JPH0262722U - - Google Patents

Info

Publication number
JPH0262722U
JPH0262722U JP13993288U JP13993288U JPH0262722U JP H0262722 U JPH0262722 U JP H0262722U JP 13993288 U JP13993288 U JP 13993288U JP 13993288 U JP13993288 U JP 13993288U JP H0262722 U JPH0262722 U JP H0262722U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
housing
hanging piece
lid
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13993288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13993288U priority Critical patent/JPH0262722U/ja
Publication of JPH0262722U publication Critical patent/JPH0262722U/ja
Pending legal-status Critical Current

Links

JP13993288U 1988-10-28 1988-10-28 Pending JPH0262722U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13993288U JPH0262722U (enrdf_load_stackoverflow) 1988-10-28 1988-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13993288U JPH0262722U (enrdf_load_stackoverflow) 1988-10-28 1988-10-28

Publications (1)

Publication Number Publication Date
JPH0262722U true JPH0262722U (enrdf_load_stackoverflow) 1990-05-10

Family

ID=31403647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13993288U Pending JPH0262722U (enrdf_load_stackoverflow) 1988-10-28 1988-10-28

Country Status (1)

Country Link
JP (1) JPH0262722U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040023858A (ko) * 2002-09-12 2004-03-20 삼성전자주식회사 반도체 소자 제조에 사용되는 런박스

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040023858A (ko) * 2002-09-12 2004-03-20 삼성전자주식회사 반도체 소자 제조에 사용되는 런박스

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