JPH0262553U - - Google Patents

Info

Publication number
JPH0262553U
JPH0262553U JP14100288U JP14100288U JPH0262553U JP H0262553 U JPH0262553 U JP H0262553U JP 14100288 U JP14100288 U JP 14100288U JP 14100288 U JP14100288 U JP 14100288U JP H0262553 U JPH0262553 U JP H0262553U
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JP
Japan
Prior art keywords
light
workpiece
lamp
processing chamber
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14100288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14100288U priority Critical patent/JPH0262553U/ja
Publication of JPH0262553U publication Critical patent/JPH0262553U/ja
Pending legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
JP14100288U 1988-10-31 1988-10-31 Pending JPH0262553U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14100288U JPH0262553U (enrdf_load_stackoverflow) 1988-10-31 1988-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14100288U JPH0262553U (enrdf_load_stackoverflow) 1988-10-31 1988-10-31

Publications (1)

Publication Number Publication Date
JPH0262553U true JPH0262553U (enrdf_load_stackoverflow) 1990-05-10

Family

ID=31405682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14100288U Pending JPH0262553U (enrdf_load_stackoverflow) 1988-10-31 1988-10-31

Country Status (1)

Country Link
JP (1) JPH0262553U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236666A (ja) * 1985-08-10 1987-02-17 Fujitsu Ltd アツシング方法
JPS63271933A (ja) * 1987-04-28 1988-11-09 Tokyo Electron Ltd アツシング方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236666A (ja) * 1985-08-10 1987-02-17 Fujitsu Ltd アツシング方法
JPS63271933A (ja) * 1987-04-28 1988-11-09 Tokyo Electron Ltd アツシング方法

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