JPH0260230U - - Google Patents
Info
- Publication number
- JPH0260230U JPH0260230U JP13818288U JP13818288U JPH0260230U JP H0260230 U JPH0260230 U JP H0260230U JP 13818288 U JP13818288 U JP 13818288U JP 13818288 U JP13818288 U JP 13818288U JP H0260230 U JPH0260230 U JP H0260230U
- Authority
- JP
- Japan
- Prior art keywords
- shielding means
- lens system
- cylindrical portion
- source section
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988138182U JPH064576Y2 (ja) | 1988-10-25 | 1988-10-25 | ウエハ周辺露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988138182U JPH064576Y2 (ja) | 1988-10-25 | 1988-10-25 | ウエハ周辺露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260230U true JPH0260230U (tr) | 1990-05-02 |
| JPH064576Y2 JPH064576Y2 (ja) | 1994-02-02 |
Family
ID=31400285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988138182U Expired - Lifetime JPH064576Y2 (ja) | 1988-10-25 | 1988-10-25 | ウエハ周辺露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064576Y2 (tr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6060724A (ja) * | 1983-09-14 | 1985-04-08 | Toshiba Corp | 半導体露光装置 |
| JPS6173330A (ja) * | 1984-09-18 | 1986-04-15 | Nec Corp | 半導体デバイス製造装置 |
-
1988
- 1988-10-25 JP JP1988138182U patent/JPH064576Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6060724A (ja) * | 1983-09-14 | 1985-04-08 | Toshiba Corp | 半導体露光装置 |
| JPS6173330A (ja) * | 1984-09-18 | 1986-04-15 | Nec Corp | 半導体デバイス製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH064576Y2 (ja) | 1994-02-02 |