JPH0261054U - - Google Patents
Info
- Publication number
- JPH0261054U JPH0261054U JP14063588U JP14063588U JPH0261054U JP H0261054 U JPH0261054 U JP H0261054U JP 14063588 U JP14063588 U JP 14063588U JP 14063588 U JP14063588 U JP 14063588U JP H0261054 U JPH0261054 U JP H0261054U
- Authority
- JP
- Japan
- Prior art keywords
- analyzer
- electromagnetic lens
- electron beam
- passed
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 1
Description
第１図は本考案の一実施例を説明するための装
置構成図、第２図は従来例を説明するための図で
ある。
１：電子顕微鏡筐筒、２：電磁レンズ、３：電
磁レンズ、４：エネルギーアナライザ、５ａ，５
ｂ：電子線通路、６：分析室、７：環状電気絶縁
部材、８：高圧ケーブル、１０：磁気遮蔽板、１
１：中空箱状磁気遮蔽体、１２：開口。
FIG. 1 is an apparatus configuration diagram for explaining an embodiment of the present invention, and FIG. 2 is a diagram for explaining a conventional example. 1: Electron microscope housing, 2: Electromagnetic lens, 3: Electromagnetic lens, 4: Energy analyzer, 5a, 5
b: Electron beam passage, 6: Analysis chamber, 7: Annular electrical insulation member, 8: High voltage cable, 10: Magnetic shielding plate, 1
1: Hollow box-shaped magnetic shield, 12: Opening.
Claims (1)
過した電子線を分析選別するエネルギーアナライ
ザと、該アナライザを通過した電子線を集束する
第２の電磁レンズを備えた電子顕微鏡において、
電子線の通路となる部分を除いて前記アナライザ
を磁気遮蔽板で包囲し、前記第１の電磁レンズと
前記アナライザ及び前記第２の電磁レンズと前記
アナライザの間に中空箱状の磁気遮蔽体を配置す
ると共に、該夫々の磁気遮蔽体に電子線通過用の
開口を設けたことを特徴とする電子顕微鏡。 An electron microscope comprising a first electromagnetic lens, an energy analyzer that analyzes and sorts the electron beam that has passed through the first electromagnetic lens, and a second electromagnetic lens that focuses the electron beam that has passed through the analyzer,
The analyzer is surrounded by a magnetic shielding plate except for a portion where the electron beam passes, and a hollow box-shaped magnetic shield is provided between the first electromagnetic lens and the analyzer and between the second electromagnetic lens and the analyzer. What is claimed is: 1. An electron microscope characterized in that each of the magnetic shields is arranged such that an opening for passing an electron beam is provided in each of the magnetic shields.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14063588U JPH0548356Y2 (en) | 1988-10-28 | 1988-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14063588U JPH0548356Y2 (en) | 1988-10-28 | 1988-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0261054U true JPH0261054U (en) | 1990-05-07 |
| JPH0548356Y2 JPH0548356Y2 (en) | 1993-12-24 |
Family
ID=31404989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14063588U Expired - Lifetime JPH0548356Y2 (en) | 1988-10-28 | 1988-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548356Y2 (en) |
-
1988
- 1988-10-28 JP JP14063588U patent/JPH0548356Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548356Y2 (en) | 1993-12-24 |
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