JPH0274750U - - Google Patents
Info
- Publication number
- JPH0274750U JPH0274750U JP15407988U JP15407988U JPH0274750U JP H0274750 U JPH0274750 U JP H0274750U JP 15407988 U JP15407988 U JP 15407988U JP 15407988 U JP15407988 U JP 15407988U JP H0274750 U JPH0274750 U JP H0274750U
- Authority
- JP
- Japan
- Prior art keywords
- plasma chamber
- dielectric
- microwave
- microwave inlet
- chamber wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15407988U JPH0274750U (es) | 1988-11-26 | 1988-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15407988U JPH0274750U (es) | 1988-11-26 | 1988-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274750U true JPH0274750U (es) | 1990-06-07 |
Family
ID=31430490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15407988U Pending JPH0274750U (es) | 1988-11-26 | 1988-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274750U (es) |
-
1988
- 1988-11-26 JP JP15407988U patent/JPH0274750U/ja active Pending