JPH01108925U - - Google Patents

Info

Publication number
JPH01108925U
JPH01108925U JP401988U JP401988U JPH01108925U JP H01108925 U JPH01108925 U JP H01108925U JP 401988 U JP401988 U JP 401988U JP 401988 U JP401988 U JP 401988U JP H01108925 U JPH01108925 U JP H01108925U
Authority
JP
Japan
Prior art keywords
ultraviolet light
reaction chamber
gas
fixing table
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP401988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0621234Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP401988U priority Critical patent/JPH0621234Y2/ja
Publication of JPH01108925U publication Critical patent/JPH01108925U/ja
Application granted granted Critical
Publication of JPH0621234Y2 publication Critical patent/JPH0621234Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP401988U 1988-01-14 1988-01-14 半導体製造装置 Expired - Lifetime JPH0621234Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP401988U JPH0621234Y2 (ja) 1988-01-14 1988-01-14 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP401988U JPH0621234Y2 (ja) 1988-01-14 1988-01-14 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH01108925U true JPH01108925U (enrdf_load_stackoverflow) 1989-07-24
JPH0621234Y2 JPH0621234Y2 (ja) 1994-06-01

Family

ID=31206160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP401988U Expired - Lifetime JPH0621234Y2 (ja) 1988-01-14 1988-01-14 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0621234Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0621234Y2 (ja) 1994-06-01

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