JPH0270440U - - Google Patents

Info

Publication number
JPH0270440U
JPH0270440U JP15026288U JP15026288U JPH0270440U JP H0270440 U JPH0270440 U JP H0270440U JP 15026288 U JP15026288 U JP 15026288U JP 15026288 U JP15026288 U JP 15026288U JP H0270440 U JPH0270440 U JP H0270440U
Authority
JP
Japan
Prior art keywords
wiring board
electrode pads
measuring device
wiring
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15026288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15026288U priority Critical patent/JPH0270440U/ja
Publication of JPH0270440U publication Critical patent/JPH0270440U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案の半導体装置の測定装置の平面
図、第２図は第１図のＡ―Ａ′線における断面図
、第３図は従来の半導体装置の測定装置の平面図
、第４図は第３図のＡ―Ａ′線における断面図で
ある。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 配線基板上に、半導体素子の電極パツドの
    配置に対応してこの電極パツドの各々に同時に衝
    接する接触針と、 この接触針が前記電極パツドに衝接して測定回
    路を形成する回路要素とを備えた半導体装置の測
    定装置に於て、 前記配線基板は絶縁性の第１の配線基板、導電
    性を有する第２の配線基板、絶縁性の第３の配線
    基板が順次積層固着され、前記第２の配線基板が
    他の基板より剛性が大きいことを特徴とする半導
    体装置の測定装置。 (2) 前記第１の配線基板および第３の配線基板
    上に設けられた接地用の配線パターンの少なくと
    も一方が前記第２の配線基板と電気的に接続され
    ることを特徴とする請求項第１項記載の半導体装
    置の測定装置。
JP15026288U 1988-11-17 1988-11-17 Pending JPH0270440U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15026288U JPH0270440U (ja) 1988-11-17 1988-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15026288U JPH0270440U (ja) 1988-11-17 1988-11-17

Publications (1)

Publication Number Publication Date
JPH0270440U true JPH0270440U (ja) 1990-05-29

Family

ID=31423249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15026288U Pending JPH0270440U (ja) 1988-11-17 1988-11-17

Country Status (1)

Country Link
JP (1) JPH0270440U (ja)

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