JPH0481717A - Manufacture of liquid crystal base plate and device for manufacturing the same - Google Patents

Manufacture of liquid crystal base plate and device for manufacturing the same

Info

Publication number
JPH0481717A
JPH0481717A JP2196613A JP19661390A JPH0481717A JP H0481717 A JPH0481717 A JP H0481717A JP 2196613 A JP2196613 A JP 2196613A JP 19661390 A JP19661390 A JP 19661390A JP H0481717 A JPH0481717 A JP H0481717A
Authority
JP
Japan
Prior art keywords
pressing
substrate
liquid crystal
resin
crystal substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2196613A
Other languages
Japanese (ja)
Inventor
Yoshiki Sasaki
良樹 佐々木
Yoshitake Hayashi
祥剛 林
Masatoshi Kudo
眞壽 工藤
Mitsuhiro Otani
光弘 大谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2196613A priority Critical patent/JPH0481717A/en
Publication of JPH0481717A publication Critical patent/JPH0481717A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To smoothly advance the pressing of a resin for smoothing with a base plate for pressing without stopping nor speed reduction and to form a smooth layer which has no surface ruggedness by providing a mechanism which smoothly increases the pressing force. CONSTITUTION:When the resin 22 for smoothing is pressed, the flow rate of air suction to a pressing tank 2 is controlled to increase the pressure difference between a pressing tank 2 and the pressing tank 2 as the pressing force to the substrate 21 for pressing. After the pressing of a resin coating surface by the base plate 21 for pressing is smoothly advanced without stopping nor speed reduction, the smoothing resin 22 is cured by electron-beam or ultraviolet-ray irradiation and then the substrate 21 for pressing is separated. Consequently, a smooth resin phase which has no surface ruggedness can be formed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明(よ 液晶表示素子に用いられる基板の製造方法
と製造装置に関するものであa 従来の技術 近鍛 液晶表示素子の表示特性を向上させるために ガ
ラス基板あるいはカラーフィルタ基板の表面を十分に平
滑にすることが必要となっている。
[Detailed Description of the Invention] Industrial Field of Application The present invention relates to a manufacturing method and manufacturing apparatus for a substrate used in a liquid crystal display element (a) Conventional technology To improve the display characteristics of a liquid crystal display element It is necessary to make the surface of the glass substrate or color filter substrate sufficiently smooth.

これ(友 液晶基板表面の凹凸により液晶を挟む2枚の
液晶基板間の距離が不均一となり表示特性の低下にっな
がゑ 透明電極を形成する際には透明電極が断線しゃす
くなゑ またこれら表面凹凸によってパネルを透過する
光が散乱し 均一な表示特性が得られな(X、などの問
題が生じるからである。
This (Friend) Due to the unevenness of the surface of the liquid crystal substrate, the distance between the two liquid crystal substrates that sandwich the liquid crystal becomes uneven, which leads to deterioration of display characteristics.When forming transparent electrodes, it is difficult to disconnect the transparent electrodes.Also, these This is because the unevenness of the surface scatters the light that passes through the panel, making it impossible to obtain uniform display characteristics (X, etc.).

従ってカラーフィルタ基板においては カラーフィルタ
基板の表面に電子線硬化型もしくは紫外線硬化型樹脂を
塗布し 研磨ガラス基板によって樹脂塗布面をプレスし
 研磨ガラスの研磨面を樹脂表面に転写することによっ
て、カラーフィルタ基板表面に平滑層を形成していた 以下図面を参照しなか叡 上述した従来の液晶基板の製
造方法の一例について説明すも第3は 第4図は従来の
液晶基板の製造方法によってプレスされたカラーフィル
タ基板及びプレスを行なう製造装置の断面図であも 第
3図において30はカラーフィルタ基板、 20a、 
20b、20cはそれぞれ赤 青、緑のカラーフィルタ
である。 22は平滑用樹脂であり、カラーフィルタ基
板上に塗布すム 21は押圧用基板であり、平滑用樹脂
22塗布面を押圧によってプレスする。
Therefore, in the case of color filter substrates, the color filter is manufactured by applying electron beam curing or ultraviolet curing resin to the surface of the color filter substrate, pressing the resin-coated surface with a polished glass substrate, and transferring the polished surface of the polished glass to the resin surface. A smooth layer was formed on the surface of the substrate.An example of the above-mentioned conventional method for manufacturing a liquid crystal substrate will be explained below. This is a cross-sectional view of a color filter substrate and a manufacturing device for pressing. In FIG. 3, 30 is a color filter substrate, 20a,
20b and 20c are red, blue, and green color filters, respectively. Reference numeral 22 denotes a smoothing resin, which is applied onto the color filter substrate. Reference numeral 21 denotes a pressing substrate, which presses the surface to which the smoothing resin 22 is applied.

押圧の工程については第4図に示す。第4図において、
 1はプレス槽であり、カラーフィルタ基板30及び押
圧用基板21を設置する槽である。 2は押圧槽であり
、 3はテーブルである。4、6は押圧槽2への吸気孔
 及び排気孔であり、 5、7はプレス槽1への吸気孔
 及び排気孔である。 8は押圧用のゴムシート、 1
0は押圧用基板21を支持する爪であも 以上のように構成された液晶基板の製造方法の一例につ
いて、以下その動作を説明すもまず、平滑用樹脂22を
カラーフィルタ基板30上に塗布し テーブル3上にセ
ットする。次に爪10上に押圧用基板21をセットする
。次にブレス槽重、押圧槽2を真空状態にした後、押圧
槽Iへの吸気孔4から吸気し プレス槽1と押圧槽2に
圧力差を与えることによって、押圧用のゴムシート8が
押圧用基板21を押圧し 平滑用樹脂22を順次プレス
していく。この除重1oは順次下降していき、押圧終了
後テーブル上面より下に下が4 プレス終了後、カラー
フィルタ基板3oと押圧用基板2Iが密着した状態で平
滑用樹脂22を硬化させ、押圧用基板21を離型し カ
ラーフィルタ基板30上に平滑層を形成すも 発明が解決しようとする課題 しかしながら上記のような構成で(よ 第5図(a)に
示すように押圧槽2への吸気孔4からの吸気流入量が一
定になら咀 押圧用基板21への押圧力となるプレス槽
1と押圧槽2の2槽間の圧力差が滑らかに増加せず、従
って第5図(b)に示すように押圧用基板21による平
滑用樹脂22のプレスの進行が停止もしくは減速し 第
6図に示すようく ゆっくりと密着が行なわれた部分A
と急に密着が行なわれた部分Bとの間にな平滑用樹脂2
2の押し広げが不均一な部分4oが生よりラーフィルタ
基板30上に第7図に示すような魔鏡の原理を応用した
目視検査装置でみられる表面凹凸が生じるという課題を
有してい九本発明は上記課題を鑑み押圧用基板2Iによ
る平滑用樹脂22のプレスを停止もしくは減速すること
なく滑らかに進行させ、魔鏡の原理を応用した目視検査
装置でみられるような表面凹凸かない平滑な樹脂層を形
成できる液晶基板の製造方法を提供するものである。
The pressing process is shown in FIG. In Figure 4,
Reference numeral 1 denotes a press tank, in which the color filter substrate 30 and the pressing substrate 21 are installed. 2 is a pressure tank, and 3 is a table. 4 and 6 are intake holes and exhaust holes for the press tank 2, and 5 and 7 are intake holes and exhaust holes for the press tank 1. 8 is a rubber sheet for pressing, 1
0 is a claw that supports the pressing substrate 21 An example of the method for manufacturing the liquid crystal substrate configured as described above will be described below. First, smoothing resin 22 is applied onto the color filter substrate 30. Set it on table 3. Next, the pressing substrate 21 is set on the claw 10. Next, after evacuating the press tank 2 and the press tank 2, air is taken in from the air intake hole 4 to the press tank I. By applying a pressure difference between the press tank 1 and the press tank 2, the rubber sheet 8 for pressing is pressed. The smoothing resin 22 is sequentially pressed by pressing the base plate 21. This unloading 1o is lowered one by one until it is below the top surface of the table. Although the substrate 21 is released from the mold and a smooth layer is formed on the color filter substrate 30, the problem to be solved by the invention is, however, with the above configuration (as shown in FIG. If the intake air inflow rate from the hole 4 is constant, the pressure difference between the two tanks, press tank 1 and press tank 2, which is the pressing force against the press board 21, will not increase smoothly, and therefore, as shown in FIG. 5(b). As shown in FIG. 6, the progress of pressing the smoothing resin 22 by the pressing substrate 21 is stopped or decelerated, and as shown in FIG.
A smoothing resin 2 is applied between
The non-uniformly stretched portion 4o of 2 has the problem that surface irregularities that can be seen with a visual inspection device applying the principle of a magic mirror as shown in FIG. In view of the above-mentioned problems, the present invention allows the pressing of the smoothing resin 22 by the pressing substrate 2I to proceed smoothly without stopping or slowing down. The present invention provides a method for manufacturing a liquid crystal substrate on which a resin layer can be formed.

課題を解決するための手段 上記課題を解決するために本発明の液晶基板の製造方法
は 平滑用樹脂22のプレスの際に押圧槽2への吸気流
量を制御することにより、押圧用基板21への押圧力と
なるプレス槽1と押圧槽2の2槽間の圧力差を滑らかに
増加させ、押圧用基板21による平滑用樹脂22のプレ
スを停止もしくは減速することなく滑らかに進行させる
ことにより、液晶基板上に平滑層を形成する構成を備え
たものであム 作用 本発明は上記した構成によって、平滑用樹脂22のプレ
スの際へ 押圧力が滑らかに増加し 押圧用基板21に
よる平滑用樹脂22のプレスを停止もしくは減速するこ
となく滑らかに進行させることにより、魔鏡の原理を応
用した目視検査装置でみられるような表面凹凸のない平
滑層を形成できることになも 実施例 以下本発明の一実施例について、図面を参照しながら説
明すも 第1図は本発明の実施例における液晶基板の製造方法の
一工程を示すものであも 第1図において、 11は真
空槽で隔壁としての8のゴムシートにより押圧槽2とブ
レス槽1の2槽に分割されていム 3はテーブルであり
平滑用樹脂22を塗布したカラーフィルタ基板30を設
置し その上部で押圧用基板21を爪10によって支持
すa さらに15は流量制御弁であり、押圧槽2に流入
する気体の量を制御できも 以上のように構成された液晶基板の製造方法について以
下第1図を用いてその動作を説明すもまず紫外線硬化型
の平滑用樹脂22を塗布したカラーフィルタ基板30を
テーブル3にセットし押圧槽2を排気することによりゴ
ムシート8が押圧槽2の側に膨らむ。押圧槽2の圧力が
0.5Torrになると押圧槽2の排気を停止し 次に
プレス槽1の排気を行なう。この時、押圧槽2とブレス
槽lの圧力差の減少により、押圧槽2の側に膨らんでい
たゴムシート8はブレス槽1の側に膨ら仏 ブレス槽1
の気圧が1.0Torrでブレス槽1の排気を停止し 
流量制御弁15を開き、11008CCの一定流量の気
体を押圧槽2へ流入すム この時流入量は 第2図(a
)に示すように一定であるか社 押圧槽2とブレス槽1
の圧力差は滑らかに増加し 第2図(b)に示すように
押圧用基板21への押圧力は滑らかに増加すム従って押
圧用基板21による平滑用樹脂22のプレス1よ 第2
図(c)に示すように停止もしくは減速することなく滑
らかに進行すa ブレス終了機 押圧用基板21と平滑
用樹脂22が密着した状態で平滑用樹脂22を硬化させ
た樵 押圧用基板21を離型することにより、カラーフ
ィルタ30上に平滑層を形成することができる。
Means for Solving the Problems In order to solve the above problems, the method for manufacturing a liquid crystal substrate of the present invention is as follows: When pressing the smoothing resin 22, by controlling the flow rate of air sucked into the pressing tank 2, By smoothly increasing the pressure difference between the two tanks, press tank 1 and press tank 2, which is the pressing force of The present invention has a configuration for forming a smooth layer on a liquid crystal substrate.The present invention has the above-described configuration, so that when pressing the smoothing resin 22, the pressing force increases smoothly, and the smoothing resin by the pressing substrate 21 By smoothly advancing the press of 22 without stopping or slowing down, it is possible to form a smooth layer with no surface irregularities as seen with a visual inspection device that applies the principle of a magic mirror. One embodiment will be described with reference to the drawings, and FIG. 1 shows one step of the method for manufacturing a liquid crystal substrate in the embodiment of the present invention. In FIG. It is divided into two tanks, a pressure tank 2 and a breath tank 1, by a rubber sheet 8. 3 is a table, and a color filter substrate 30 coated with a smoothing resin 22 is installed, and a pressure substrate 21 is held on top of the table by a nail 10. Further, reference numeral 15 denotes a flow rate control valve, which can control the amount of gas flowing into the pressure tank 2. First, a color filter substrate 30 coated with an ultraviolet curable smoothing resin 22 is set on the table 3, and the pressure tank 2 is evacuated, so that the rubber sheet 8 is expanded toward the pressure tank 2. When the pressure in the press tank 2 reaches 0.5 Torr, the exhaust of the press tank 2 is stopped, and then the press tank 1 is evacuated. At this time, due to the decrease in the pressure difference between the pressure tank 2 and the breath tank 1, the rubber sheet 8 that had swelled toward the pressure tank 2 side swells toward the breath tank 1 side.
Stop exhausting the breath tank 1 when the atmospheric pressure is 1.0 Torr.
The flow control valve 15 is opened and a constant flow rate of 11008 cc of gas flows into the pressure tank 2. At this time, the inflow amount is as shown in Fig. 2 (a
) is constant as shown in Figure 2. Pressure tank 2 and breath tank 1
The pressure difference increases smoothly, and as shown in FIG. 2(b), the pressing force on the pressing substrate 21 increases smoothly.
As shown in Figure (c), the machine advances smoothly without stopping or decelerating.a Brace finishing machine A woodcutter who hardens the smoothing resin 22 with the pressing substrate 21 and the smoothing resin 22 in close contact with each other The pressing substrate 21 By releasing the mold, a smooth layer can be formed on the color filter 30.

発明の効果 以上のように本発明は滑らかに押圧力が増加する機構を
設けることにより、押圧用基板2Iによる平滑用樹脂2
2のプレスを停止もしくは減速することなく滑らかに進
行させることにより、魔鏡の原理を応用した目視検査装
置でみられるような表面凹凸がない平滑層を形成するこ
とができも
Effects of the Invention As described above, the present invention provides a mechanism for smoothly increasing the pressing force, so that the smoothing resin 2 is smoothed by the pressing substrate 2I.
By allowing the press in step 2 to proceed smoothly without stopping or slowing down, it is possible to form a smooth layer without surface irregularities that can be seen with visual inspection equipment that applies the magic mirror principle.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例における液晶基板の製造装置の
要部断面医 第2図(a)、 (b)、 (C)はそれ
ぞれ同実施例における気体流入1 押圧力 プレス進行
速度の特性医 第3図は従来例の製造方法で製造した液
晶基板の断面医 第4図は従来例の液晶基板の製造装置
の要部断面医 第5図(a)、第5図(b)はそれぞれ
従来例における気体流入量 プレス進行速度の特性@ 
第6図は従来例における表面凹凸の発生メカニズムを示
す基板の断面医 第7図は表面に凹凸が生じた従来例の
カラーフィルタ基板の正面図であムト・・ブレス恩 2
・・・押圧槽 3・・・テーブル 8・・・ゴムシート 10・・・爪 11・・・真空層 15・・・流量制御弁 20a、  20b、  20cmカラーフィルター2
1・・・押圧用基板 22・・・平滑用樹脂 30・・・カラーフィルタ基板 40・・・表面凹凸 代理人の氏名 弁理士 粟野重孝 ほか1名第 図 第 図 第 図 (α) 第 7 図 (bン 4θ 表面凹凸
FIG. 1 is a cross-sectional view of the main parts of a liquid crystal substrate manufacturing apparatus in an embodiment of the present invention. FIGS. Fig. 3 shows a cross-section of a liquid crystal substrate manufactured by a conventional manufacturing method. Fig. 4 shows a cross-section of a main part of a conventional liquid crystal substrate manufacturing apparatus. Gas inflow amount in conventional example Characteristics of press advancement speed @
Figure 6 is a cross-sectional view of a conventional substrate showing the mechanism by which surface irregularities occur. Figure 7 is a front view of a conventional color filter substrate with irregularities on its surface.
... Pressure tank 3 ... Table 8 ... Rubber sheet 10 ... Claw 11 ... Vacuum layer 15 ... Flow rate control valve 20a, 20b, 20cm color filter 2
1...Press substrate 22...Smoothing resin 30...Color filter substrate 40...Surface unevenness Name of agent Patent attorney Shigetaka Awano and one other person Figure Figure Figure Figure (α) Figure 7 (Bn4θ surface unevenness

Claims (4)

【特許請求の範囲】[Claims] (1)液晶基板上に、平滑用樹脂となる電子線または紫
外線硬化樹脂を塗布した後、隔壁によって2槽に分離さ
せた真空槽内で、押圧用基板への押圧力となる前記2槽
間の圧力差を滑らかに増加させながら、前記押圧力によ
り押圧用基板を前記液晶基板の端部から対抗する端部も
しくは中央から両端部にかけて押圧し、前記押圧用基板
による樹脂塗布面のプレスを停止もしくは減速すること
なく滑らかに進行させた後、電子線もしくは紫外線照射
により前記平滑用樹脂を硬化後、前記押圧用基板を離型
することにより、前記液晶基板表面に前記平滑用樹脂か
らなる平滑層を形成することを特徴とする液晶基板の製
造方法。
(1) After coating the liquid crystal substrate with an electron beam or ultraviolet curing resin that will serve as a smoothing resin, in a vacuum chamber separated into two tanks by a partition wall, between the two tanks that will act as a pressing force on the pressing substrate. While smoothly increasing the pressure difference, the pressing substrate is pressed from one end of the liquid crystal substrate to the opposite end or from the center to both ends, and the pressing substrate stops pressing the resin-coated surface. Alternatively, after allowing the smoothing to proceed smoothly without deceleration, the smoothing resin is cured by electron beam or ultraviolet irradiation, and the pressing substrate is released from the mold, thereby forming a smoothing layer made of the smoothing resin on the surface of the liquid crystal substrate. A method for manufacturing a liquid crystal substrate, the method comprising: forming a liquid crystal substrate;
(2)液晶基板がカラーフィルタ基板であることを特徴
とする請求項(1)記載の液晶基板の製造方法。
(2) The method for manufacturing a liquid crystal substrate according to claim (1), wherein the liquid crystal substrate is a color filter substrate.
(3)液晶基板上に塗布された樹脂表面を押圧用基板で
押圧することにより、前記液晶基板上に前記塗布樹脂か
らなる平滑面を形成する液晶基板の製造装置であって、
前記押圧用基板を保持する機構と、前記押圧用基板を上
部から押圧する機構と、前記押圧用基板が押圧のために
下降する機構と、前記押圧用基板の押圧力が滑らかに増
加する機構を有する液晶基板の製造装置。
(3) A liquid crystal substrate manufacturing apparatus that forms a smooth surface made of the coating resin on the liquid crystal substrate by pressing the resin surface coated on the liquid crystal substrate with a pressing substrate,
A mechanism for holding the pressing substrate, a mechanism for pressing the pressing substrate from above, a mechanism for lowering the pressing substrate for pressing, and a mechanism for smoothly increasing the pressing force of the pressing substrate. A manufacturing device for liquid crystal substrates.
(4)押圧用基板の押圧力が滑らかに増加する機構とし
て、前記押圧用基板への押圧面がゴムシートで構成され
た部屋を設け、前記部屋内に一定流量の気体を送ること
により、前記部屋の内外圧力差が滑らかに増加する機構
を有することを特徴とする請求項(3)記載の液晶基板
の製造装置。
(4) As a mechanism for smoothly increasing the pressing force of the pressing substrate, a chamber is provided in which the pressing surface to the pressing substrate is made of a rubber sheet, and a constant flow rate of gas is sent into the chamber. 4. The liquid crystal substrate manufacturing apparatus according to claim 3, further comprising a mechanism for smoothly increasing the pressure difference between the inside and outside of the chamber.
JP2196613A 1990-07-24 1990-07-24 Manufacture of liquid crystal base plate and device for manufacturing the same Pending JPH0481717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2196613A JPH0481717A (en) 1990-07-24 1990-07-24 Manufacture of liquid crystal base plate and device for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2196613A JPH0481717A (en) 1990-07-24 1990-07-24 Manufacture of liquid crystal base plate and device for manufacturing the same

Publications (1)

Publication Number Publication Date
JPH0481717A true JPH0481717A (en) 1992-03-16

Family

ID=16360672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2196613A Pending JPH0481717A (en) 1990-07-24 1990-07-24 Manufacture of liquid crystal base plate and device for manufacturing the same

Country Status (1)

Country Link
JP (1) JPH0481717A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102029771A (en) * 2010-10-28 2011-04-27 苏州凯蒂亚半导体制造设备有限公司 Contraposition platform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102029771A (en) * 2010-10-28 2011-04-27 苏州凯蒂亚半导体制造设备有限公司 Contraposition platform

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