JPH0260838U - - Google Patents

Info

Publication number
JPH0260838U
JPH0260838U JP14041588U JP14041588U JPH0260838U JP H0260838 U JPH0260838 U JP H0260838U JP 14041588 U JP14041588 U JP 14041588U JP 14041588 U JP14041588 U JP 14041588U JP H0260838 U JPH0260838 U JP H0260838U
Authority
JP
Japan
Prior art keywords
sensor chip
chamber
recess
liquid contact
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14041588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH073311Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14041588U priority Critical patent/JPH073311Y2/ja
Publication of JPH0260838U publication Critical patent/JPH0260838U/ja
Application granted granted Critical
Publication of JPH073311Y2 publication Critical patent/JPH073311Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP14041588U 1988-10-27 1988-10-27 半導体差圧測定装置 Expired - Lifetime JPH073311Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14041588U JPH073311Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14041588U JPH073311Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Publications (2)

Publication Number Publication Date
JPH0260838U true JPH0260838U (US07968547-20110628-C00004.png) 1990-05-07
JPH073311Y2 JPH073311Y2 (ja) 1995-01-30

Family

ID=31404562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14041588U Expired - Lifetime JPH073311Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Country Status (1)

Country Link
JP (1) JPH073311Y2 (US07968547-20110628-C00004.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006349682A (ja) * 2005-06-14 2006-12-28 Robert Bosch Gmbh 高圧センサ装置および該高圧センサ装置を製作するための方法
JP2014160084A (ja) * 2008-04-28 2014-09-04 Epcos Ag 圧力センサ
JP2016003994A (ja) * 2014-06-18 2016-01-12 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006349682A (ja) * 2005-06-14 2006-12-28 Robert Bosch Gmbh 高圧センサ装置および該高圧センサ装置を製作するための方法
JP2014160084A (ja) * 2008-04-28 2014-09-04 Epcos Ag 圧力センサ
JP2016003994A (ja) * 2014-06-18 2016-01-12 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体

Also Published As

Publication number Publication date
JPH073311Y2 (ja) 1995-01-30

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