JPH0265335U - - Google Patents
Info
- Publication number
- JPH0265335U JPH0265335U JP14549388U JP14549388U JPH0265335U JP H0265335 U JPH0265335 U JP H0265335U JP 14549388 U JP14549388 U JP 14549388U JP 14549388 U JP14549388 U JP 14549388U JP H0265335 U JPH0265335 U JP H0265335U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- tapered
- reaction tube
- wafer
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14549388U JPH0265335U (es) | 1988-11-07 | 1988-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14549388U JPH0265335U (es) | 1988-11-07 | 1988-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0265335U true JPH0265335U (es) | 1990-05-16 |
Family
ID=31414134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14549388U Pending JPH0265335U (es) | 1988-11-07 | 1988-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0265335U (es) |
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1988
- 1988-11-07 JP JP14549388U patent/JPH0265335U/ja active Pending