KR200333995Y1 - Boride source and its use - Google Patents

Abstract

TECHNICAL FIELD The present invention relates to a vacuum deposition source (evaporator), and more particularly to a boride source source that provides extended source life, stability of the vacuum deposition process and quality of the product produced.

Description

Boride source and its use

The present invention relates to a vacuum evaporation source (evaporation source), and in particular, to provide a vacuum evaporation source (evaporation source) capable of extending the life of the source, as well as the stability of the vacuum evaporation process and the quality of the produced product. There is this.

As described above, the present invention will be used in the vacuum deposition process for extending the life of the source, as well as improving the stability of the process and the quality of the produced product.

The vacuum deposition process has recently been introduced as a pollution-free dry plating method and is a coating method mainly used in the production of high-tech industrial products, and is one of the PVD (physical vapor deposition) methods. It is a kind of plating method for depositing on the material to be coated.

Such a vacuum deposition method itself is not within the scope of the present invention, and the present invention is limited to a product which improves the vacuum evaporation source used in the process, and its construction and use method.

As described above, a vacuum deposition process must first be provided with means for heating the vacuum coating material to a high temperature, and if the heating means is a direct heating source of FIG. 1 as in the prior art, a coating filled on a hot source. Since the material is also heated to a high temperature, the material of the source and the coating material combine to form a new material, which corrodes the material of Source 1, shortening its lifespan and reducing the purity of the coating material.

In addition, when the coating material is a metallic material or an electrically conductive material, the load resistance between the electrode connections 2 and 4 depends on the coating material 3 rather than on the source (evaporation source) 1, so that the process voltage, current, resistance, etc. Due to the change in electrical characteristics, there are various unreasonable problems.

Furthermore, as shown in FIG. 2, the boride source 1 and wire 5 feeding methods may be used to coat the metal material continuously for a long time such as a vacuum roll coater or a continuous vacuum evaporator. In this case, the corrosion around the part 7 where the wire abuts the source is further facilitated. That is, the area is dug deeply to create a pond like 11 in FIG. When the pond 11 is formed, there are various problems that may be caused as a result of the formation of the pond 11, which causes complex phenomena due to changes in process current, unevenness of evaporation rate, and instability of reproducibility.

Even more serious than these problems are the cost of purchasing the source replacement and wasting time on replacement work due to corrosion of the source. This is because the cost of the boride source is very high and the very expensive vacuum system has to be shut down during the replacement work.

1 is a typical type of resistive heating deposition source used for vacuum deposition.

2 is a state of use of a source used in a vacuum roll coater or the like and capable of performing a large amount of deposition by continuously supplying an evaporant.

3 is grooved due to the erosion reaction at the portion where the deposition material is continuously supplied.

4 is a cross-sectional view of a completed source using a combination of a boride source and an auxiliary source to prevent direct erosion of the boride source

5 is a view from above of FIG. 4

6 is a top view of a boride source constructed using an auxiliary source in the form of a thin wire or strip.

7 is a top view of a source formed by zigzag arrangement of wires of an auxiliary source.

1) Source (bolide source-this term refers to a source made of boride material, but hereinafter used to mean a main source made of boride material to distinguish it from auxiliary sources)

2; electrode 3; evaporant

4; electrode 5; deposited material in wire form 6; source pool

7; the melting point as the wire of deposit material is continuously supplied

11; holes dug into the bottom of the sauce pool due to corrosion 17;

19; puddle 23; auxiliary source in wire form

25; wire auxiliary source arranged in zigzag form

27; puddle 29; excess deposition material induction furnace

A vacuum evaporation source consisting of a main source and an auxiliary source used on top of it, such as the structure described in FIG. 4 in accordance with the first aspect of the present invention, in a way that solves the problems described above. ), The main source (1) is a boron compound (boride) comprising boron, both ends thereof are in the form of a boat that is energized and generates heat coupled to the electrodes (2, 4), the main on it A boride source and method of using the same, including another heat-resistant material having a smaller size than the source as the auxiliary sources 17, 23, 25, for example an auxiliary source on a pool 6 of the source. 17 may be provided with a source and a method of using the same. The source may be used by forming a jaw or the like for positioning the auxiliary source, and it is preferable that the upper surface of the auxiliary source, that is, the height of the melting point of the wire, is appropriately higher than the bottom of the pool of the source. Also, in case the auxiliary source needs to be replaced, a means for easily separating the auxiliary source from the source, for example, a small hole to be easily picked up by a device such as tweezers or tweezers, It will be more convenient when picking up. The auxiliary source does not necessarily need to be a single piece, but may be used in several combinations or in various shapes. For example, in order to more reliably fix a thin auxiliary source on the main source 1, another heat-resistant material serving as a fixing weight is placed on one side above the auxiliary plate 17 formed in the shape of the auxiliary source ( 17) can be configured in a form that more firmly fixed. The element represented as an auxiliary source in the above is a third object placed between the source and the deposition material supplied to the source in the state where the deposition process is executed, even though it is not made in the form of the source. If it is not an object that acts to exist on the object 17 can be represented by the auxiliary source (17).

In this configuration, the corrosion that occurs during use will occur at the secondary source 17, and since the corrosion point is located above the pool of the source, even if some corrosion occurs, the problem is that direct corrosion occurs at the boride source. It will be very insignificant compared to the case, and if there is enough corrosion to affect the process, only the auxiliary source 17 can be simply removed and replaced.

As the deposition material is supplied to the source side and the melting point is located higher than the source pool 6, the problem due to some corrosion is weakened. As shown in FIG. 4, the boride source and the auxiliary source are combined into one. Boride source consisting of a single object having a shape similar to that of, i.e., boride source, characterized in that formed by forming one or more protruding portions in a portion of the source pool may be provided.

The auxiliary source may be made of a material equivalent to the boride source, but may be made of another material suitable for each deposition material. However, in this case, since the temperature of the auxiliary source is inevitably lower than the temperature of the main body source, the surface tension of the high temperature deposition material or the melted material (ie, melt-melt) is high, so that it is not suitable for depositing materials having agglomeration properties such as drops. It becomes difficult. This problem can be solved by raising the temperature of the auxiliary source sufficiently high. That is, the material of the auxiliary source is a wire made of a heat-resistant material as shown in Figs. 6 and 7 without using a boride material (but without limitation on the material, for example, tungsten, molybdenum, tantalum, graphite). Made of at least one material selected from the group consisting of; or a metal strip, such as copper, having a high surface tension at high temperatures by By inducing spreading, it enables a smooth deposition process and prevents damage to the boride source itself.

As the auxiliary source material at this time, the better the surface affinity with the vapor deposition materials (3, 5), the better.

The higher temperature of the wire is due to the smaller resistance compared to the boride source, which causes more current to flow. It is preferable to use it.

As mentioned above, when using a source without source pool 6, the molten metal (melt-melt) evaporates at a fairly high rate, so that the evaporant supplied while melting on the source in the form of wires is instantaneous but almost depleted on the source. There may be occasions. In order to prevent this, there is also provided a method of preventing a phenomenon in which the melt is easily depleted by forming a puddle having a suitable size and depth such as 19 and 27 in FIGS. 6 and 7 to allow the melt to remain there. Could be. In this case, when depositing a deposition material having a low electrical resistance such as copper, it is desirable to form the pond small in a shape such as 19 and 27 in FIGS. 6 and 7 instead of one wide and long shape as in the pool 6 of the source. . In some cases, an elongated groove may be formed in the boride source and tungsten wire or the like may be omitted. On the contrary, in order to prevent the excessive melt from being formed on the source, an excess deposition material induction furnace such as 29 in FIG. 7 is formed to induce a part of the excess melt to the side or bottom of the source to rapidly evaporate or under the source. It may also be possible to provide a method of inducing to flow down.

In addition, the reason why the arrangement of the tungsten wire in the zigzag form in FIG. 7 is an example of a method for evenly spreading the metal melt in a larger area.

Example 1

We prepared a boride source of the same specification and compared the usage time when using an auxiliary source and when using an auxiliary source (that is, a conventional method).

After coupling both ends of the main source (1) to the electrodes (2, 4), as shown in Figures 4, 5 is also made of a boride material on the main source (1) and the specification is 1.5mm thick, 10mm wide, After placing the auxiliary source 17 having a length of 30 mm, evacuating the vacuum container, supplying about 7 Kw of power to the electrodes 2 and 4 to heat the main source, and depositing the deposit 5 in the form of an aluminum wire. 4, as shown in FIG. 5, the continuous feeding over the auxiliary source 17 was continued to dissolve and evaporate. In this case, the usable time of the main source 1 appeared to be at least two times longer than the case of using only the main source without the auxiliary source. The boride source having such a configuration is different from the embodiment in which the auxiliary source and the main source are separately manufactured and combined, but the main source and the auxiliary source may be integrated into one source. However, in this case, there is a disadvantage that the manufacturing method is difficult.

Example 2)

On the boride source used in Example 1, a heat-resistant material having a value lower than the wire resistance of the boride source 1, in this case, an auxiliary source made of tungsten wire is placed on the boride source and configured as shown in FIG. The electric power of 7 Kw was heated and the continuous deposition of the copper material in the form of copper wire instead of the aluminum wire used in Example 1 was continued to melt and evaporate. In this case, the auxiliary source made of tungsten wire was able to dissolve and evaporate about twice as much copper as compared with the boride source alone. That is, the deposition production speed can be increased.

In addition to these methods, there are various methods for preventing damage to the main source, including keeping the metal melt evenly and stably spread over the boride source, including the gist of the present invention. If you use it in combination or in combination with other functions, a boride source with more various functions may be constructed, but here are only a few simple examples to help understand the principle and operation.

By using the boride source configured as described above, it is possible to reduce the cost of purchasing the expensive boride source as well as the replacement time, and further increase the stability, reproducibility and productivity of the vacuum deposition process. You will be able to do your share.

Claims (3)

In a vacuum evaporation source consisting of a main source and an auxiliary source used on top of it as an essential component, the main source 1 is a boron compound including boron. The second source 17, 23, 25 is connected to the electrodes (2, 4), the ends of the boat is energized and generates heat, and another heat-resistant material having a smaller size than the main source thereon; Boride source, characterized in that it comprises as delete The boride source according to claim 1, wherein the wire resistance value of the auxiliary source (17, 23, 25) is made of a heat resistant material smaller than the wire resistance value of the main source (1).