JPS6221081U - - Google Patents
Info
- Publication number
- JPS6221081U JPS6221081U JP11333985U JP11333985U JPS6221081U JP S6221081 U JPS6221081 U JP S6221081U JP 11333985 U JP11333985 U JP 11333985U JP 11333985 U JP11333985 U JP 11333985U JP S6221081 U JPS6221081 U JP S6221081U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- nozzle
- bellgear
- rotation
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11333985U JPS6221081U (es) | 1985-07-23 | 1985-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11333985U JPS6221081U (es) | 1985-07-23 | 1985-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221081U true JPS6221081U (es) | 1987-02-07 |
Family
ID=30995052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11333985U Pending JPS6221081U (es) | 1985-07-23 | 1985-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221081U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08316153A (ja) * | 1995-05-19 | 1996-11-29 | Nec Corp | 気相成長装置 |
-
1985
- 1985-07-23 JP JP11333985U patent/JPS6221081U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08316153A (ja) * | 1995-05-19 | 1996-11-29 | Nec Corp | 気相成長装置 |