JPH0260239U - - Google Patents
Info
- Publication number
- JPH0260239U JPH0260239U JP13851988U JP13851988U JPH0260239U JP H0260239 U JPH0260239 U JP H0260239U JP 13851988 U JP13851988 U JP 13851988U JP 13851988 U JP13851988 U JP 13851988U JP H0260239 U JPH0260239 U JP H0260239U
- Authority
- JP
- Japan
- Prior art keywords
- positional deviation
- die
- stage
- deviation correction
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988138519U JPH085551Y2 (ja) | 1988-10-24 | 1988-10-24 | ダイの位置ずれ補正装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988138519U JPH085551Y2 (ja) | 1988-10-24 | 1988-10-24 | ダイの位置ずれ補正装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260239U true JPH0260239U (OSRAM) | 1990-05-02 |
| JPH085551Y2 JPH085551Y2 (ja) | 1996-02-14 |
Family
ID=31400931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988138519U Expired - Lifetime JPH085551Y2 (ja) | 1988-10-24 | 1988-10-24 | ダイの位置ずれ補正装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085551Y2 (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60248323A (ja) * | 1984-05-25 | 1985-12-09 | 松下電工株式会社 | ダイボンダ−のセンタリング装置 |
| JPS62219537A (ja) * | 1986-03-19 | 1987-09-26 | Mitsubishi Electric Corp | 半導体製造装置 |
-
1988
- 1988-10-24 JP JP1988138519U patent/JPH085551Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60248323A (ja) * | 1984-05-25 | 1985-12-09 | 松下電工株式会社 | ダイボンダ−のセンタリング装置 |
| JPS62219537A (ja) * | 1986-03-19 | 1987-09-26 | Mitsubishi Electric Corp | 半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH085551Y2 (ja) | 1996-02-14 |