JPH0263533U - - Google Patents
Info
- Publication number
- JPH0263533U JPH0263533U JP14355588U JP14355588U JPH0263533U JP H0263533 U JPH0263533 U JP H0263533U JP 14355588 U JP14355588 U JP 14355588U JP 14355588 U JP14355588 U JP 14355588U JP H0263533 U JPH0263533 U JP H0263533U
- Authority
- JP
- Japan
- Prior art keywords
- gas blowing
- processing chamber
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14355588U JPH0263533U (fr) | 1988-11-01 | 1988-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14355588U JPH0263533U (fr) | 1988-11-01 | 1988-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0263533U true JPH0263533U (fr) | 1990-05-11 |
Family
ID=31410481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14355588U Pending JPH0263533U (fr) | 1988-11-01 | 1988-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0263533U (fr) |
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1988
- 1988-11-01 JP JP14355588U patent/JPH0263533U/ja active Pending