JPS62128630U - - Google Patents
Info
- Publication number
- JPS62128630U JPS62128630U JP1538586U JP1538586U JPS62128630U JP S62128630 U JPS62128630 U JP S62128630U JP 1538586 U JP1538586 U JP 1538586U JP 1538586 U JP1538586 U JP 1538586U JP S62128630 U JPS62128630 U JP S62128630U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- thin film
- amorphous carbon
- carbon thin
- atomic ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1538586U JPS62128630U (de) | 1986-02-05 | 1986-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1538586U JPS62128630U (de) | 1986-02-05 | 1986-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62128630U true JPS62128630U (de) | 1987-08-14 |
Family
ID=30806269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1538586U Pending JPS62128630U (de) | 1986-02-05 | 1986-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128630U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999028961A1 (fr) * | 1997-11-27 | 1999-06-10 | Tokyo Electron Limited | Procede de fabrication de film isolant |
-
1986
- 1986-02-05 JP JP1538586U patent/JPS62128630U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999028961A1 (fr) * | 1997-11-27 | 1999-06-10 | Tokyo Electron Limited | Procede de fabrication de film isolant |
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