after reflection by this surface coincide with each other, and the excitation light beam E can be collected with high efficiency. Can be reused.

【0017】このようにして励起されたレーザ基本波ビ
ームLは媒質3の平坦面Fと出力ミラー4間で共振する
ことになるが、この共振器5の内部にレーザ媒質3の凸
曲面CV が存在しているため、この共振器5内の基本波
ビームLは凸曲面CV のレンズ効果によって図中破線で
示すように形状変換され、媒質3内でのビーム形状が高
収束角となることから、高NAのレンズで励起光を集光
しても、その励起光ビームEと共振器5内の基本波ビー
ムLとのモードマッチングを取ることが可能となる。こ
こで、励起光ビームEは前記したように凸曲面CV によ
る反射前後においてビーム形状が一致していることか
ら、励起光ビームEは凸曲面CV による反射前後のいず
れにおいても基本波ビームLとのモードマッチングが取
れていることになり、励起光ビームの回収・再利用の効
率は極めて高いものとなる。
The laser fundamental wave beam L thus excited resonates between the flat surface F of the medium 3 and the output mirror 4, and the convex curved surface CV of the laser medium 3 is present inside the resonator 5. Since it exists, the fundamental wave beam L in the resonator 5 undergoes shape conversion as shown by the broken line in the figure by the lens effect of the convex curved surface CV, and the beam shape in the medium 3 has a high convergence angle. Even if the excitation light is condensed by the high NA lens, the excitation light beam E and the fundamental wave beam L in the resonator 5 can be mode-matched. Here, since the excitation light beam E has the same beam shape before and after the reflection by the convex curved surface CV as described above, the excitation light beam E and the fundamental wave beam L both before and after the reflection by the convex curved surface CV. Since the mode matching is achieved, the efficiency of collecting and reusing the excitation light beam becomes extremely high.

【0018】また、共振器5内のビーム形状がレーザ媒
質3の凸曲面CV により変換されて媒質3内で高収束角
となるため、出力ミラー4の曲率半径を大きくしても、
共振器5の長さを短くしたままで共心形またはそれに近
い性能を持つ共振器を構成することができ、短共振器長
のままでレーザ出力ビームの広がり角を小さく抑えるこ
とができる。
Further, since the beam shape in the resonator 5 is converted by the convex curved surface CV of the laser medium 3 and has a high convergence angle in the medium 3, even if the radius of curvature of the output mirror 4 is increased,
A concentric resonator or a resonator having a performance close to that can be formed while keeping the length of the resonator 5 short, and the divergence angle of the laser output beam can be suppressed to be small while keeping the short resonator length.

【0019】以上の実施例において特に注目すべき点
は、高NAレンズで励起光を結合しても、励起光と共振
器内ビームとのモードマッチングが取れ、しかも、レー
ザ出力ビームの広がり角が小さくなるという点であり、
通常の構成で高NAレンズで励起する場合には相反する
事項を同時に達成している。
In the above embodiment, the points to be particularly noted are that even if the pumping light is coupled by the high NA lens, the pumping light and the beam inside the resonator can be mode-matched and the divergence angle of the laser output beam can be increased. Is that it gets smaller,
When excitation is performed with a high NA lens in a normal configuration, contradictory matters are achieved at the same time.

【0020】以上の実施例では、レーザ媒質3の励起光
入射側の平坦面Fを、励起光に対して高透過、レーザ基
本波に対して高反射とすることにより、この平坦面Fに
よって共振器5の一方のミラーを形成したが、この平坦
面Fを、励起光およびレーザ基本波の双方に対して高透
過としておき、励起光学系2とレーザ媒質3との間に、
励起光に対して高透過でレーザ基本波に対して高反射と
なるようなミラーを別途配置しても、同様な作用効果を
達成できる。
In the above embodiments, the flat surface F of the laser medium 3 on the pumping light incident side is highly transmissive to the pumping light and highly reflective to the laser fundamental wave, so that the flat surface F causes resonance. Although one mirror of the container 5 is formed, the flat surface F is made highly transmissive to both the pumping light and the laser fundamental wave, and between the pumping optical system 2 and the laser medium 3,
The same effect can be achieved by separately disposing a mirror that is highly transmissive to the excitation light and highly reflective to the laser fundamental wave.

【0021】また、レーザ媒質3の凸曲面CV について
も、励起光およびレーザ基本波の双方に対して高透過と
し、出力ミラー4を励起光およびレーザ基本波の双方に
対して高反射としても、同様な作用効果を奏することが
できる。
The convex curved surface CV of the laser medium 3 is also highly transmissive to both the excitation light and the laser fundamental wave, and the output mirror 4 is highly reflective to both the excitation light and the laser fundamental wave. The same effect can be achieved.

【0022】なお、以上の実施例では、レーザ媒質3の
励起光入射側の端面を平坦面Fとした例を示したが、こ
の面を凹曲面としても、同様な作用効果を奏することが
できる。
In the above embodiments, the end face of the laser medium 3 on the incident side of the excitation light is the flat face F. However, even if this face is a concave curved face, the same effect can be obtained. .

【0023】また、本発明は、以上の実施例のような半
導体レーザ励起固体レーザのほか、色素レーザ励起固体
レーザにも全く同様に適用することができ、あるいはこ
れらの共振器内に波長変換要素を追加したものに対して
も適用し得ることは勿論である。
Further, the present invention can be applied to the dye laser pumped solid-state lasers as well as the semiconductor laser pumped solid-state lasers as in the above-described embodiments in the same manner, or the wavelength conversion element in these resonators. Needless to say, the present invention can be applied to the addition of.

【0024】[0024]

【発明の効果】以上説明したように、本発明によれば、
端面励起型固体レーザのレーザ媒体質の軸方向端面の一
方を平坦面または凹曲面とし、他方を凸曲面によって構
成し、平坦面または凹曲面側から励起光を入射して凸曲
面を光共振器の出力ミラーに対向配置した構造としてい
るので、レーザ媒質の凸曲面のレンズ効果によって、共
振器内ビーム形状が変換されて高収束角となるととも
に、励起光についても平坦面から媒質内に入射したビー
ムと凸曲面で反射された光との形状を同一化することが
可能となり、励起光と共振器内ビームとのモードマッチ
ング、および、最初の照射により媒質に吸収されなかっ
た励起光の高効率回収と励起への再利用とが、高NAの
励起光集光レンズを用いて同時に達成でき、高効率の励
起が可能となる。
As described above, according to the present invention,
One of the end faces in the axial direction of the laser medium quality of the end-pumped solid-state laser is a flat surface or a concave curved surface, and the other is a convex curved surface. Since the structure is arranged so as to face the output mirror of, the lens shape of the convex curved surface of the laser medium converts the beam shape in the cavity to a high convergence angle, and the excitation light also enters the medium from a flat surface. It is possible to make the shape of the beam and the light reflected by the convex curved surface the same, and the mode matching between the pump light and the beam inside the cavity, and the high efficiency of the pump light not absorbed by the medium by the first irradiation Recovery and reuse for excitation can be achieved at the same time by using a high-NA excitation light condensing lens, which enables highly efficient excitation.

【0025】また、媒質のレンズ作用によって共振器ビ
ーム内のビーム形状変換が行われる結果、大きな曲率半
径を持つ出力ミラーを用いても、共振器長を短くしたま
まで共心形もしくはそれに近い光共振器を構成すること
が可能となり、短共振器長でしかも小ビーム広がり角の
レーザを得ることが可能となる。
Further, as a result of the beam shape conversion in the resonator beam due to the lens action of the medium, even if an output mirror having a large radius of curvature is used, the optical length of the resonator is kept short and concentric or close to it. A resonator can be configured, and a laser having a short resonator length and a small beam divergence angle can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明実施例を半導体レーザ励起固体レーザに
適用した場合の実施例の構成図
FIG. 1 is a configuration diagram of an embodiment when the embodiment of the present invention is applied to a semiconductor laser pumped solid-state laser.

【図2】その励起状態におけるレーザ媒質3の近傍のビ
ーム形状の説明図
FIG. 2 is an explanatory diagram of a beam shape in the vicinity of a laser medium 3 in the excited state.

【符号の説明】[Explanation of symbols]

1 半導体レーザ 2 励起光学系 21 コリメートレンズ 22 フォーカシングレンズ 3 固体レーザ媒質 F 平坦面 CV 凸曲面 4 出力ミラー 5 光共振器 1 Semiconductor Laser 2 Excitation Optical System 21 Collimating Lens 22 Focusing Lens 3 Solid State Laser Medium F Flat Surface CV Convex Curved Surface 4 Output Mirror 5 Optical Resonator

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 固体レーザ媒質の軸方向の一端面から励
起光を導入し、発生した自然放出光を光共振器内に閉じ
込めて誘導放出を起こさせるレーザにおいて、上記固体
レーザ媒質の端面形状を、一端側を平坦面または凹曲面
とし、他端側を凸曲面とするとともに、その平坦面また
は凹曲面から励起光を入射し、凸曲面を上記光共振器の
出力ミラーに対向配置していることを特徴とする端面励
起型固体レーザ。
1. A laser for introducing pumping light from one end face in the axial direction of a solid-state laser medium and confining the generated spontaneous emission light in an optical resonator to cause stimulated emission. The one end side is a flat surface or a concave curved surface and the other end side is a convex curved surface, and the excitation light is incident from the flat surface or the concave curved surface, and the convex curved surface is arranged to face the output mirror of the optical resonator. An edge-pumped solid-state laser characterized by the above.
JP26122292A 1992-09-30 1992-09-30 End face excitation type solid-state laser Pending JPH06112559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26122292A JPH06112559A (en) 1992-09-30 1992-09-30 End face excitation type solid-state laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26122292A JPH06112559A (en) 1992-09-30 1992-09-30 End face excitation type solid-state laser

Publications (1)

Publication Number Publication Date
JPH06112559A true JPH06112559A (en) 1994-04-22

Family

ID=17358843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26122292A Pending JPH06112559A (en) 1992-09-30 1992-09-30 End face excitation type solid-state laser

Country Status (1)

Country Link
JP (1) JPH06112559A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10294511A (en) * 1997-04-18 1998-11-04 Amada Eng Center:Kk Solid-state laser resonator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10294511A (en) * 1997-04-18 1998-11-04 Amada Eng Center:Kk Solid-state laser resonator

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