JPH027268Y2 - - Google Patents

Info

Publication number
JPH027268Y2
JPH027268Y2 JP19633185U JP19633185U JPH027268Y2 JP H027268 Y2 JPH027268 Y2 JP H027268Y2 JP 19633185 U JP19633185 U JP 19633185U JP 19633185 U JP19633185 U JP 19633185U JP H027268 Y2 JPH027268 Y2 JP H027268Y2
Authority
JP
Japan
Prior art keywords
vacuum pump
stage
passage
stage side
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19633185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62102864U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19633185U priority Critical patent/JPH027268Y2/ja
Publication of JPS62102864U publication Critical patent/JPS62102864U/ja
Application granted granted Critical
Publication of JPH027268Y2 publication Critical patent/JPH027268Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP19633185U 1985-12-20 1985-12-20 Expired JPH027268Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19633185U JPH027268Y2 (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19633185U JPH027268Y2 (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Publications (2)

Publication Number Publication Date
JPS62102864U JPS62102864U (enrdf_load_stackoverflow) 1987-06-30
JPH027268Y2 true JPH027268Y2 (enrdf_load_stackoverflow) 1990-02-21

Family

ID=31155056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19633185U Expired JPH027268Y2 (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Country Status (1)

Country Link
JP (1) JPH027268Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62102864U (enrdf_load_stackoverflow) 1987-06-30

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