JPH0266477A - Testing device for ic chip - Google Patents

Abstract

PURPOSE:To check the operation of a logical circuit in an IC chip to be tested within a short time by inputting an irradiation point control signal from a circuit pattern and a layout pattern stored in an engineering work station (EWS) to a stage driving part of an optical probe and projecting a laser beam to a prescribed position. CONSTITUTION:The testing device is provided with the optical probe 1 obtained by adding the stage driving part 4a to an optical probe 1b and the EWS 5 consisting of a display part 5a for previously storing the layout pattern 8 of the IC chip 3 to be tested and the circuit patterns 7 and displaying these patterns on the screen and so on. When a touch pen 6 contacts with the circuit point P of the pattern 7 to be tested, an irradiation point control signal Sp to be the position/movement information of the layout pattern of the IC chip 3 to be tested is transmitted to the stage driving part 4a of the optical probe 1 through a network l and the stage 4 and the IC chip 3 are moved, the irradiation point Q of the IC chip 3 is irradiated by laser beams L, and an optical signal is inputted to the IC chip. When the irradiation point Q is excited, a latch abnormal phenomenon e.g. is generated and an abnormal waveform is detected on a CRT 9, a defect is decided.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to an IC chip testing device.

[Conventional technology]

Traditionally, in order to make contact to send input signals to the surface of an IC chip on a semiconductor wafer, there have been many probers using deep needles and laser probers using light, and the layout pattern of the IC chip is visually observed with an objective lens. While doing so, the stage was manually moved to determine the irradiation point.

FIG. 2 is a schematic diagram of an example of a conventional IC chip testing device.

The optical prober 1b magnifies and visually observes the layout pattern of the IC chip 3 under test on the stage 4 using the objective lens 1a.
Operate the X and Y knobs <10 to irradiate a predetermined irradiation point Q with laser light, connect the CRT 9 to the terminal To, detect the characteristic waveform of the circuit, and test the quality of the irradiation point Q.

[Problem that the invention seeks to solve]

When performing failure analysis of the IC chip under test, the conventional IC chip testing equipment described above examines the logic of the defective location on the logic circuit diagram, examines the position where the logic is placed on the layout pattern diagram, and checks the logic. Since the output waveform characteristics of the circuit are observed by shining a laser beam on the irradiation point corresponding to the layout pattern of the IC chip mounted on the stage of the prober, the irradiation point of the laser beam can always be visually checked with the layout pattern diagram. The disadvantage is that it takes a lot of time to search and analyze.

SUMMARY OF THE INVENTION An object of the present invention is to provide an IC chip testing device that allows easy confirmation of circuit operation at a laser beam irradiation point on an IC chip under test.

[Means to solve the problem]

The IC chip testing apparatus of the present invention inputs an irradiation point control signal and irradiates a predetermined irradiation point of an IC chip under test on a semiconductor wafer mounted on a stage moved by a drive unit with a laser beam. an optical blower for outputting a circuit signal of the IC chip under test to a characteristic detector; and a display section for storing a layout pattern and a circuit pattern of the IC chip under test and displaying the circuit pattern; and an engineering workstation that supplies the irradiation point control signal corresponding to the predetermined irradiation point of the layout pattern corresponding to a fixed point to the drive unit via wiring.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a schematic diagram of an embodiment of the present invention.

The optical prober 1 includes the conventional optical prober lb shown in FIG. 2 with a stage drive section 4a added thereto, and an IC under test.
It has a display section 5a that stores the layout pattern 8 and circuit pattern 7 of the chip 3 in advance and displays the circuit pattern 7 on the screen, and corresponds to the portion to be tested in the layout pattern 8 corresponding to the circuit point P to be tested in the circuit pattern 7. An engineering workstation (hereinafter EW
I have a meeting with 5 (named S).

When you touch the circuit pattern 70 circuit point P to be tested with the touch pen 6, the irradiation point control signal SP, which is the position/movement information of the layout pattern of the IC chip 3 to be tested, is sent to the network! The laser beam is transmitted to the stage drive unit 4a of the optical prober 1 through the laser beam, and the stage 4 and IC chip 3 move to apply laser light to the irradiation point Q of the IC chip 3, thereby inputting the optical signal into the IC chip.

If the irradiation point Q is excited by light and, for example, a latch abnormality phenomenon occurs and abnormal waveforms are detected at CB and T9, it is determined to be defective.

〔Effect of the invention〕

As explained above, the present invention connects an EWS and an optical prober through a network, and inputs an irradiation point control signal to the stage drive section of the optical blower based on the relationship between the circuit pattern and layout pattern stored in advance in the EWS to emit laser light. Since the light is emitted at a predetermined location, the operation of the logic circuit of the IC chip under test can be confirmed in a short time.

FIG. 1 is a schematic diagram of an example of a conventional IC chip testing device.

1... Optical prober, 2... Laser emitter, 3... IC chip under test, 4... Stage, 4a... Stage drive unit , 5...
・Engineering Works Duration, 5a...
・・Display section, 6・・−・Touch pen, 7・・・・・
・Circuit pattern, 8...Layout pattern,
9...CR'l'', L...Laser light,
P...Circuit point, Q...Irradiation point, BP.
...Irradiation point control signal.

Agent: Patent Attorney Susumu Uchihara

[Brief explanation of the drawing]

Claims (1)

[Claims] A characteristic detector inputs an irradiation point control signal, irradiates a predetermined irradiation point of an IC chip under test on a semiconductor wafer mounted on a stage moved by a drive unit with a laser beam, and detects the circuit signal of the IC chip under test. an optical prober that outputs to
The irradiation point corresponds to the predetermined irradiation point of the layout pattern, which has a display section that stores the layout pattern and circuit pattern of the IC chip under test and displays the circuit pattern, and corresponds to the test point of the circuit pattern. an engineering workstation that supplies a control signal to the drive unit via wiring.
Chip testing equipment.