JPH0274923A - Production of liquid crystal display element substrate - Google Patents
Production of liquid crystal display element substrateInfo
- Publication number
- JPH0274923A JPH0274923A JP63228206A JP22820688A JPH0274923A JP H0274923 A JPH0274923 A JP H0274923A JP 63228206 A JP63228206 A JP 63228206A JP 22820688 A JP22820688 A JP 22820688A JP H0274923 A JPH0274923 A JP H0274923A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- substrate
- liquid crystal
- color filter
- crystal display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 64
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229920005989 resin Polymers 0.000 claims abstract description 58
- 239000011347 resin Substances 0.000 claims abstract description 58
- 238000003825 pressing Methods 0.000 claims abstract description 29
- 238000010894 electron beam technology Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 12
- 239000012298 atmosphere Substances 0.000 claims description 8
- 239000002904 solvent Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 2
- 238000003848 UV Light-Curing Methods 0.000 abstract 2
- 238000003847 radiation curing Methods 0.000 abstract 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 description 15
- 238000009499 grossing Methods 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 210000000078 claw Anatomy 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 241000207199 Citrus Species 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 235000020971 citrus fruits Nutrition 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、液晶表示素子に用いられる基板の製造方法に
関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a substrate used in a liquid crystal display element.
従来の技術
液晶表示素子に使用するガラス基板あるいはカラーフィ
ルタ基板は、その基板表面が平滑化されていないと、液
晶表示素子として組み立てた場合に２枚の基板間のギヤ
ツブが不均一になり表示素子としての表示品位が低下す
る。またカラーフィルタ基板表面に凹凸があると、この
上に薄膜で透明電極膜を形成する場合に透明電極膜が断
線しやすくなる。さらにカラーフィルタ基板の着色膜表
面の凹凸により光拡散現象によって光透過性が損なわれ
る。Conventional Technology If the surface of the glass substrate or color filter substrate used in a liquid crystal display element is not smoothed, the gears between the two substrates will become uneven when assembled into a liquid crystal display element, causing the display element to become uneven. display quality deteriorates. Furthermore, if the surface of the color filter substrate is uneven, the transparent electrode film is likely to be disconnected when a thin transparent electrode film is formed thereon. Furthermore, the unevenness of the colored film surface of the color filter substrate impairs light transmittance due to a light diffusion phenomenon.
従って、カラーフィルタ基板では、着色膜上の凹凸や着
色膜間の段差を解消するために、従来はカラーフィルタ
基板上に透明性樹脂を塗布することにより平滑性を得る
ようにしていた。Therefore, in the color filter substrate, in order to eliminate unevenness on the colored film and steps between the colored films, conventionally, smoothness has been obtained by coating the color filter substrate with a transparent resin.
以下図面を参照しながら従来の方法により形成されたカ
ラーフィルタ基板の一例について説明する。An example of a color filter substrate formed by a conventional method will be described below with reference to the drawings.
第４図は従来の方法でカラーフィルタ上に透明な平滑層
を形成した基板の断面図を示すものである。第４図での
カラーフィルタとしての着色膜２は凹版印刷法によりガ
ラス基板！上に約２．０μｍの膜厚で形成しており、こ
のカラーフィルタ上に変性シリコーン樹脂でなる溶剤を
含むフェスを塗布し、これを熱硬化させて膜厚約４μｍ
の平滑層３とさせたものである。FIG. 4 shows a cross-sectional view of a substrate on which a transparent smooth layer is formed on a color filter by a conventional method. The colored film 2 as a color filter in FIG. 4 is formed on a glass substrate using the intaglio printing method! A film with a thickness of approximately 2.0 μm is formed on top of the color filter, and a film containing a solvent made of modified silicone resin is applied onto this color filter, and this is heat cured to form a film with a thickness of approximately 4 μm.
The smooth layer 3 is as follows.
発明が解決しようとする課題
しかしながら、カラーフィルタ基板において、上記のよ
うな透明樹脂を単に塗布して平滑層を形成する方法では
、平滑層にゆず乳状の凹凸が発生したり、カラーフィル
タの着色膜表面や着色膜間などのもともとの凹凸や段差
が残り、平滑層形成後においても０．８μｍの凹凸が発
生し高い平滑性を得られないという問題点があった。Problems to be Solved by the Invention However, in the method of forming a smooth layer on a color filter substrate by simply applying a transparent resin as described above, unevenness like citrus milk may occur on the smooth layer, or the colored film of the color filter may become uneven. There was a problem in that the original unevenness and steps on the surface and between the colored films remained, and even after the smooth layer was formed, unevenness of 0.8 μm occurred, making it impossible to obtain high smoothness.
本発明は上記問題点に鑑み、簡単な製造方法でガラス基
板やカラーフィルタ基板など液晶表示素子に使用される
基板において、表面の凹凸が小さく平坦性の高い基板の
製造方法を提供することを目的としている。In view of the above-mentioned problems, an object of the present invention is to provide a simple manufacturing method for substrates used in liquid crystal display devices such as glass substrates and color filter substrates, which have small surface irregularities and high flatness. It is said that
課題を解決するための手段
上記目的を達成するために、本発明は透明性基板あるい
は着色膜を形成したカラーフィルタ基板の表面に透明性
を有する紫外線硬化型樹脂、電子線硬化型樹脂のいずれ
かの溶剤を含まない樹脂を塗布し、この樹脂塗布面を透
明性押圧板で押圧したまま、次いで紫外線あるいは電子
線を照射して前記樹脂を硬化せしめた後、前記押圧板を
離型させるものである。Means for Solving the Problems In order to achieve the above objects, the present invention uses either a transparent ultraviolet curable resin or an electron beam curable resin on the surface of a transparent substrate or a color filter substrate on which a colored film is formed. This method involves applying a solvent-free resin, pressing the resin-coated surface with a transparent pressing plate, then irradiating ultraviolet rays or electron beams to cure the resin, and then releasing the pressing plate from the mold. be.
上記においてガラス板あるいはカラーフィルタ基板の表
面に、塗布樹脂との接着性を向上させるカップリング剤
などをあらかじめ塗布しておくことは効果的である。In the above, it is effective to apply a coupling agent or the like to the surface of the glass plate or color filter substrate in advance to improve adhesion with the coating resin.
また透明性樹脂の被塗布基板への塗布は、被塗布基板の
周辺部にまで塗布せずに中央部にのみ塗布を行なうのが
、後記する理由により、より効果的である。Further, when applying the transparent resin to the substrate to be coated, it is more effective to apply the transparent resin only to the central portion of the substrate without coating the periphery of the substrate for reasons described later.
さらに押圧仮に鏡面研磨したガラス板を用いること、塗
布した樹脂の押圧板での押圧は真空中で行なうこと、押
圧板での押圧を雰囲気の圧力差を利用して行なうことな
ども、後記する理由により、効果的である。Furthermore, there are also reasons for using a mirror-polished glass plate, pressing the coated resin with the press plate in a vacuum, and using the pressure difference in the atmosphere to press the coated resin. This makes it more effective.
作用
上記した本発明の製造方法は、被塗布基板の表面に溶剤
を含まない樹脂を塗布し、この樹脂塗布面を押圧板で押
圧し、次いで押圧した状態で紫外線や電子線を照射して
樹脂を硬化させた後、押圧仮を離型させるものである。Function The manufacturing method of the present invention described above involves coating the surface of the substrate to be coated with a resin that does not contain a solvent, pressing the resin-coated surface with a pressing plate, and then irradiating the resin with ultraviolet rays or electron beams while being pressed. After curing, the pressed material is released from the mold.
従って、溶剤を含まない樹脂を用いていること、樹脂の
塗布後に押圧して平滑化させるので樹脂そのものにそれ
ほど流動性を必要としないので粘度の高い比較的に分子
量の大きい樹脂を用いることができること、などから樹
脂の硬化前後における体ａ減少の小さい樹脂を選択でき
る。これにより被塗布基板のもともとの凹凸や段差が残
るのが小さくなり、高い平坦性を得られるものである。Therefore, a resin that does not contain a solvent is used, and since the resin is pressed and smoothed after application, the resin itself does not require much fluidity, so a resin with a high viscosity and a relatively large molecular weight can be used. , etc., a resin with a small decrease in body a before and after curing of the resin can be selected. This reduces the remaining original irregularities and steps of the substrate to be coated, and provides high flatness.
また樹脂に溶剤を含まないために、樹脂の硬化時のアウ
トガスによる発泡なども発生しにくいものである。Furthermore, since the resin does not contain a solvent, foaming due to outgas during curing of the resin is less likely to occur.
また樹脂の塗布を基板の中央部のみに行なうと、押圧時
に樹脂が基板よりはみ出してパリとなることがない。Furthermore, if the resin is applied only to the center of the substrate, the resin will not protrude from the substrate and become flaky when pressed.
次に、鏡面研磨を施したガラス板を押圧板に使用すると
、押圧面すなわち平滑層表面の平滑性が高まるだけでな
く、非極性の樹脂を用いた場合、押圧板の離型が容易と
なり効果的である。Next, if a mirror-polished glass plate is used for the press plate, not only will the smoothness of the press surface, that is, the surface of the smooth layer, be increased, but if a non-polar resin is used, the press plate will be easier to release from the mold, making it more effective. It is true.
さらに塗布樹脂の押圧を真空中で行なうと、押圧板によ
る空気のまき込みがないために、平滑層中に気泡が発生
しない。Furthermore, when the coating resin is pressed in a vacuum, air bubbles are not generated in the smooth layer because no air is drawn in by the pressing plate.
そして押圧板での押圧を雰囲気の圧力差を利用して行な
うことにより、機械的な押圧に比べて押圧時の圧力が均
一になる。これによって、平滑層の膜厚分布が均一にな
り、また平滑層面の平坦性が高まるものである。By using the pressure difference in the atmosphere to press with the press plate, the pressure at the time of pressing becomes more uniform compared to mechanical pressing. This makes the thickness distribution of the smooth layer uniform and improves the flatness of the smooth layer surface.
実施例 以下本発明の一実施例を図面を参照しながら説明する。Example An embodiment of the present invention will be described below with reference to the drawings.
先ず第２図（ａ）に示すカラーフィルタ基板を用意する
。この第２図（ａ）のカラーフィルタ基板は、ガラス基
板１上凹版オフセフ）印刷方式により赤色（Ｒ）、緑色
（Ｇ）、青色（Ｂ）の各インクを印刷してカラーフィル
タとしての着色膜２ （２Ｒ，２Ｇ。First, a color filter substrate shown in FIG. 2(a) is prepared. The color filter substrate shown in FIG. 2(a) is made by printing red (R), green (G), and blue (B) inks on the glass substrate 1 using an intaglio printing method to form a colored film as a color filter. 2 (2R, 2G.
２Ｂ）を幅２４０μｍ、膜厚約２．２μｍのストライプ
状に形成している。着色膜２の表面凹凸は最大段差で０
．８μｍ、着色膜２とガラス基板１との最大段差は２．
６７１ｍであった。2B) is formed in a stripe shape with a width of 240 μm and a film thickness of about 2.2 μm. The surface unevenness of colored film 2 is 0 at the maximum level difference.
．． 8 μm, and the maximum height difference between the colored film 2 and the glass substrate 1 is 2.
It was 671m.
この第２図（ａ）に示すカラーフィルタ基板の表面に、
スビコート法でシランカップリング剤を塗布し、乾燥さ
せる。この目的は、後記する平滑層とカラーフィルタ基
板との接着力を高めるためである。このシランカップリ
ング剤を塗布した。On the surface of the color filter substrate shown in FIG. 2(a),
Apply a silane coupling agent using the Subi-coat method and dry. The purpose of this is to increase the adhesive force between the smooth layer and the color filter substrate, which will be described later. This silane coupling agent was applied.
カラーフィルタ基板の中央部に溶剤を含んでいないアク
リル系の紫外線硬化樹脂をスクリーン印刷法で塗布し、
第２図（ｂｌに示すように平滑剤塗布膜４を４μｍの厚
みに設ける。次に、この平滑剤塗布膜４を形成した平滑
剤塗布カラーフィルタ基（反１０を、第３図に示す押圧
装置の真空室１１のステージＩ３上に設置する。そして
表面の凹凸を０．０２μｍ以下に研磨したガラス板で成
る透明な押圧板２０を、上記の平滑剤塗布カラーフィル
タ基板１０の平滑剤塗布膜４に触れない程度の距離を離
して、支持ツメ１４ａ、１．４ｂ上に設置する。Solvent-free acrylic ultraviolet curing resin is applied to the center of the color filter substrate using a screen printing method.
As shown in FIG. 2 (bl), a smoothing agent coated film 4 is provided to a thickness of 4 μm.Next, the smoothing agent coated color filter base (reverse 10) on which this smoothing agent coated film 4 has been formed is pressed as shown in FIG. It is installed on the stage I3 of the vacuum chamber 11 of the apparatus.Then, a transparent pressing plate 20 made of a glass plate whose surface has been polished to a surface roughness of 0.02 μm or less is applied to the smoothing agent-coated film of the above-mentioned smoothing agent-coated color filter substrate 10. 4 and placed on the support claws 14a and 1.4b at a distance that does not touch the support claws 14a and 1.4b.
この時、平滑剤塗布膜４と押圧板２０とは対向するよう
にセットしている。この後、開閉バルブ１６ａ、＋６ｂ
を開き、真空室１１と真空室１２とを真空ポンプ１５を
始動させて１０ＩＴｏｒｒまで排気させ乞。なお真空室
１１と真空室Ｉ２とは弾性ゴム１８により独立した真空
室としている。At this time, the smoothing agent coating film 4 and the pressing plate 20 are set to face each other. After this, the on-off valves 16a, +6b
Open the vacuum chamber 11 and vacuum chamber 12 and start the vacuum pump 15 to evacuate the vacuum chambers 11 and 12 to 10 ITorr. The vacuum chamber 11 and the vacuum chamber I2 are separated by elastic rubber 18.
次に、押し板１９で弾性ゴム１８を介して押圧板２０の
中央部を上記の平滑剤塗布カラーフィルタ基板ＩＯに軽
く押し当てる。次いで支持ツメ１４ａ、１４ｂを引き抜
いて、押圧（反２０を平滑剤塗布カラーフィルタ基板１
０の平滑剤塗布膜４の全面に軽く接触させる。この後押
し板１９を引き上げ、次いでリークバルブ＋７ｂを開い
て大気を導入して、真空室１２を大気圧にする。これに
より真空室１１と真空室１２との間には気圧差が生じて
いる。したがってこの気圧差で、押圧板１３はカラーフ
ィルタ基板の平滑剤塗布膜４を弾性ゴムエ８を介して押
圧する。この後、真空ポンプ１５を停止させリークバル
ブ１７ａを開いて真空室１１を大気圧に戻し、押圧板２
０で押圧された状態のカラーフィルタ基板を押圧装置か
ら取り出して、押圧板２０を介して紫外線を照射し、平
滑剤塗布膜４の樹脂を硬化させ第１図に示す平滑層３を
形成する。次に押圧板２０を離型させる。Next, the pressing plate 19 lightly presses the center portion of the pressing plate 20 against the smoothing agent-coated color filter substrate IO via the elastic rubber 18. Next, pull out the support claws 14a and 14b, and press the
Lightly touch the entire surface of the smoothing agent coating film 4 of No. 0. This booster plate 19 is pulled up, and then the leak valve +7b is opened to introduce the atmosphere to bring the vacuum chamber 12 to atmospheric pressure. This creates a pressure difference between the vacuum chamber 11 and the vacuum chamber 12. Therefore, due to this pressure difference, the pressing plate 13 presses the smoothing agent coating film 4 of the color filter substrate via the elastic rubber 8. After that, the vacuum pump 15 is stopped, the leak valve 17a is opened, the vacuum chamber 11 is returned to atmospheric pressure, and the pressure plate 2
The color filter substrate pressed at 0 is taken out from the pressing device and irradiated with ultraviolet rays through the pressing plate 20 to harden the resin of the smoothing agent coating film 4 and form the smoothing layer 3 shown in FIG. Next, the press plate 20 is released from the mold.
このようにして得たカラーフィルタ基板の断面図を第１
図に示す。この第１図に示すカラーフィルタ基板の着色
部２上の平滑７１３に気泡が見られなく、また表面の凹
凸は０．０５μＩｎであり、着色部２間の段差は０．１
３μｍであった。The cross-sectional view of the color filter substrate obtained in this way is shown in the first figure.
As shown in the figure. No air bubbles are observed on the smooth surface 713 on the colored parts 2 of the color filter substrate shown in FIG.
It was 3 μm.
なお第３図に示す押圧装置において、真空槽は槽壁３２
と槽壁３１は開閉できるようになっている。また支持ツ
メ１４ａ、＋４ｂと、押し板１９とはスライド移動が行
なえるようにしている。Note that in the pressing device shown in FIG. 3, the vacuum chamber has a wall 32.
The tank wall 31 can be opened and closed. Further, the support claws 14a, +4b and the push plate 19 are configured to be slidable.
発明の効果
以上述べてきたように本発明の方法によれば、以下に記
載される効果を有する。Effects of the Invention As described above, the method of the present invention has the following effects.
平滑層の材料に溶剤を含まない紫外線硬化性樹脂あるい
は電子線硬化性樹脂を用いることと、樹脂の塗布後に鏡
面な押圧板で押圧することから塗布樹脂に高い流動性が
不要となって粘性の高い樹脂を用いることができる事か
ら、樹脂の硬化前後のおける体積減少が小さくなり、こ
れにより被塗布基板のもともとの凹凸が残るのが小さく
なり、基板表面の平坦性を高めることができる。Because the smooth layer is made of ultraviolet curable resin or electron beam curable resin that does not contain solvents, and because the resin is pressed with a mirror-like press plate after being applied, the coated resin does not need to have high fluidity, making it less viscous. Since a high-quality resin can be used, the volume reduction before and after curing of the resin is reduced, which reduces the remaining original unevenness of the coated substrate and improves the flatness of the substrate surface.
さらに、塗布樹脂面の押圧板による押圧を真空雰囲気中
で行なうので、空気などのまき込みにより発泡を防止で
きる。Furthermore, since the surface of the coated resin is pressed by the press plate in a vacuum atmosphere, it is possible to prevent foaming due to the inclusion of air or the like.
また、塗布樹脂面の押圧仮による押圧部分をセフ）した
真空室を真空雰囲気とし、この前記真空室と弾性ゴムで
介した他のもう〜つの真空室を大気圧とすることによっ
て、これら二つの真空室の雰囲気の圧力差を利用して、
弾性ゴムを介して押圧板による樹脂塗布面の押圧をして
いるので、押圧時の圧力分布が均一になり、これにより
平滑層表面の平坦性が高まるとともに、膜厚の分布が均
一にすることができる。In addition, by setting the vacuum chamber where the pressed part of the coated resin surface is in a vacuum atmosphere, and setting this vacuum chamber and another vacuum chamber interposed by elastic rubber at atmospheric pressure, these two Using the pressure difference in the vacuum chamber atmosphere,
Since the pressure plate presses the resin-coated surface through the elastic rubber, the pressure distribution during pressing becomes uniform, which increases the flatness of the smooth layer surface and makes the film thickness uniform. Can be done.
そして、平滑剤に光硬化性あるいは電子線硬化性の透明
性樹脂を用い、さらに透明な押圧板で押圧したままで紫
外線あるいは電子線を照射して塗布樹脂を硬化させるの
で、樹脂の硬化時には塗布樹脂がウェットな状態で雰囲
気にさらされないのでほこりなどの異物の付着を防止で
きるものである。Then, a photo-curable or electron beam-curable transparent resin is used as the smoothing agent, and the coated resin is cured by irradiating ultraviolet rays or electron beams while being pressed with a transparent press plate, so when the resin is cured, the coating is applied. Since the resin is not exposed to the atmosphere in a wet state, it is possible to prevent the adhesion of foreign substances such as dust.
第１図は本発明の一実施例における平滑層を形成したカ
ラーフィルタ基板の断面図、第２図（ａ）は第１図の本
発明の一実施例に用いた平滑層を形成する前のカラーフ
ィルタ基板の断面図、第２図の）は本発明の一実施例に
おける平滑剤塗布カラーフィルタ基板の断面図、第３図
は本発明の一実施例における押圧装置の構成を示す断面
図、第４図は本発明外の従来例における平滑層を形成し
たカラーフィルタ基板の断面図である。
１・・・・・・ガラス基板、２・・・・・・着色膜（２
Ｒ：赤色。
２Ｇ：緑色、２Ｂ：青色）、３・・・・・・平滑層、４
・・・・・・平滑剤塗布膜、ＩＯ・・・・・・平滑剤塗
布カラーフィルタ基板、１１．１２・・・・・・真空室
、１５・・・・・・真空ポンプ、１８・・・・・・弾性
ゴム、２０・・・・・・押圧板。
代理人の氏名 弁理士 粟野重孝 はか１名Ｉ−・−ガ
ラス基板
？ ・・−１−色部
（２Ｒ：：ｆｒ、＠、 ２Ｇ 緑色、２Ｂ胃色）３−
平滑層
第１図
第２図
？FIG. 1 is a cross-sectional view of a color filter substrate on which a smooth layer is formed according to an embodiment of the present invention, and FIG. 2 (a) is a cross-sectional view of a color filter substrate used in an embodiment of the present invention in FIG. 2) is a sectional view of a color filter substrate coated with a smoothing agent in an embodiment of the present invention; FIG. 3 is a sectional view showing the configuration of a pressing device in an embodiment of the present invention; FIG. 4 is a sectional view of a color filter substrate on which a smooth layer is formed in a conventional example other than the present invention. 1...Glass substrate, 2...Colored film (2
R: Red. 2G: green, 2B: blue), 3... Smooth layer, 4
... Smoothing agent coated film, IO ... Smoothing agent coated color filter substrate, 11.12 ... Vacuum chamber, 15 ... Vacuum pump, 18 ... ...Elastic rubber, 20...Press plate. Name of agent: Patent attorney Shigetaka Awano 1 person I--Glass substrate? ...-1-Color part (2R::fr, @, 2G green, 2B stomach color) 3-
Smooth layer Figure 1 Figure 2?
Claims (6)
型樹脂のいずれかの溶剤を含まない樹脂を塗布後、前記
樹脂塗布面を透明性押圧板で押圧し、次いで紫外線ある
いは電子線を照射して前記樹脂を硬化させた後、前記透
明板を離型させることを特徴とする液晶表示素子基板の
製造方法。(1) After applying a solvent-free resin, either a transparent ultraviolet curable resin or an electron beam curable resin, to the surface of the substrate, press the resin-coated surface with a transparent pressing plate, and then apply ultraviolet rays or electron beams. A method for manufacturing a liquid crystal display element substrate, characterized in that the transparent plate is released from the mold after the resin is cured by irradiation with.
る請求項（１）記載の液晶表示素子基板の製造方法。(2) The method for manufacturing a liquid crystal display element substrate according to claim (1), wherein the substrate is a color filter substrate on which a colored film is formed.
する請求項（１）記載の液晶表示素子基板の製造方法。(3) The method for manufacturing a liquid crystal display element substrate according to claim (1), characterized in that the resin is applied only to the central portion of the substrate.
）記載の液晶表示素子基板の製造方法。(4) Claim (1) wherein the pressing plate is a mirror-polished glass plate.
) The method for manufacturing a liquid crystal display element substrate according to the method.
る請求項（１）記載の液晶表示素子基板の製造方法。(5) The method for manufacturing a liquid crystal display element substrate according to claim (1), wherein the pressing with the pressing plate is performed in a vacuum.
うことを特徴とする請求項（５）記載の液晶表示素子基
板の製造方法。(6) The method for manufacturing a liquid crystal display element substrate according to claim (5), wherein the pressing with the pressing plate is performed using a pressure difference in the atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228206A JPH0274923A (en) | 1988-09-12 | 1988-09-12 | Production of liquid crystal display element substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228206A JPH0274923A (en) | 1988-09-12 | 1988-09-12 | Production of liquid crystal display element substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274923A true JPH0274923A (en) | 1990-03-14 |
Family
ID=16872857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63228206A Pending JPH0274923A (en) | 1988-09-12 | 1988-09-12 | Production of liquid crystal display element substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274923A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0443301A (en) * | 1990-06-11 | 1992-02-13 | Nippon Sheet Glass Co Ltd | Resin coating method for optical component |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62280803A (en) * | 1986-05-30 | 1987-12-05 | Toppan Printing Co Ltd | Manufacture of color filter |
-
1988
- 1988-09-12 JP JP63228206A patent/JPH0274923A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62280803A (en) * | 1986-05-30 | 1987-12-05 | Toppan Printing Co Ltd | Manufacture of color filter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0443301A (en) * | 1990-06-11 | 1992-02-13 | Nippon Sheet Glass Co Ltd | Resin coating method for optical component |
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