JPH0278005A - Magnetic head - Google Patents

Abstract

PURPOSE:To prohibit the expansion of a pseudo gap and to obtain the head having excellent recording and reproducing characteristics by adding specific elements to an amorphous soft magnetic film and specifying the compsn. of the magnetic film. CONSTITUTION:At least one kind of the elements among Rh, Pd, Os, Ir, Pt and Au are added to the amorphous soft magnetic film 4. The compsn. ratios y, z, w of the soft magnetic film 4 are specified, by atomic %, to 4<=y<=15, 1<=z<=14, 1<=w<18 (where x+y+Z+w=100) ranges when the compsn. thereof is expressed by the general formula CoxTayHfzXw (X denotes the additive element). Magnetic core half bodies 1, 2 are usually glass-bonded at a high temp. of >=520 deg.C and the diffusion of oxygen from the core side to the soft magnetic film 4 is suppressed and the expansion of the pseudo gap is prohibited by the addition effect of the above-mentioned elements.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a magnetic head used in a magnetic recording device such as a video tape deck.

``Prior Art'' This type of magnetic head has magnetic properties that can accommodate higher density magnetic recording media, and is also superior in terms of mechanical properties such as wear resistance and formability. requested. Therefore, as a magnetic head with a structure that can meet these demands, we have developed a composite magnetic head (commonly known as MIG heads) are now available.

This composite magnetic head generally has a structure in which a pair of magnetic core halves made of ferrite are bonded by glass bonding with a soft magnetic film and a gap interposed between them.

"Problems to be Solved by the Invention" When manufacturing a magnetic head having the above structure, it is necessary to bond a pair of magnetic core halves by glass bonding.
It is heated to a high temperature of 520°C or higher.

However, when the magnetic core half is heated to such a high temperature, a diffusion reaction involving oxygen occurs at the interface between the magnetic core half and the soft magnetic film, causing a problem in which the magnetic properties at the boundary deteriorate. . In other words, oxygen atoms in the ferrite that makes up the magnetic core half diffuse into the soft magnetic film at high temperatures, causing a shortage of oxygen atoms in the ferrite, altering the composition of the ferrite and deteriorating its magnetic properties. be. Additionally, if a portion with poor magnetic properties is formed along the soft magnetic film,
There is a problem that this portion forms a pseudo gap, and the formation of the pseudo gap may increase noise and degrade the performance of the magnetic head.

The present invention has been made to solve the above problems,
Even when glass bonding is performed at high temperatures, the pseudo gap does not expand, reducing the noise caused by the pseudo gap, and allowing the use of higher temperature glass bonding materials, improving the reliability of the glass. ,
An object of the present invention is to provide a magnetic head having a structure that can improve the environmental resistance of a soft magnetic film.

"Means for Solving the Problem" In order to solve the problem, the invention described in claim 1 provides a pair of magnetic materials in which a Co-Ta-Hf-based amorphous soft magnetic film is formed on the gap side. In a magnetic head in which a core half is bonded to the amorphous soft magnetic film through a gap portion by glass bonding, Rh is added to the amorphous soft magnetic film.
, Pd, Os, Ir, Pt, and Au, and the composition of the soft magnetic film is represented by the general formula CoxTayHfzXw (X represents an added element). In this case, the composition ratios y, Z, and w are in the following ranges in atomic %: 4≦y≦15 ■≦z≦14 1≦1≦18 (where x+y+z+w=100).

In order to solve the above problem, the invention set forth in claim 2 includes a pair of magnetic core halves in which a Co-Ta-F■r-based amorphous soft magnetic film is formed on the gap side. In a magnetic head formed by glass bonding to a main amorphous soft magnetic film through a gap portion, Rh, P are present between the magnetic core half and the amorphous main soft magnetic film.
Co-Ta- added with at least one element selected from d, Os, rr, Pt, and Au
This is provided with an Hf-based amorphous sub-soft magnetic film.

In order to solve the above problem, the invention described in claim 3 is characterized in that a pair of magnetic core halves in which a Co-Ta-Hf-based amorphous main soft magnetic film is formed on the gap side is In a magnetic head that is bonded to a main soft magnetic film through a gap portion by glass bonding, Rh, Pd, etc. are provided between the magnetic core half and the amorphous main magnetic film.
, Os, Ir, PL, and Au.
An f-based amorphous sub-soft magnetic film is provided, and when the composition of the amorphous sub-soft magnetic film is expressed by the general formula CoxTayHfzXw (X represents an additive element), the composition ratio V+Ztw is expressed as atomic %. The ranges are 4≦y≦15 1≦Z≦14 I8<, ≦35 (however, x+y+z+1=100).

"Function" The added effect of the elements contained in the amorphous soft magnetic film suppresses the diffusion of oxygen from the magnetic core half side to the soft magnetic film side during heating of glass bonding, preventing the expansion of the pseudo gap. be done. Furthermore, the chemical stability of the amorphous soft magnetic film is improved due to the effect of adding elements that are not included in the amorphous soft magnetic film, and the environmental resistance of the magnetic head is improved.

The amorphous sub-soft magnetic film formed between the amorphous main soft magnetic film and the magnetic core half prevents oxygen from flowing from the magnetic core half side to the amorphous main magnetic film side during heating for glass bonding. Control proliferation and prevent the growth of pseudo-gaps. Further, since the pseudo gap is prevented from expanding without deteriorating the magnetic properties of the amorphous main soft magnetic film, excellent electromagnetic conversion properties are maintained.

Furthermore, if the amorphous soft magnetic film formed between the amorphous main magnetic film and the magnetic core half has a special composition as described above, the expansion of the pseudo gap during glass bonding is suppressed, and Pseudo gap noise is reduced to 0.8 dB or less without impairing electromagnetic conversion characteristics.

"Example 1" FIGS. 1 and 2 show an example of the invention as set forth in claim I, and the magnetic head A of this example is made of an oxide magnetic material such as Mn-Zn ferrite. Magnetic core half 1.
2 are butted against each other with a gap 3 interposed therebetween. There is a G on the gear part 3 side of these magnetic core halves 1.2.
An o-T a-Hf-based amorphous soft magnetic film 4 is formed,
The magnetic core half 1.2 has 5i between each amorphous soft magnetic film 4.
A gap spacer layer made of Oz or the like is interposed to form the gap part 3, and in this state, the gap part 3 is
fIt5 formed in the magnetic core half body 1.2 so as to sandwich the
are filled with a bonding material 6 such as glass and bonded.

In the magnetic head A having the above structure, the amorphous soft magnetic film 4 has the composition COX Tay Hfz X w, where X is Rh, Pd, Os, I r, P t, A
Indicates one type or two or more types of u, and the composition ratio of each component element in atomic % is 4≦y≦15, l≦z≦14, l≦W≦
18, but preferably the relationship x+y+z+w=100.

Here, the reason for the above-mentioned numerical limitation will be explained below.

The applicant of the present invention has made various proposals regarding Co-Ta-Hf based soft magnetic materials.
In Publication No. 54, the Ta content is 4 to 10 at%,
Go-T a- with Hf content limited to 1 to 5 at%
We are proposing a H['-based soft magnetic material.

Further, as described in Japanese Patent Application No. 63-68844, the Co content is limited to 81 to 85 at%, the Ta content is limited to 8 to 13 at%, and the Hf content is limited to 5 to IO at%,
A heat-resistant amorphous metal containing material is proposed in which the value of (Ta content)/(H1' content) is limited to 1 to 2.5. Moreover, in this proposal, the saturation magnetic flux density is limited to the above range based on the requirement that it exceeds 6000G.

Therefore, if the numerical limitation range derived from the above two proposals and the saturation magnetic flux density requirement in the above proposal are 5000G or more for ferrite, then as mentioned above, 4≦y≦15, l
A range of ≦z≦14 is preferable.

Among the component elements of the amorphous soft magnetic film 4, the main component is C.
o is a magnetic element, and Ta and Hf are elements necessary to form an amorphous state (zero magnetostriction can be achieved by an appropriate ratio of Ta and Hf, as described in Japanese Patent Application No. 63-68844). At the same time, heat resistance can be improved.

), the additive element This is to suppress oxygen-mediated diffusion reactions in the atmosphere and to improve environmental resistance.

In addition, the heat resistance of Co-Ta-Hf-X-based soft magnetic films (
The heat resistance (regulated by the crystallization temperature) is approximately determined by the concentration of Ta+Hf (and the ratio of Ta:Hf).

That is, in order to increase the concentration of X while maintaining a certain level of heat resistance, it is necessary to replace X with Co, and in this case, there is a concern that the saturation magnetic flux density (Bs) will decrease. However, in a soft magnetic film having the above composition, even if an extremely high heat resistance of 550° C. is required, the decrease in saturation magnetic flux density is small relative to the amount of X and Co substituted. Therefore, in order to make the saturation magnetic flux density 5000G or more, the composition ratio W can be allowed to be up to 18 atomic %. Therefore, the range of the composition ratio W was limited as described above.

To manufacture the amorphous soft magnetic film 4, various sputtering methods such as high-frequency bipolar sputtering, direct current sputtering, triode sputtering, and ion beam sputtering, or other thin film forming methods may be applied. is possible, and the target used when implementing the sputtering method is Co-Ta-
T on Hf-X alloy target or CO plate
A composite target with pellets of a, Hf, and X, or multiple alloy targets containing one or more of the elements Co, Ta, Hf, and X, co, Ta, Hf, and X
It can be used so that the

To manufacture the magnetic head A having the above structure, for example, an amorphous soft magnetic film 4 is formed on the upper surface of a pair of grooved core blocks made of Mn-Zn ferrite by the above-mentioned method, and then a film of 5iOy or the like is formed. It can be manufactured by joining both core blocks by glass bonding with a gap spacer layer interposed therebetween, and then machining the core blocks.

In the magnetic head A having the above structure, the pseudo gap portion does not expand even when glass bonding is performed at high temperatures, so a bonding material 6 with a medium to high melting point can be used, and in this case, the reliability of the glass bonding material is improved. Therefore, the reliability of the magnetic head is improved. Further, the amorphous soft magnetic film 4 contains Rh and Pd.

Since one or more of the elements Os, Ir, Pt, and Au are added to improve chemical stability, resistance to discoloration and corrosion is improved. Furthermore, Co-T a-H
If the X element is contained to an extent that does not deteriorate the magnetic properties of the f-based amorphous soft magnetic film 4, it will not only have excellent magnetic properties but also improve the pseudo gap, resulting in a magnetic head with excellent recording and reproducing properties. can be provided.

“Manufacturing Example 1” A composite target in which Pt pellets were placed on a Go-Ta-H1 alloy target and a composite target in which Au pellets were placed on a Go-Ta-Hf alloy target were used to produce each target. COt3. *T as, sHfa, tP'j+
Amorphous soft magnetic film with composition *, t or Co□, *T
a11. .

Hfs, ? An amorphous soft magnetic film having a composition of All + , q was manufactured. These amorphous soft magnetic films were heat-treated at 480° C. for 1 hour in a rotating magnetic field, and then the frequency characteristic curves of effective magnetic permeability of each soft magnetic film were determined and shown in FIG.

As is clear from Fig. 3, excellent soft magnetic properties can be obtained both when the amount of Pt added is large (10 atomic % or more) and when the amount of Au added is as small as 1.7 atomic %. It has become clear that it will work.

On the other hand, GO114,4-A Ta+o, tHfs, aXA
It has a composition of Au, Pd, Pt, and Ir as elements X.
was selected, a plurality of soft magnetic films were created by changing the value of A to various values, and the saturation magnetic flux density of each soft magnetic film was measured. Further, in the soft magnetic film having the above composition, G.

The change in the saturation magnetic flux density was measured when replacing the magnetic flux with Ta and Hf. The above results are shown in FIG. 4.

As is clear from Fig. 4, the rate of decrease in saturation magnetic flux density is gradual when replacing element X with Co.
(When replacing f with Ta, the saturation magnetic flux density decreases significantly. Therefore, it is clear that even if element X is added in an amount exceeding 15 at %, the saturation magnetic flux density decreases little.

Note that if the saturation magnetic flux density is to be equal to or higher than 5000G of ferrite, it is possible to add up to 18 atomic % even considering the decrease in the saturation magnetic flux density due to the addition of each element.

Furthermore, CO? 5.2T a+o, 5Hfs, ePts
,*A soft magnetic film having a composition of
Welding was performed by glass bonding at 550° C., and then machining was performed to form a magnetic head having the structure shown in FIG.

FIG. 5 shows the frequency characteristics of the reproduction output of this magnetic head, and FIG. 6 shows the frequency characteristics of a conventionally known magnetic head using a Co-Ta-Hf based soft magnetic film. Fifth
In the curves shown in the figure and FIG. 6, the amplitude of the waviness of the curves indicates noise due to the pseudo gap.

From the results shown in FIGS. 5 and 6, it can be seen that in the conventional magnetic head, the pseudo gap noise is 5 to 8 dB, whereas in the magnetic head of the invention described in claim 1, it is within 1.5 dB. It turned out that it was extremely small.

"Example 2" Hereinafter, the invention set forth in claim 2 will be described.

7 and 8 show an embodiment of the invention as claimed in claim 2, and the magnetic head B of this embodiment has a magnetic core half 11 made of an oxide magnetic material such as Mn--Zn ferrite.
．． 12 are butted against each other with a gap 13 interposed therebetween. An amorphous sub soft magnetic film 10 and an amorphous main soft magnetic film 14 are sequentially formed on the gear portion I3 side of these magnetic core halves t1.12, and the magnetic core halves 11.12 are A gap spacer layer made of 5iOy or the like is interposed between the crystalline main soft magnetic films 14 to form a gap portion 13, and in this state, magnetic core halves 11 and 12 are formed so as to sandwich the gap portion 13. The grooves 15 are filled with a bonding material 16 such as glass for bonding.

In order to form the amorphous sub-soft magnetic film 10 and the amorphous main soft-magnetic film 14, a sputtering apparatus capable of mounting two or more types of targets (a sputtering apparatus having multiple targets in the same vacuum chamber, or It is preferable to form the amorphous sub-soft magnetic film 10 and the amorphous main soft-magnetic film 14 continuously without breaking the vacuum state using a device (such as a device having two or more sputtering chambers using a locking method). . In addition, the sputtering method is
Similarly to the case described in the example of the invention set forth in claim 1, various known methods can be applied.

Furthermore, the larger the amount of the X element added to the amorphous sub-soft magnetic film 10, the greater the effect of suppressing the expansion of the pseudo gap, but if the concentration of the X element becomes too high, magnetic properties may deteriorate such as a decrease in saturation magnetic flux density. In order to make it non-negligible, an amorphous sub-soft magnetic film containing the X element to an extent that does not affect the electromagnetic conversion characteristics of the magnetic head and has a thickness that does not affect the electromagnetic conversion characteristics of the magnetic head. It is necessary to form 10. Therefore, the composition of the amorphous sub-soft magnetic film 10 is as claimed in claim 1.
The thickness of the amorphous sub-soft magnetic film 10 is preferably equal to that described in the example of the invention described in .
Q: It is childish to set the range to 000 people. Therefore, there is no problem even if the amorphous sub-soft magnetic film is multilayered so as not to exceed this range.

In addition, 100% of amorphous sub-soft magnetic films with various changes in the X element were prepared.
There is no problem in laminating multiple layers to a thickness of ~100 mm and forming an amorphous main soft magnetic film thereon. If the thickness of the amorphous main soft magnetic film IO exceeds 1000 mm, it is not preferable because it will affect the magnetic properties of the amorphous main soft magnetic film I4.
If it is less than 0.00 people, the effect of suppressing the diffusion of oxygen element will be insufficient, which is not preferable.

Even in the magnetic head B having the above structure, "Claim 1
It is possible to obtain the same effect as the magnetic head A described in . Furthermore, in the magnetic head B, the expansion of the pseudo gap can be prevented without impairing the magnetic properties of the amorphous main soft magnetic film 14, so that a magnetic head that maintains excellent electromagnetic conversion properties can be obtained.

"Manufacturing Example 2" A method using a core block made of Mn-Zn ferrite was carried out in the same manner as the method of manufacturing a magnetic head carried out in the embodiment of the invention of claim 1.
es, aT an, nHfa, +P t+t, tP
d4. .

High frequency 2
A film was formed by the polar sputtering method, and a 4-μl-thick Go-Ta-Hf-based amorphous soft magnetic film was formed by changing the target in the same vacuum chamber, followed by forming a gap and machining. After that, glass bonding was performed at 550° C. to manufacture a magnetic head.

Figure 9 shows the frequency characteristics of the reproduction output of this magnetic head, and Figure 10 shows a Co-Ta-Hf based amorphous main soft magnetic film with the same composition as the amorphous main soft magnetic film. The frequency characteristics of the reproduction output of the magnetic head used are shown.

From the results shown in FIG. 9 and FIG. 1θ, it can be seen that while the pseudo gap noise of the conventional magnetic head was 5 to 8 dB, the noise of the magnetic head of the example of the invention described in claim 2 was within 1 dB. It became clear that the noise could be significantly reduced. Note that both magnetic heads were equivalent in terms of magnetic recording characteristics (at peak frequency).

"Example 3" Next, the invention set forth in claim 3 will be explained.

FIG. 11 shows an embodiment of the invention as claimed in claim 3, and the magnetic head C of this example has a magnetic core half 11 similar to the magnetic head B shown in FIGS. 7 and 8. .12 and a gap portion 13, the magnetic core halves 11.12
An amorphous main soft magnetic film 20 and an amorphous sub soft magnetic film 24 are formed on the gear part 13 side. Furthermore, the bonding state between the magnetic core halves 11 and 12 is glass bonded, similar to the magnetic head B described above.

The amorphous sub-soft magnetic film 24 used in this example has 100 to 70
Preferably formed to a thickness of 0, COX Tay
In the composition HfzXw, each composition ratio is 4≦y≦
15. ! The range is ≦z≦14.18<, ≦35. On the other hand, in the invention of claim 1, in order to have heat resistance of 550° C. or higher and satisfy Bs≧5000G, the composition ratio of the amorphous soft magnetic film is set to 4≦y≦15. l≦z≦14. l
The range is ≦1≦18. In this example, the reason why the composition ratio W is limited to the range of 18<w≦35 is that when the laminated structure of the amorphous main soft magnetic film 20 and the amorphous sub-soft magnetic film 24 is formed, the amorphous sub-soft magnetic film This is because experiments in manufacturing examples described later have revealed that if the thickness of the magnetic film 24 is limited to the above range, there is no problem as a magnetic head even if Bs is 5000 G or less. If the composition ratio exceeds 35, the soft magnetic properties may deteriorate and the amorphous sub-soft magnetic film 24 may act as a pseudo gap, which is not preferable.

Moreover, if the thickness of the amorphous sub-soft magnetic film 24 is made smaller than the IOQ thickness, it is not preferable because the diffusion of oxygen from the magnetic core half body 12 cannot be suppressed. This is not preferable since there is a possibility that the sub soft magnetic film 24 may act as a pseudo gap.

In the magnetic head C having the above structure, it is possible to obtain effects equal to or greater than those of the magnetic head B described in claim 2. Furthermore, in the magnetic head C, the expansion of the pseudo gap can be prevented without impairing the magnetic properties of the amorphous main soft magnetic film 20, so that a magnetic head that maintains excellent electromagnetic conversion properties can be obtained. Furthermore, in the magnetic head C having the structure of this example, the pseudo gap noise is 0.8
It can be reduced to below dB.

"Manufacturing Example 3" Using a composite target in which Pt pellets were placed on a Co-Ta-Hf alloy target, a film with a thickness of 5 to θμl having the composition shown below was formed using a high frequency two-pole sputtering device, The magnetic permeability (μ) and saturation magnetic flux density (B
s) was measured.

The results are shown in Table 1.

First surface film composition ■COT8. OT ae, tHfs, aP Lz
, s■C0-et, aT ae, oHfs, tP Ls
,.

■COa+, eTae, sHf+, sP jts, sAs is clear from Table 1, the film containing more than 18 at.% of PL has lower performance at 5 MHz than the film containing less than 18 at.% of Pt. Although the magnetic permeability is inferior, M
It was found that since the magnetic permeability μ of ferrite, which is a basic material used in composite magnetic heads such as IG heads, is at the same level as 300 to 600, there is no risk of it acting as a pseudo gap.

FIG. 12 shows CO54, *-w Ta+o, tHf6.
Pta degree (atomic %) and saturation magnetic flux density (Bs) of a film with a composition of 4P tw, in which pt is replaced with Co.
This shows the relationship between

As is clear from Figure 12, Bs due to the addition of P't
The rate of decrease in P is gradual, and a large amount of P of 30 at%
It was found that 1700G was exhibited even when L was added.

On the other hand, in the same way as the manufacturing method of the magnetic head carried out in the manufacturing example of the invention of claim 1, a method using a core block made of Mn-Zn7 elite was carried out, and on the core blow 7, Coas, tT a+o, aHfs, tF't! +
,.

High frequency 2
A film was formed by the polar sputtering method, and a Co-Ta a-Hf amorphous soft magnetic film with a thickness of 4 μm was formed on top of it by changing the target in the same vacuum chamber, and forming a gap part. After machining, glass bonding was performed at 550° C. to manufacture a magnetic head.

Figure 13 shows the frequency characteristics of the reproduction output of this magnetic head, and Figure 14 shows only the Go-Ta-Hf amorphous soft magnetic film with the same composition as the amorphous main soft magnetic film. 3 shows the frequency characteristics of the reproduction output of a comparative magnetic head manufactured by forming a magnetic head.

From the results shown in Figures 13 and 14, the pseudo gap noise (amplitude of curve waviness) of the magnetic head of the comparative example is 5.
Compared to the noise of ~8 dB, the noise of the magnetic head of this example was about 0.5 dB, and it became clear that the noise could be significantly reduced.

"Effect of the invention" As explained above, claim 11. :According to the described invention, since one or more of Rh, Pd, Os, Pt, and Au is added to the amorphous soft magnetic film, the effect of adding these elements makes it possible to maintain high temperature during glass bonding. Even when the magnetic core halves are bonded by heating to a temperature of An excellent magnetic head can be obtained. Furthermore, since the adverse effects of heat during glass bonding are removed, glass bonding can be performed at a higher temperature than before. Therefore, it becomes possible to use a glass bonding material with a medium to high melting point without impairing the magnetic properties, which has the effect of improving the reliability of the glass bonding material. Furthermore, the chemical stability of the amorphous soft magnetic film is improved by the addition of elements contained in the amorphous soft magnetic film, making it less likely to discolor or corrode, thereby improving the environmental resistance of the magnetic head. .

On the other hand, according to the invention set forth in claim 2, an amorphous secondary soft magnetic film having the same composition as the soft magnetic film set forth in claim 1 is provided between the amorphous main soft magnetic film and the magnetic core half. Having formed a film,
During heating by glass bonding, diffusion of oxygen from the magnetic core half side to the soft magnetic film side can be suppressed to prevent the pseudo gap from expanding, and a magnetic head with excellent recording and reproducing characteristics can be obtained. Furthermore, since the adverse effects of heat during glass bonding are removed, glass bonding can be performed at a higher temperature than before. Therefore, it becomes possible to use a glass bonding material with a medium to high melting point without impairing the magnetic properties, which has the effect of improving the reliability of the glass bonding material. Further, since the pseudo gap is prevented from expanding without degrading the magnetic properties of the amorphous main soft magnetic film, a magnetic head that maintains excellent electromagnetic conversion properties can be obtained.

Furthermore, according to the invention set forth in claim 3, in addition to the effect obtained by the invention set forth in claim 2, it is possible to further significantly reduce pseudo gap noise without impairing electromagnetic conversion characteristics, and to reduce the pseudo gap noise to 0.8 dB or less. This has the effect of realizing pseudo gap noise.

[Brief explanation of the drawing]

1 and 2 show an embodiment of the invention as claimed in claim 1. FIG. 1 is an enlarged view of the main part of the magnetic head, and FIG.
The figure is a perspective view of the magnetic head, FIG. 3 is a diagram showing the magnetic permeability of the amorphous soft magnetic film used in the invention described in claim 1, and FIG.
The figure is a diagram showing the saturation magnetic flux density of the amorphous soft magnetic film used in the invention described in claim 1, and FIG. 6 is a diagram showing the reproduction output of the conventional magnetic head, and FIGS. 7 and 8 are diagrams showing the reproduction output of an embodiment of the invention described in .
This shows one embodiment of the invention set forth in claim 2, and the seventh
8 is a perspective view of the magnetic head, FIG. 9 is a line diagram showing the reproduction output of an embodiment of the invention set forth in claim 2, and FIG. 10 is a diagram showing the reproduction output of a conventional magnetic head. A diagram showing the reproduction output of the head, FIG. 11 is a plan view showing a magnetic head according to an embodiment of the invention set forth in claim 3, and FIG. 12 is a diagram showing the reproduction output of the head.
FIG. 13 is a diagram showing the change in the saturation magnetic flux density of the film, and FIG. FIG. 14 is a diagram showing the reproduction output of a comparative example. A...Magnetic head, 1.2...Magnetic core half, 3...Gap portion, 4...Amorphous soft magnetic film, 6...Bonding material, B...Magnetic head, 10... Amorphous side-turning magnetic film, 11.12... Magnetic core half, 13... Gap portion, 14... Amorphous main soft magnetic film, 16... Bonding material, C ... Magnetic head, 20 ... Amorphous main soft magnetic film, 24 ... Amorphous cartwheel magnetic film. Applicant: Representative of Alps Electric Co., Ltd. Kataoka Masataka Figure 10 Frequency of water (MHz) Figure 11 Figure 12 W (at%) Figure 13 Figure 13 Frequency of water (MHz) Figure 14 Insect of water (MHz) 1. Indication of the incident 1988 Patent Application No. 291992 2. Name of the invention Magnetic head 3. Person making the amendment Relationship to the case Patent applicant AO9 Alps Electric Co., Ltd. 44 Agent Column "Detailed explanation of the invention J" in the specification. 6. Details of the amendment No. 10th line, 1st line to 2nd line,
54'' is corrected to ``Unexamined Japanese Patent Publication No. 60-215'04''.

Claims (3)

[Claims] (1) A pair of magnetic core halves each having a Co-Ta-Hf based amorphous soft magnetic film formed on the gap side are bonded to the amorphous soft magnetic film through the gap by glass bonding. In the magnetic head, the amorphous soft magnetic film includes:
At least one element selected from Rh, Pd, Os, Ir, Pt, and Au is added, and the composition of the amorphous soft magnetic film is expressed by the general formula Co_xTa_yHf_zX_w
(X indicates an additive element), the composition ratio y, z
, w in the following ranges in atomic %: 4≦y≦15 1≦z≦14 1≦w≦18 (where x+y+z+w=100). (2) A pair of magnetic core halves with a Co-Ta-Hf based amorphous main soft magnetic film formed on the gap side are bonded to the amorphous main soft magnetic film through the gap part by glass bonding. In the magnetic head, Rh, Pd, Os, Ir, P is present between the magnetic core half and the amorphous main soft magnetic film.
1. A magnetic head comprising a Co--Ta--Hf based amorphous soft magnetic film doped with at least one element selected from T, Au. (3) A pair of magnetic core halves with a Co-Ta-Hf based amorphous main soft magnetic film formed on the gap side are bonded to the amorphous main soft magnetic film through the gap part by glass bonding. In the magnetic head, Rh, Pd, Os, Ir, Pt is present between the magnetic core half and the amorphous main magnetic film.
, a Co-Ta-Hf based amorphous soft magnetic film doped with at least one element selected from Au, and the composition of the amorphous soft magnetic film is expressed by the general formula: When expressed as Co_xTa_yHf_zX_w (X indicates an additive element), the composition ratios y, z, and w are 4≦y in atomic %.
A magnetic head characterized in that the following ranges are set: ≦15 1≦z≦14 18<w≦35 (where x+y+z+w=100).