JPH0274671U - - Google Patents
Info
- Publication number
- JPH0274671U JPH0274671U JP15533788U JP15533788U JPH0274671U JP H0274671 U JPH0274671 U JP H0274671U JP 15533788 U JP15533788 U JP 15533788U JP 15533788 U JP15533788 U JP 15533788U JP H0274671 U JPH0274671 U JP H0274671U
- Authority
- JP
- Japan
- Prior art keywords
- powder
- vacuum valve
- casing
- passage
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 claims description 9
- 238000002955 isolation Methods 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Details Of Valves (AREA)
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15533788U JPH0274671U (de) | 1988-11-28 | 1988-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15533788U JPH0274671U (de) | 1988-11-28 | 1988-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274671U true JPH0274671U (de) | 1990-06-07 |
Family
ID=31432876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15533788U Pending JPH0274671U (de) | 1988-11-28 | 1988-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274671U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007066537A1 (ja) * | 2005-12-05 | 2007-06-14 | Ulvac, Inc. | 真空装置用仕切りバルブ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918210U (ja) * | 1982-07-26 | 1984-02-03 | 大阪瓦斯株式会社 | 暖房装置 |
-
1988
- 1988-11-28 JP JP15533788U patent/JPH0274671U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918210U (ja) * | 1982-07-26 | 1984-02-03 | 大阪瓦斯株式会社 | 暖房装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007066537A1 (ja) * | 2005-12-05 | 2007-06-14 | Ulvac, Inc. | 真空装置用仕切りバルブ |
| JPWO2007066537A1 (ja) * | 2005-12-05 | 2009-05-14 | 株式会社アルバック | 真空装置用仕切りバルブ |