JPH0275641U - - Google Patents
Info
- Publication number
- JPH0275641U JPH0275641U JP15463788U JP15463788U JPH0275641U JP H0275641 U JPH0275641 U JP H0275641U JP 15463788 U JP15463788 U JP 15463788U JP 15463788 U JP15463788 U JP 15463788U JP H0275641 U JPH0275641 U JP H0275641U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- view
- developing device
- showing
- fed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15463788U JPH0275641U (cg-RX-API-DMAC7.html) | 1988-11-28 | 1988-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15463788U JPH0275641U (cg-RX-API-DMAC7.html) | 1988-11-28 | 1988-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0275641U true JPH0275641U (cg-RX-API-DMAC7.html) | 1990-06-11 |
Family
ID=31431549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15463788U Pending JPH0275641U (cg-RX-API-DMAC7.html) | 1988-11-28 | 1988-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0275641U (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04117435U (ja) * | 1991-03-29 | 1992-10-21 | 大日本スクリーン製造株式会社 | 基板の表面処理装置 |
-
1988
- 1988-11-28 JP JP15463788U patent/JPH0275641U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04117435U (ja) * | 1991-03-29 | 1992-10-21 | 大日本スクリーン製造株式会社 | 基板の表面処理装置 |
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