JPH0274361U - - Google Patents
Info
- Publication number
- JPH0274361U JPH0274361U JP15258788U JP15258788U JPH0274361U JP H0274361 U JPH0274361 U JP H0274361U JP 15258788 U JP15258788 U JP 15258788U JP 15258788 U JP15258788 U JP 15258788U JP H0274361 U JPH0274361 U JP H0274361U
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- back side
- sno
- target
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 5
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15258788U JPH0274361U (de) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15258788U JPH0274361U (de) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274361U true JPH0274361U (de) | 1990-06-06 |
Family
ID=31427650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15258788U Pending JPH0274361U (de) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274361U (de) |
-
1988
- 1988-11-25 JP JP15258788U patent/JPH0274361U/ja active Pending
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