JPH027046B2 - - Google Patents

Info

Publication number
JPH027046B2
JPH027046B2 JP47038096A JP3809672A JPH027046B2 JP H027046 B2 JPH027046 B2 JP H027046B2 JP 47038096 A JP47038096 A JP 47038096A JP 3809672 A JP3809672 A JP 3809672A JP H027046 B2 JPH027046 B2 JP H027046B2
Authority
JP
Japan
Prior art keywords
pattern
focus detection
light
photosensitive surface
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP47038096A
Other languages
English (en)
Japanese (ja)
Other versions
JPS48104526A (en, 2012
Inventor
Junichi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP47038096A priority Critical patent/JPH027046B2/ja
Priority to US304841A priority patent/US3871764A/en
Publication of JPS48104526A publication Critical patent/JPS48104526A/ja
Publication of JPH027046B2 publication Critical patent/JPH027046B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Automatic Focus Adjustment (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP47038096A 1972-04-05 1972-04-13 Expired - Lifetime JPH027046B2 (en, 2012)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47038096A JPH027046B2 (en, 2012) 1972-04-13 1972-04-13
US304841A US3871764A (en) 1972-04-05 1972-11-08 Pattern generator apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47038096A JPH027046B2 (en, 2012) 1972-04-13 1972-04-13

Publications (2)

Publication Number Publication Date
JPS48104526A JPS48104526A (en, 2012) 1973-12-27
JPH027046B2 true JPH027046B2 (en, 2012) 1990-02-15

Family

ID=12515931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47038096A Expired - Lifetime JPH027046B2 (en, 2012) 1972-04-05 1972-04-13

Country Status (1)

Country Link
JP (1) JPH027046B2 (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164514A (ja) * 1983-03-10 1984-09-17 Nippon Kogaku Kk <Nikon> 焦点合わせ装置
JPS60257305A (ja) * 1984-06-02 1985-12-19 Fuji Giken Kk イメ−ジセンサ
JP2637714B2 (ja) * 1995-07-28 1997-08-06 キヤノン株式会社 投影露光装置

Also Published As

Publication number Publication date
JPS48104526A (en, 2012) 1973-12-27

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