JPH0266163A - Heating filament for vacuum deposition - Google Patents
Heating filament for vacuum depositionInfo
- Publication number
- JPH0266163A JPH0266163A JP21595188A JP21595188A JPH0266163A JP H0266163 A JPH0266163 A JP H0266163A JP 21595188 A JP21595188 A JP 21595188A JP 21595188 A JP21595188 A JP 21595188A JP H0266163 A JPH0266163 A JP H0266163A
- Authority
- JP
- Japan
- Prior art keywords
- filament
- grooves
- filaments
- vacuum deposition
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 6
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、真空蒸着装置に使用する蒸着物加熱用のフィ
ラメントに関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a filament for heating a deposit used in a vacuum deposition apparatus.
（従来技術とその課題）
真空蒸着においては、抵抗加熱用フィラメントにアルミ
ニウムなどの蒸着物を直接取り付けて、フィラメントに
通電して蒸着物を加熱、蒸発させている。(Prior art and its problems) In vacuum evaporation, a vapor deposit of aluminum or the like is directly attached to a resistance heating filament, and the filament is energized to heat and evaporate the vapor deposit.
フィラメントとしては、Ｗ、Ｗ−Ｔｈなどの単線あるい
は撚り合わせ線が用いられているが、フィラメント上で
溶融した蒸着物が滴下してロスを生じたり、他の物に当
たって蒸着対象物上にはね落ちるという問題がある。As the filament, a single wire or a twisted wire such as W or W-Th is used, but the vapor deposited material melted on the filament may drip and cause loss, or it may hit other objects and splash onto the object to be vapor deposited. There is a problem with falling.
これに対して、フィラメントに予め微量の異種金属を蒸
着したり、フィラメント表面を極めて平滑な面に仕上げ
るなどして蒸着物の「濡れ」をよくすることが知られて
いる。しかし前者の方法では、予め蒸着した金属が目的
とする蒸着物と混在するため、高純度の蒸着が必要な用
途には適さず、また後者の方法では、細いフィラメント
を平滑にすることが難しく、小さな凹凸が生じ、余り効
果的でない。On the other hand, it is known to improve the "wetting" of the deposit by pre-depositing a small amount of a different metal onto the filament or by finishing the filament surface to be extremely smooth. However, with the former method, the pre-deposited metal mixes with the target deposit, making it unsuitable for applications that require high-purity deposition, and with the latter method, it is difficult to smooth thin filaments. Small irregularities occur and it is not very effective.
（課紐を解決するための手段）
本発明は、フイ、″；Ａ：。表面に微細な溝をゆ数形成
することにより、蒸着物がフィラメントによく濡れて、
垂れ落ちることがないようにしたものである。(Means for solving the problems) The present invention is characterized by forming fine grooves on the surface of the filament, so that the deposit can be well wetted with the filament.
This is to prevent it from dripping.
以下本発明を図面を参照して詳しく説明する。The present invention will be explained in detail below with reference to the drawings.
第１図は本発明フィラメントの一例の斜視図、第２図は
その一部拡大断面図、第３図は本発明フイラメントの使
用状態を例示する側面図である。FIG. 1 is a perspective view of an example of the filament of the present invention, FIG. 2 is a partially enlarged sectional view thereof, and FIG. 3 is a side view illustrating the use state of the filament of the present invention.
本発明フィラメント１は、その表面に長さ方向の多数の
溝２．２・・・を形成しである。The filament 1 of the present invention has a large number of longitudinal grooves 2.2 formed on its surface.
溝２の幅Ｐは１〜５０μｍ程度、その深さＤは５０μｍ
以下、特に１〜１０μｍ程度の微細なものが好適である
。The width P of the groove 2 is about 1 to 50 μm, and the depth D is 50 μm.
Hereinafter, fine particles of about 1 to 10 μm are particularly suitable.
この渭２は、フィラメント１の長さ方向に沿って、ある
いは長さ方向に対しやや傾斜した方向に形成することが
できる。This arm 2 can be formed along the length direction of the filament 1 or in a direction slightly inclined to the length direction.
この溝２は、フィラメント素線を線虫する工程で同時に
付与することができる。This groove 2 can be provided at the same time as the process of nematoding the filament wire.
フィラメント１は、目的にもよるが通常０．５〜２ｍｍ
程度の直径で、単線でも数本を撚り合わせて使用するこ
ともできる。Filament 1 is usually 0.5 to 2 mm depending on the purpose.
With a diameter of about 100 yen, it can be used as a single wire or by twisting several wires together.
第３図は、本発明フィラメントの使用状態の一例を示す
側面図であって、渭２を形成した２本のフィラメント１
．１を撚り合わせ、その上にＵ字状に曲げたアルミニウ
ム線３を引っ掛ける。FIG. 3 is a side view showing an example of the usage state of the filament of the present invention, in which two filaments 1 forming a wave 2 are shown.
．． 1 are twisted together, and an aluminum wire 3 bent into a U-shape is hung on top of the twisted aluminum wire 3.
フィラメントｌに通電するとアルミニウム線３が溶融す
るが、フィラメント１表面の溝の作用によりフィラメン
トとの濡れ性がよくなり、また溶融アルミニウムが流動
して均一に付着するので、フィラメントから滴下するこ
となく、好適に蒸着することができる。When the filament 1 is energized, the aluminum wire 3 melts, but the grooves on the surface of the filament 1 improve its wettability with the filament, and the molten aluminum flows and adheres uniformly, so it does not drip from the filament. It can be suitably vapor deposited.
（発明の効果）
本発明によれば、フィラメント表面に多数の溝を形成す
るという簡単な手段により、蒸着物との濡れ性、流動性
をよくして、蒸着物の滴下を有効に防止することができ
る。(Effects of the Invention) According to the present invention, by simply forming a large number of grooves on the surface of the filament, wettability and fluidity with vapor deposits can be improved, and dripping of vapor deposits can be effectively prevented. Can be done.
第１図は本発明フィラメントの一例の斜視図、第２図は
その一部拡大断面図、第３図は本発明フィラメントの使
用状態を例示する側面図。
１・・・フィラメント ２・・・渭FIG. 1 is a perspective view of an example of the filament of the present invention, FIG. 2 is a partially enlarged sectional view thereof, and FIG. 3 is a side view illustrating the usage state of the filament of the present invention. 1...Filament 2...Wai
Claims (1)
成してなる真空蒸着用加熱フィラメント。A heating filament for vacuum deposition that has many fine grooves formed in the length direction on the surface of the filament.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21595188A JPH0266163A (en) | 1988-08-30 | 1988-08-30 | Heating filament for vacuum deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21595188A JPH0266163A (en) | 1988-08-30 | 1988-08-30 | Heating filament for vacuum deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0266163A true JPH0266163A (en) | 1990-03-06 |
Family
ID=16680954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21595188A Pending JPH0266163A (en) | 1988-08-30 | 1988-08-30 | Heating filament for vacuum deposition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0266163A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013200650A1 (en) | 2012-06-15 | 2013-12-19 | Mitsubishi Electric Corp. | Control device and control method for a vehicle AC motor |
-
1988
- 1988-08-30 JP JP21595188A patent/JPH0266163A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013200650A1 (en) | 2012-06-15 | 2013-12-19 | Mitsubishi Electric Corp. | Control device and control method for a vehicle AC motor |
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