JPH0259451U - - Google Patents

Info

Publication number

JPH0259451U

JPH0259451U JP13735888U JP13735888U JPH0259451U JP H0259451 U JPH0259451 U JP H0259451U JP 13735888 U JP13735888 U JP 13735888U JP 13735888 U JP13735888 U JP 13735888U JP H0259451 U JPH0259451 U JP H0259451U

Authority

JP

Japan

Prior art keywords

output

pressure

diaphragm

diaphragms

silicon

Prior art date

1988-10-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005259 measurement Methods 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 230000007246 mechanism Effects 0.000 claims description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
• 229910052710 silicon Inorganic materials 0.000 claims 3
• 239000010703 silicon Substances 0.000 claims 3
• 230000002265 prevention Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 239000007788 liquid Substances 0.000 description 3
• 230000003321 amplification Effects 0.000 description 1
• 238000003199 nucleic acid amplification method Methods 0.000 description 1