JPH0273959A - Movable crucible - Google Patents
Movable crucibleInfo
- Publication number
- JPH0273959A JPH0273959A JP22466688A JP22466688A JPH0273959A JP H0273959 A JPH0273959 A JP H0273959A JP 22466688 A JP22466688 A JP 22466688A JP 22466688 A JP22466688 A JP 22466688A JP H0273959 A JPH0273959 A JP H0273959A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- metal
- coil
- superconductors
- move
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 abstract description 18
- 238000010894 electron beam technology Methods 0.000 abstract description 9
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、金属を溶融するためのルツボに係り。[Detailed description of the invention] [Industrial application field] The present invention relates to a crucible for melting metal.
特に、加熱源が電子ビーム等の外部にあり局部的な加熱
をする場合のルツボに関する。In particular, the present invention relates to a crucible in which the heating source is external, such as an electron beam, and locally heated.
従来の装置は、特開昭６２−１８０７２８号公報に記載
のように、真空容器の外側に設置したコイルによって磁
場を発生し、ルツボ内で溶融した金属の自然対流を制御
しようとするもので、コイルと磁場を必要とする場所と
の距離が大きいため、大きな電源が必要である。しかも
、電子ビームで溶融する部分は局部的であるため、自然
対流が生じないことの方が問題になっている。As described in Japanese Patent Application Laid-Open No. 62-180728, the conventional device generates a magnetic field using a coil installed outside the vacuum container to control the natural convection of the molten metal in the crucible. Because the distance between the coil and the location where the magnetic field is required is large, a large power source is required. Moreover, since the portion melted by the electron beam is localized, the problem is that natural convection does not occur.
一次元方向に拡りのある、湾状の電子ビームにより、金
属を溶融させる場合、電子ビームの着点の金属のみが溶
解、蒸発し、幅の狭い、鋭く深い溝が形成され、ルツボ
に装填した金属の一部分しか溶解、蒸発せず、金属を有
効に蒸発させることができない。この問題を解決する方
法としては。When metal is melted using a curved electron beam that spreads in one dimension, only the metal at the point where the electron beam lands melts and evaporates, forming a narrow, sharp and deep groove, which is then loaded into the crucible. Only a portion of the metal is dissolved and evaporated, making it impossible to evaporate the metal effectively. As a way to solve this problem.
電子ビームを振るか、あるいは、ルツボを左右に移動さ
せる方法が考えられる。前者の方法は磁場を変動させて
達成できる。しかし、ルツボを装備する真空容器が大き
く、真空容器の外側から磁場を発生させるため、その電
源が膨大となるのになるという欠点とともに、真空容器
内の複雑な構造物によって磁場の分布が変形し、電子ビ
ームの軌道を乱す危険性が大きい。Possible methods include shaking the electron beam or moving the crucible left and right. The former method can be achieved by varying the magnetic field. However, the vacuum vessel in which the crucible is equipped is large, and the magnetic field is generated from outside the vacuum vessel, which requires an enormous amount of power.In addition, the complicated structure inside the vacuum vessel distorts the distribution of the magnetic field. , there is a great risk of disturbing the trajectory of the electron beam.
本発明の目的は、ルツボを浮上させ、電磁力によって左
右に移動させることによって、電子ビムによる金属の溶
融領域を拡大させ、金属の利用率の高いルツボを提供す
ることにある。An object of the present invention is to levitate the crucible and move it left and right by electromagnetic force, thereby expanding the melting area of metal by an electron beam and providing a crucible with a high metal utilization rate.
上記目的は、複数の超電導体、又は、永久磁石を底に設
置したルツボと、それに対面した位置にコイルを設置す
ることによって達成される。すなわち、コイルを励磁す
ることによって、マイスナー効果、あるいは、電磁力に
よりルツボを浮上させ、複数のコイルに流す電流を時間
的に変動させることによって横方向の駆動力を発生し、
ルツボを左右に移動させる。The above object is achieved by installing a crucible with a plurality of superconductors or permanent magnets installed at the bottom and a coil facing the crucible. That is, by exciting the coil, the crucible is levitated by the Meissner effect or electromagnetic force, and by temporally varying the current flowing through the multiple coils, a lateral driving force is generated.
Move the crucible left and right.
超電導体あるいは永久磁石と励磁したコイルとはマイス
ナー効果、又は、電磁力による反撥力が発生し、ルツボ
が浮上する。複数のコイルに流す電流値を適切に制御す
ることによって、ルツボの底に設置した超電導体、ある
いは、永久磁石に生じる電磁力の合力成分として、上下
方向成分以外に左右方向成分を有限の値にすることがで
きる。The Meissner effect or electromagnetic force generates a repulsive force between the superconductor or permanent magnet and the excited coil, causing the crucible to levitate. By appropriately controlling the current value flowing through multiple coils, the horizontal component in addition to the vertical component can be reduced to a finite value as the resultant component of the electromagnetic force generated in the superconductor installed at the bottom of the crucible or the permanent magnet. can do.
この左右方向成分の力によってルツボを左右に移動させ
る。The crucible is moved left and right by this left-right component force.
以下、本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
第１図では、ルツボ１内に溶融すべき金属２を装着し、
電子ビーム３を着点４に入射することによって金属を溶
融するルツボに、超電導体、又は、永久磁石５と、それ
に対面するコイル６を構成している。複数のコイル６に
流す電流値を適切に制御することによって、超電導体あ
るいは永久磁石５に発生する電磁力を、上下方向成分と
左右方向成分にすることができる。これにより、ルツボ
１を浮上させるとともに左右に移動させることができる
。In FIG. 1, a metal 2 to be melted is placed in a crucible 1,
A superconductor or permanent magnet 5 and a coil 6 facing the crucible are arranged in a crucible that melts metal by injecting an electron beam 3 into a landing point 4. By appropriately controlling the value of the current flowing through the plurality of coils 6, the electromagnetic force generated in the superconductor or permanent magnet 5 can be divided into a vertical component and a horizontal component. Thereby, the crucible 1 can be floated and moved from side to side.
本発明によれば金属の溶融領域が拡大し、金属の利用率
が高まる。According to the present invention, the melting area of the metal is expanded and the utilization rate of the metal is increased.
第１図は本発明の一実施例の斜視図である。 ￥’！ 一ノ FIG. 1 is a perspective view of an embodiment of the present invention. ¥’! Ichino
Claims (1)
ツボと、それに対面した位置にコイルを設置し、前記コ
イルを励磁することによつてマイスナー効果、あるいは
、電磁力により、前記ルツボを浮上させ、前記コイルの
電流の制御により前記ルツボを左右に移動させることを
特徴とする移動型ルツボ。1. A crucible with a plurality of superconductors or permanent magnets installed at the bottom and a coil facing it, and by exciting the coil, the crucible is activated by the Meissner effect or electromagnetic force. A movable crucible characterized in that the crucible is levitated and moved from side to side by controlling the current of the coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22466688A JPH0273959A (en) | 1988-09-09 | 1988-09-09 | Movable crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22466688A JPH0273959A (en) | 1988-09-09 | 1988-09-09 | Movable crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273959A true JPH0273959A (en) | 1990-03-13 |
Family
ID=16817313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22466688A Pending JPH0273959A (en) | 1988-09-09 | 1988-09-09 | Movable crucible |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273959A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104451585A (en) * | 2013-09-12 | 2015-03-25 | 三星显示有限公司 | Deposition source transporting apparatus |
| CN104499043A (en) * | 2014-12-15 | 2015-04-08 | 江苏苏博瑞光电设备科技有限公司 | 83kg-grade sapphire crystal furnace crystal-growing structure and crystal-growing method |
-
1988
- 1988-09-09 JP JP22466688A patent/JPH0273959A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104451585A (en) * | 2013-09-12 | 2015-03-25 | 三星显示有限公司 | Deposition source transporting apparatus |
| CN104499043A (en) * | 2014-12-15 | 2015-04-08 | 江苏苏博瑞光电设备科技有限公司 | 83kg-grade sapphire crystal furnace crystal-growing structure and crystal-growing method |
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