JPH0263103A - Trimming apparatus - Google Patents

Abstract

PURPOSE:To reduce a cost of equipment and to reduce a maintenance job of a laser generation apparatus and a laser oscillator by a method wherein a laser beam generated by one laser oscillator is branched and supplied individually to trimming apparatus main bodies and required trimming operations are executed at the same time. CONSTITUTION:A plurality of trimming apparatus main bodies 2 are combined with one laser generation apparatus 1. That is a laser beam generated by using one oscillation power supply 1a and one laser oscillator 1b is branched into a plurality of beams. The branched laser beams are guided (fed) to a plurality of trimming apparatus main bodies 2, and required trimming operations are executed. When one laser oscillator is driven, individually required trimming operations of, e.g., thick-film circuits can be executed on the plural trimming apparatus main bodies.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a trimming device, and particularly to a trimming device that uses a laser beam for trimming.

(Prior Art) For example, in the manufacture of thick film circuit boards, trimming is often performed on printed resistors formed by a printing method. That is, it is well known that when commercializing or using the thick film circuit configured as described above, the printed resistor is cut as appropriate to change the resistance value and adjust the characteristics of the entire circuit.

By the way, as a device for trimming the above-mentioned printed resistor etc., for example, a laser trimming system or a laser trimming device as shown in FIG. 2 is put into practical use.

FIG. 2 is a block diagram of the laser trimming device, which includes a laser beam generator 1 and a trimming device main body 2 as main components. That is, laser light generated by a laser light generating device 1 composed of an oscillation power source 1 a and a laser light oscillator 1 b is guided to a trimming device 2 . On the other hand, in the trimming process 2, the characteristics of the X-Y table 2b on which the electronic component 2a to be trimmed is placed and the electronic component 2a to be trimmed are checked. #1 regulator 2c,
Based on the measurement result by the measuring device 2c, a shutter unit lc is used to pass or block the laser beam guided from the laser generator 1, and a driver mechanism for the swinging mirror 2d changes the angle of the laser beam irradiated onto electronic components. 2e, and drive control means 2r for controlling the drive of each drive unit 2e. In the above trimming device, the electronic component 2a to be trimmed is moved in the X-Y direction, and the laser beam irradiation position (in the X-Y direction) by the swinging mirror 2d is moved relative to each other.

(Problem to be Solved by the Invention) As mentioned above, the conventional laser trimming system or laser trimming device is configured with one laser generator (laser oscillator) and two trimming device bodies. , and the laser beam output from the laser oscillator tb is directly guided to the trimming device main body 2 to perform the required trimming. By the way, as mentioned above, since 1b laser oscillators are combined for each 2 trimming device bodies, a considerable amount of space will be required if a plurality of trimming devices are to be installed.

Moreover, the laser oscillator 1b is not only relatively expensive and requires high equipment costs, but also requires maintenance.

Regarding this maintenance, the more the number of laser oscillators 1b increases, the more time and cost it takes. Also,
Since the laser generator 1 is provided for each laser trimming device main body, piping for cooling water and waste water to the oscillation power source 1a is required, which is uneconomical.

[Structure of the Invention] (Means for Solving the Problems) The present invention has been made in view of the above-mentioned circumstances, and the main point is that a plurality of trimming device bodies are combined with one laser generator. shall be. In other words, the laser beam generated using one oscillation power supply and one laser oscillator is divided into multiple beams, and the divided laser beams are guided (sent) to multiple trimming devices to perform the required trimming. This is what I did.

(Function) The trimming device of the present invention employing the above configuration or means has the following features:
By driving multiple laser oscillators, it is possible to simultaneously perform required trimming, for example, on thick film circuits, using a plurality of trimming device bodies.

That is, the laser beams generated from the - laser oscillators are divided into a plurality of beams, and each of these divided laser beams is sent to a separate trimming device body, and the beams are adjusted to correspond to the trimming state in each trimming device body. Then, irradiation or non-irradiation of the laser beam is appropriately controlled to perform the required trimming process.

(Example) The present invention will be described in detail below with reference to FIG. FIG. 1 is a block diagram showing an example of the configuration of the trimming device of the present invention, in which 1 indicates an oscillation power source 1a and a laser oscillator, such as a YAG
This is a laser generator consisting of a laser oscillator 1b.

2 is the main body of the trimming device, and the object to be processed, for example, the thick film circuit 2
an X-Y table 2b on which a is placed, and the thick film circuit 2a
A measuring device 2C detects the trimming state of the nrt, and a laser beam for controlling the movement of the nrt X-Y table in the XYh direction and trimming processing based on the n1 constant result of the n1 constant device 2c. and a drive control means 2f that controls the drive of a shutter unit (described later) that supplies or cuts off the power.

Reference numeral 3 denotes a laser beam branch unit, which is interposed between the laser generator 1 and the trimming device body 2, and divides the laser beam generated by the laser generator 1 into a plurality of beams, and divides the divided laser beams into multiple beams. , each plays the role of sending to the corresponding trimming device main body 2 side. That is, in this laser beam branching unit section 3, a plurality of half mirrors 3a1.3a2.3a3 forming a branching unit are sequentially arranged on the traveling axis of the laser beam, and these half mirrors 3a+, 3a2
．． 3a3, each of the laser beams is branched into a straight laser beam A and a reflected laser beam B. To further explain this point, the laser beam traveling straight from the laser oscillator tb is a half mirror.
The one that goes straight through 3a1 is the next half mirror - 3a
2, the reflected laser beam B passes through an optical fiber 3c that guides the required laser beam to the trimming device main body 2 via a shutter unit 3b1 that blocks the passage of the laser beam.
The light is input to the first input unit 3d. Similarly, the half mirror 3a2.3ax is split into straight light A and reflected light B, and the reflected light B is transmitted to each shutter unit 3b.
The light is emitted from the input units 3d2 and 3d3 through the input units 2 and 3b3, guided by the optical fibers /(-3c2 and 3c3, and supplied to the corresponding trimming device bodies (paths shown). Here, the laser light supplied to the trimming device main body 2 and the like is irradiated from the laser light emitting unit 2g1 and contributes to the required trimming process.

In addition, in the above embodiment, a YAG laser oscillator was used as the laser oscillator, but other laser oscillators may be used.
Further, the laser beam guide path for guiding or supplying the laser beams separated by the laser beam branching unit to the corresponding trimming device main body is not limited to an optical fiber, and may be any other optical system.

[Effects of the Invention] As described above, the trimming device of the present invention has a configuration in which a -base laser oscillator and a plurality of trimming device bodies are coupled via a laser beam branching unit. That is, the laser beams generated from the - laser oscillators are branched into a plurality of beams and supplied to a plurality of trimming apparatus bodies, respectively, so that required trimming can be performed simultaneously. Therefore, for example, in the mass production of thin film circuits, the present invention is suitable for mass production trimming of these thin film circuits.

Furthermore, since -1 laser oscillator is sufficient for multiple trimming device bodies, and the required trimming processing can be performed for each, not only can the installation space be reduced, at least by the amount of reduced laser generators. There are many practical advantages, such as reduced equipment costs and reduced maintenance for laser generators and laser oscillators.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing an example of the configuration of a trimming device according to the present invention, and FIG. 2 is a block diagram showing the configuration of a conventional trimming device. 1...Laser generator ■a b 2'a1 sb+ c1...Oscillation power source...Laser oscillator...Trimming device body...Drive control means...Laser beam branching unit, 3a2.3a3.・・Half mirror 13b2.3b3・・Shutter unit, 3C2,
3C3...Laser light guide path applicant Toshiba Corporation

Claims (1)

[Claims] a laser generator, a branching unit that splits the laser beam generated by the laser generator into a plurality of beams, a plurality of shutter units that individually pass and block the laser beams split into a plurality of beams by the branching unit; A laser light guide path that separately guides the laser light that has passed through each shutter unit; a plurality of trimming device bodies that trim the laser light guided through each of the laser light guide paths; A trimming device comprising drive control means for driving and controlling each of the corresponding shutter units using a signal.