JPH0266019U - - Google Patents
Info
- Publication number
- JPH0266019U JPH0266019U JP14524588U JP14524588U JPH0266019U JP H0266019 U JPH0266019 U JP H0266019U JP 14524588 U JP14524588 U JP 14524588U JP 14524588 U JP14524588 U JP 14524588U JP H0266019 U JPH0266019 U JP H0266019U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric resonator
- disc
- spacer portion
- etching
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004439 roughness measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14524588U JPH0266019U (is) | 1988-11-07 | 1988-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14524588U JPH0266019U (is) | 1988-11-07 | 1988-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0266019U true JPH0266019U (is) | 1990-05-18 |
Family
ID=31413669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14524588U Pending JPH0266019U (is) | 1988-11-07 | 1988-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0266019U (is) |
-
1988
- 1988-11-07 JP JP14524588U patent/JPH0266019U/ja active Pending