JPH0263990U - - Google Patents
Info
- Publication number
- JPH0263990U JPH0263990U JP14123388U JP14123388U JPH0263990U JP H0263990 U JPH0263990 U JP H0263990U JP 14123388 U JP14123388 U JP 14123388U JP 14123388 U JP14123388 U JP 14123388U JP H0263990 U JPH0263990 U JP H0263990U
- Authority
- JP
- Japan
- Prior art keywords
- shaped
- clamp
- shaped lever
- conveyed object
- rails
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Automatic Assembly (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14123388U JPH0637906Y2 (ja) | 1988-10-31 | 1988-10-31 | 板状物体搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14123388U JPH0637906Y2 (ja) | 1988-10-31 | 1988-10-31 | 板状物体搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0263990U true JPH0263990U (it) | 1990-05-14 |
JPH0637906Y2 JPH0637906Y2 (ja) | 1994-10-05 |
Family
ID=31406126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14123388U Expired - Lifetime JPH0637906Y2 (ja) | 1988-10-31 | 1988-10-31 | 板状物体搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0637906Y2 (it) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017183665A (ja) * | 2016-03-31 | 2017-10-05 | 芝浦メカトロニクス株式会社 | 基板搬送装置、基板処理装置及び基板処理方法 |
-
1988
- 1988-10-31 JP JP14123388U patent/JPH0637906Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017183665A (ja) * | 2016-03-31 | 2017-10-05 | 芝浦メカトロニクス株式会社 | 基板搬送装置、基板処理装置及び基板処理方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0637906Y2 (ja) | 1994-10-05 |
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